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21. 发明授权

US08305711B2 Process of octagonal pole for microwave assisted magnetic recording (MAMR) writer 有权
标题翻译：微波辅助磁记录（MAMR）作者八角极的过程
公开(公告)号：US08305711B2
公开(公告)日：2012-11-06
申请号：US12660819
申请日：2010-03-03
申请人： Min Li , Cherng-Chyi Han , Kenichi Takano , Joe Smyth
发明人： Min Li , Cherng-Chyi Han , Kenichi Takano , Joe Smyth
IPC分类号： G11B5/187 , G11B5/127 , G11B5/02
CPC分类号： G11B5/314 , G11B5/1278 , G11B2005/0024
摘要： A microwave assisted magnetic recording writer is disclosed with an octagonal write pole having a top portion including a trailing edge that is self aligned to a spin transfer oscillator (STO). Leading and trailing edges are connected by two sidewalls each having three sections. A first section on each side is coplanar with the STO sidewalls and is connected to a sloped second section at a first corner. Each second section is connected to a third section at a second corner where the distance between second corners is greater than the distance between first corners. A method of forming the writer begins with a trapezoidal shaped write pole in an insulation layer. Two ion beam etch (IBE) steps are used to shape top and middle portions of the write pole and narrow the pole width to
摘要翻译：公开了一种具有八角写磁极的微波辅助磁记录装置，其具有包括与自旋转移振荡器（STO）自对准的后沿的顶部。前缘和后缘由具有三个部分的两个侧壁连接。每侧的第一部分与STO侧壁共面，并且在第一角处连接到倾斜的第二部分。每个第二部分连接到第二角处的第三部分，其中第二角之间的距离大于第一角之间的距离。一种形成写入器的方法从绝缘层中的梯形写入极开始。使用两个离子束蚀刻（IBE）步骤来形成写入极的顶部和中间部分，并将极宽度窄化到<50nm而不会破裂。最后，在STO上形成一个后挡板。

22. 发明授权

US07898773B2 Perpendicular magnetic recording head with a side write shield 有权
标题翻译：垂直磁记录头带有侧写屏蔽
公开(公告)号：US07898773B2
公开(公告)日：2011-03-01
申请号：US11345892
申请日：2006-02-02
申请人： Cherng-Chyi Han , Min Li , Fenglin Liu , Jiun-Ting Lee
发明人： Cherng-Chyi Han , Min Li , Fenglin Liu , Jiun-Ting Lee
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , G11B5/11 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/315 , Y10T29/49032 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A perpendicular magnetic recording (PMR) head is fabricated with a pole tip shielded laterally by a separated pair of side shields and shielded from above by an upper shield. The side shields are formed by a RIE process using specific gases applied to a shield layer through a masking layer formed of material that has a slower etch rate than the shield material. A masking layer of Ta, Ru/Ta, TaN or Ti, formed on a shield layer of NiFe and using RIE gases of CH3OH, CO or NH3 or their combinations, produces the desired result. The differential in etch rates maintains the opening dimension within the mask and allows the formation of a wedge-shaped trench within the shield layer that separates the layer into two shields. The pole tip is then plated within the trench and, being aligned by the trench, acquires the wedge-shaped cross-section of the trench. An upper shield is then formed above the side shields and pole.
摘要翻译：垂直磁记录（PMR）头被制造成具有通过分离的一对侧屏蔽横向屏蔽的极尖并且被上屏蔽从上面屏蔽。侧面屏蔽是通过RIE工艺形成的，其使用通过掩模层施加到屏蔽层上的特定气体，该屏蔽层由具有比屏蔽材料更慢的蚀刻速率的材料形成。形成在NiFe的屏蔽层上并使用CH 3 OH，CO或NH 3的RIE气体或其组合的Ta，Ru / Ta，TaN或Ti的掩蔽层产生期望的结果。蚀刻速率的差异保持了掩模内的开口尺寸，并且允许在屏蔽层内形成将该层分成两个屏蔽层的楔形沟槽。然后将磁极尖端电镀在沟槽内，并且通过沟槽对准，获得沟槽的楔形横截面。然后在侧屏和极上方形成上屏蔽。

