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    • 17. 发明授权
    • Surface position detection device and exposure apparatus and exposure method achieved by utilizing detection device
    • 利用检测装置实现表面位置检测装置和曝光装置及曝光方法
    • US06897462B2
    • 2005-05-24
    • US09832837
    • 2001-04-12
    • Toru Kawaguchi
    • Toru Kawaguchi
    • G01B11/00G01N21/95G02B7/28G03F7/20G03F9/02H01L21/027G01N21/86
    • G01N21/9501
    • A surface position detection device that detects a surface position of a detection target surface (Wa) includes a projection system (1˜6) that projects a light flux onto the detection target surface from a diagonal direction, a light-receiving system (7˜14) that receives a light flux reflected from the detection target surface, and a means for light flux deflection (6, 7), which includes an even number of reflection surfaces to allow an incident light flux to exit at an angle not parallel to the incident light flux. The means for light flux deflection is disposed either in the optical path of the projection system or the optical path of the light-receiving system. The surface position of the detection target surface is detected based upon an output from the light-receiving system. Any deterioration in the detection accuracy attributable to outside vibration can be successfully prevented.
    • 检测被检测体表面(Wa)的表面位置的表面位置检测装置具有从对角线方向将光束投射到检测对象面上的投影系统(1〜6),光接收系统(7〜 14),其接收从检测对象面反射的光束,以及包含偶数个反射面的光束偏转装置(6,7),以允许入射光束以不平行于 入射光通量。 用于光束偏转的装置设置在投影系统的光路或光接收系统的光路中。 基于光接收系统的输出来检测检测对象面的表面位置。 可以成功地防止归因于外部振动的检测精度的任何劣化。