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    • 2. 发明申请
    • METHOD AND APPARATUS FOR MEASURING GAS CONCENTRATIONS
    • 测量气体浓度的方法和装置
    • US20120318041A1
    • 2012-12-20
    • US13162119
    • 2011-06-16
    • Daniel YoungnerLisa Lust
    • Daniel YoungnerLisa Lust
    • G01N21/17
    • G01N21/1702
    • Some embodiments are directed to a photoacoustic sensor. The photoacoustic sensor may comprise: a gas cell with an opening; a light source to generate to radiate a sample gas within the gas cell; an optical microphone to detect the sample gas within the gas cell; and a membrane aligned with the opening of the gas cell to permit sample gas to enter the gas cell. The optical microphone includes a semiconducting laser. The semiconducting laser includes a p-n junction within a cavity of the semiconducting laser. The optical microphone further includes a pressure-sensitive membrane that receives coherent light emitted from the semiconducting laser and directs reflected light back toward the semiconducting laser. During operation of the optical microphone, the pressure-sensitive membrane flexes in response to acoustic pressure waves. The phase of the reflected light is dependent upon a distance of the pressure-sensitive membrane from an aperture of the semiconducting laser.
    • 一些实施例涉及光声传感器。 光声传感器可以包括:具有开口的气室; 用于产生以在气室内辐射样气的光源; 用于检测气室内的样品气体的光学麦克风; 以及与气室的开口对准的膜,以允许样品气体进入气室。 光学麦克风包括半导体激光器。 半导体激光器包括在半导体激光器的空腔内的p-n结。 光学传声器还包括压敏膜,其接收从半导体激光器发射的相干光并将反射光引导回半导体激光器。 在光学麦克风的操作期间,压敏膜响应于声压波而弯曲。 反射光的相位取决于压敏膜与半导体激光器的孔的距离。
    • 5. 发明授权
    • Planarization of dielectric layers in integrated circuits
    • 集成电路中介质层的平面化
    • US4642162A
    • 1987-02-10
    • US815603
    • 1986-01-02
    • David J. BrownellDaniel C. ChristensenDavid G. ErieDaniel Youngner
    • David J. BrownellDaniel C. ChristensenDavid G. ErieDaniel Youngner
    • H01L21/3105H01L21/768B44C1/22C03B15/00
    • H01L21/76819H01L21/31055
    • A method is disclosed for the planarization of a semiconductor device structure by a two stage planarization process which comprises: applying a dielectric layer over a first conductive layer, spin coating an organic layer onto the first dielectric layer, etching the device in a plasma etching process to substantially remove the organic planarization layer, then etching the device in a plasma etching process which etches the exposed dielectric layer to substantially remove all of it, removing the remaining organic planarization layer, followed by the application of a second dielectric layer under bias sputter deposition conditions. The bias sputter deposition fills trenches and eliminates peaks in the remaining first dielectric layer as it builds up the second dielectric layer. The process planarizes the dielectric layer without thickness variations dependent upon conductor layer pattern density.
    • 公开了一种通过两级平坦化工艺对半导体器件结构进行平面化的方法,该方法包括:在第一导电层上施加电介质层,将有机层旋涂到第一介电层上,在等离子体蚀刻工艺中蚀刻器件 以基本上去除有机平坦化层,然后在等离子体蚀刻工艺中蚀刻该器件,其蚀刻暴露的电介质层以基本上除去其中的所有材料,去除剩余的有机平坦化层,随后在偏置溅射沉积下施加第二介电层 条件。 偏置溅射沉积填充沟槽并消除剩余的第一介电层中的峰值,因为它构成第二介电层。 该过程使介电层平坦化,而不依赖于导体层图案密度的厚度变化。
    • 7. 发明授权
    • Method and apparatus for measuring gas concentrations
    • 测量气体浓度的方法和装置
    • US08594507B2
    • 2013-11-26
    • US13162119
    • 2011-06-16
    • Daniel YoungnerLisa Lust
    • Daniel YoungnerLisa Lust
    • H04B10/00
    • G01N21/1702
    • Some embodiments are directed to a photoacoustic sensor. The photoacoustic sensor may comprise: a gas cell with an opening; a light source to generate to radiate a sample gas within the gas cell; an optical microphone to detect the sample gas within the gas cell; and a membrane aligned with the opening of the gas cell to permit sample gas to enter the gas cell. The optical microphone includes a semiconducting laser. The semiconducting laser includes a p-n junction within a cavity of the semiconducting laser. The optical microphone further includes a pressure-sensitive membrane that receives coherent light emitted from the semiconducting laser and directs reflected light back toward the semiconducting laser. During operation of the optical microphone, the pressure-sensitive membrane flexes in response to acoustic pressure waves. The phase of the reflected light is dependent upon a distance of the pressure-sensitive membrane from an aperture of the semiconducting laser.
    • 一些实施例涉及光声传感器。 光声传感器可以包括:具有开口的气室; 用于产生以在气室内辐射样气的光源; 用于检测气室内的样品气体的光学麦克风; 以及与气室的开口对准的膜,以允许样品气体进入气室。 光学麦克风包括半导体激光器。 半导体激光器包括在半导体激光器的空腔内的p-n结。 光学传声器还包括压敏膜,其接收从半导体激光器发射的相干光并将反射光引导回半导体激光器。 在光学麦克风的操作期间,压敏膜响应于声压波而弯曲。 反射光的相位取决于压敏膜与半导体激光器的孔的距离。