23. 发明授权

US08189295B2 Perpendicular magnetic recording head with a bottom side shield 有权
标题翻译：垂直磁记录头带底侧屏蔽
公开(公告)号：US08189295B2
公开(公告)日：2012-05-29
申请号：US13135276
申请日：2011-06-30
申请人： Cherng-Chyi Han , Min Li , Fenglin Liu , Lijie Guan
发明人： Cherng-Chyi Han , Min Li , Fenglin Liu , Lijie Guan
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , G11B5/315 , Y10T29/49032 , Y10T29/49052
摘要： A perpendicular magnetic recording (PMR) head has a pole tip shielded laterally by a separated pair of bottom side shields and shielded from above by an upper shield. The bottom side shields surround a lower portion of the pole tip while the upper portion of the pole tip is surrounded by non-magnetic layers. The bottom shields and the non-magnetic layer form a wedge-shaped trench in which the pole tip has been formed by a self-aligned plating process. A write gap layer and an upper shield is formed above the side shields and pole. The resulting structure substantially eliminates track overwrite while maintaining good track definition.
摘要翻译：垂直磁记录（PMR）头具有通过分离的一对底侧屏蔽横向屏蔽的极尖，并由上屏蔽从上方屏蔽。底侧屏蔽围绕极尖的下部，而极尖的上部被非磁性层包围。底部屏蔽层和非磁性层形成楔形沟槽，其中极尖已经通过自对准电镀工艺形成。写入间隙层和上屏蔽形成在侧屏蔽和极上。所得到的结构基本上消除了轨道重写，同时保持良好的轨道定义。

24. 发明申请

US20110261486A1 Perpendicular magnetic recording head with a bottom side shield 有权
标题翻译：垂直磁记录头带底侧屏蔽
公开(公告)号：US20110261486A1
公开(公告)日：2011-10-27
申请号：US13135276
申请日：2011-06-30
申请人： Cherng-Chyi Han , Min Li , Fenglin Liu , Lijie Guan
发明人： Cherng-Chyi Han , Min Li , Fenglin Liu , Lijie Guan
IPC分类号： G11B5/187
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , G11B5/315 , Y10T29/49032 , Y10T29/49052
摘要： A perpendicular magnetic recording (PMR) head has a pole tip shielded laterally by a separated pair of bottom side shields and shielded from above by an upper shield. The bottom side shields surround a lower portion of the pole tip while the upper portion of the pole tip is surrounded by non-magnetic layers. The bottom shields and the non-magnetic layer form a wedge-shaped trench in which the pole tip has been formed by a self-aligned plating process. A write gap layer and an upper shield is formed above the side shields and pole. The resulting structure substantially eliminates track overwrite while maintaining good track definition.
摘要翻译：垂直磁记录（PMR）头具有由分离的一对底侧屏蔽物侧向屏蔽的极尖，并由上屏蔽从上方屏蔽。底侧屏蔽围绕极尖的下部，而极尖的上部被非磁性层包围。底部屏蔽层和非磁性层形成楔形沟槽，其中极尖已经通过自对准电镀工艺形成。写入间隙层和上屏蔽形成在侧屏蔽和极上。所得到的结构基本上消除了轨道重写，同时保持良好的轨道定义。

25. 发明授权

US07978431B2 Method to make a perpendicular magnetic recording head with a bottom side shield 有权
标题翻译：制造具有底侧屏蔽的垂直磁记录头的方法
公开(公告)号：US07978431B2
公开(公告)日：2011-07-12
申请号：US11809346
申请日：2007-05-31
申请人： Cherng-Chyi Han , Min Li , Fenglin Liu , Lijie Guan
发明人： Cherng-Chyi Han , Min Li , Fenglin Liu , Lijie Guan
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , G11B5/315 , Y10T29/49032 , Y10T29/49052
摘要： A perpendicular magnetic recording (PMR) head is fabricated with a pole tip shielded laterally by a separated pair of bottom side shields and shielded from above by an upper shield. The bottom side shields surround a lower portion of the pole tip while the upper portion of the pole tip is surrounded by non-magnetic layers. The bottom shields and the non-magnetic layer form wedge-shaped trench in which the pole tip is formed by a self-aligned plating process. The wedge shape is formed by a RIE process using specific gases applied through a masking layer formed of material that has a slower etch rate than the non-magnetic material or the shield material. A masking layer of Ta, Ru/Ta, TaN or Ti, formed on a non-magnetic layer of alumina that is formed on a shield layer of NiFe and using RIE gases of CH3OH, CO or NH3 or their combinations, produces the desired result. A write gap layer and an upper shield is then formed above the side shields and pole. The resulting structure substantially eliminates track overwrite while maintaining good track definition.
摘要翻译：垂直磁记录（PMR）头被制造成具有通过分离的一对底侧屏蔽横向屏蔽的极尖，并由上屏蔽从上面屏蔽。底侧屏蔽围绕极尖的下部，而极尖的上部被非磁性层包围。底部屏蔽层和非磁性层形成楔形沟槽，其中极尖通过自对准电镀工艺形成。楔形形状通过RIE工艺形成，其使用通过由比非磁性材料或屏蔽材料具有较慢蚀刻速率的材料形成的掩模层施加的特定气体。形成在NiFe的屏蔽层上并使用CH 3 OH，CO或NH 3的RIE气体或其组合的形成在氧化铝的非磁性层上的Ta，Ru / Ta，TaN或Ti的掩蔽层产生期望的结果。然后在侧屏和极上方形成写间隙层和上屏蔽。所得到的结构基本上消除了轨道重写，同时保持良好的轨道定义。

26. 发明申请

US20070177301A1 Method to make a perpendicular magnetic recording head with a side write shield 有权
标题翻译：制作具有侧面写入屏蔽层的垂直磁记录头的方法
公开(公告)号：US20070177301A1
公开(公告)日：2007-08-02
申请号：US11345892
申请日：2006-02-02
申请人： Cherng-Chyi Han , Min Li , Fenglin Liu , Jiun-Ting Lee
发明人： Cherng-Chyi Han , Min Li , Fenglin Liu , Jiun-Ting Lee
IPC分类号： G11B5/147
CPC分类号： G11B5/3163 , G11B5/11 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/315 , Y10T29/49032 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A perpendicular magnetic recording (PMR) head is fabricated with a pole tip shielded laterally by a separated pair of side shields and shielded from above by an upper shield. The side shields are formed by a RIE process using specific gases applied to a shield layer through a masking layer formed of material that has a slower etch rate than the shield material. A masking layer of Ta, Ru/Ta, TaN or Ti, formed on a shield layer of NiFe and using RIE gases of CH3OH, CO or NH3 or their combinations, produces the desired result. The differential in etch rates maintains the opening dimension within the mask and allows the formation of a wedge-shaped trench within the shield layer that separates the layer into two shields. The pole tip is then plated within the trench and, being aligned by the trench, acquires the wedge-shaped cross-section of the trench. An upper shield is then formed above the side shields and pole.
摘要翻译：垂直磁记录（PMR）头被制造成具有通过分离的一对侧屏蔽横向屏蔽的极尖并且被上屏蔽从上面屏蔽。侧面屏蔽是通过RIE工艺形成的，其使用通过掩模层施加到屏蔽层上的特定气体，该屏蔽层由具有比屏蔽材料更慢的蚀刻速率的材料形成。在NiFe的屏蔽层上形成的Ta，Ru / Ta，TaN或Ti的掩蔽层，并使用CH 3 3 OH，CO或NH 3的RIE气体或它们的组合，产生所需的结果。蚀刻速率的差异保持了掩模内的开口尺寸，并且允许在屏蔽层内形成将该层分成两个屏蔽层的楔形沟槽。然后将磁极尖端电镀在沟槽内，并且通过沟槽对准，获得沟槽的楔形横截面。然后在侧屏和极上方形成上屏蔽。

27. 发明授权

US08117738B2 Method to make a perpendicular magnetic recording head with a side write shield 有权
标题翻译：制作具有侧面写入屏蔽层的垂直磁记录头的方法
公开(公告)号：US08117738B2
公开(公告)日：2012-02-21
申请号：US12932552
申请日：2011-02-28
申请人： Cherng-Chyi Han , Min Li , Fenglin Liu , Jiun-Ting Lee
发明人： Cherng-Chyi Han , Min Li , Fenglin Liu , Jiun-Ting Lee
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3163 , G11B5/11 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/315 , Y10T29/49032 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A perpendicular magnetic recording (PMR) head is fabricated with a self-aligned pole tip shielded laterally by a separated pair of side shields and shielded from above by an upper shield. The side shields are formed from a shield layer by a RIE process characterized by a mask and gases producing a variety of etch rates. The differential in etch rates maintains the opening dimension within the mask and allows the formation of a wedge-shaped trench within the shield layer that then separates the layer into two shields. The pole tip is then plated within the trench and an upper shield is formed above the side shields and pole.
摘要翻译：制造垂直磁记录（PMR）头，其具有由对准的一对侧屏蔽侧向屏蔽的自对准极尖，并由上屏蔽从上面屏蔽。侧屏蔽是通过RIE工艺由屏蔽层形成的，其特征在于产生各种蚀刻速率的掩模和气体。蚀刻速率的差异保持了掩模内的开口尺寸，并且允许在屏蔽层内形成楔形沟槽，然后将该层分成两个屏蔽层。然后将磁极尖端电镀在沟槽内，并且在侧屏蔽和极上方形成上屏蔽。

28. 发明申请

US20110216447A1 Process of octagonal pole for microwave assisted magnetic recording (MAMR) writer 有权
标题翻译：微波辅助磁记录（MAMR）作者八角极的过程
公开(公告)号：US20110216447A1
公开(公告)日：2011-09-08
申请号：US12660819
申请日：2010-03-03
申请人： Min Li , Cherng-Chyi Han , Kenichi Takano , Joe Smyth
发明人： Min Li , Cherng-Chyi Han , Kenichi Takano , Joe Smyth
IPC分类号： G11B5/33 , G03F7/20
CPC分类号： G11B5/314 , G11B5/1278 , G11B2005/0024
摘要： A microwave assisted magnetic recording writer is disclosed with an octagonal write pole having a top portion including a trailing edge that is self aligned to a spin transfer oscillator (STO). Leading and trailing edges are connected by two sidewalls each having three sections. A first section on each side is coplanar with the STO sidewalls and is connected to a sloped second section at a first corner. Each second section is connected to a third section at a second corner where the distance between second corners is greater than the distance between first corners. A method of forming the writer begins with a trapezoidal shaped write pole in an insulation layer. Two ion beam etch (IBE) steps are used to shape top and middle portions of the write pole and narrow the pole width to
摘要翻译：公开了一种具有八角写磁极的微波辅助磁记录装置，其具有包括与自旋转移振荡器（STO）自对准的后沿的顶部。前缘和后缘由具有三个部分的两个侧壁连接。每侧的第一部分与STO侧壁共面，并且在第一角处连接到倾斜的第二部分。每个第二部分连接到第二角处的第三部分，其中第二角之间的距离大于第一角之间的距离。一种形成写入器的方法从绝缘层中的梯形写入极开始。使用两个离子束蚀刻（IBE）步骤来形成写入极的顶部和中间部分，并且将极宽度窄化到<50nm而不破裂。最后，在STO上形成一个后挡板。

29. 发明申请

US20080297945A1 Method to make a perpendicular magnetic recording head with a bottom side shield 有权
标题翻译：制造具有底侧屏蔽的垂直磁记录头的方法
公开(公告)号：US20080297945A1
公开(公告)日：2008-12-04
申请号：US11809346
申请日：2007-05-31
申请人： Cherng-Chyi Han , Min Li , Fenglin Liu , Lijie Guan
发明人： Cherng-Chyi Han , Min Li , Fenglin Liu , Lijie Guan
IPC分类号： G11B5/127 , G11B5/147 , H04R31/00
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , G11B5/315 , Y10T29/49032 , Y10T29/49052
摘要： A perpendicular magnetic recording (PMR) head is fabricated with a pole tip shielded laterally by a separated pair of bottom side shields and shielded from above by an upper shield. The bottom side shields surround a lower portion of the pole tip while the upper portion of the pole tip is surrounded by non-magnetic layers. The bottom shields and the non-magnetic layer form wedge-shaped trench in which the pole tip is formed by a self-aligned plating process. The wedge shape is formed by a RIE process using specific gases applied through a masking layer formed of material that has a slower etch rate than the non-magnetic material or the shield material. A masking layer of Ta, Ru/Ta, TaN or Ti, formed on a non-magnetic layer of alumina that is formed on a shield layer of NiFe and using RIE gases of CH3OH, CO or NH3 or their combinations, produces the desired result. A write gap layer and an upper shield is then formed above the side shields and pole. The resulting structure substantially eliminates track overwrite while maintaining good track definition.
摘要翻译：垂直磁记录（PMR）头被制造成具有通过分离的一对底侧屏蔽横向屏蔽的极尖，并由上屏蔽从上面屏蔽。底侧屏蔽围绕极尖的下部，而极尖的上部被非磁性层包围。底部屏蔽层和非磁性层形成楔形沟槽，其中极尖通过自对准电镀工艺形成。楔形形状通过RIE工艺形成，其使用通过由比非磁性材料或屏蔽材料具有较慢蚀刻速率的材料形成的掩模层施加的特定气体。形成在NiFe的屏蔽层上并使用CH 3 OH，CO或NH 3的RIE气体或其组合的形成在氧化铝的非磁性层上的Ta，Ru / Ta，TaN或Ti的掩蔽层产生期望的结果。然后在侧屏和极上方形成写间隙层和上屏蔽。所得到的结构基本上消除了轨道重写，同时保持良好的轨道定义。

30. 发明申请

US20120069470A1 PMR head with integrated side shield (ISS) 有权
标题翻译：带集成侧护罩（ISS）的PMR头
公开(公告)号：US20120069470A1
公开(公告)日：2012-03-22
申请号：US13373172
申请日：2011-11-07
申请人： Cherng-Chyi Han , Lijie Guan , Joe Smyth , Moris Dovek
发明人： Cherng-Chyi Han , Lijie Guan , Joe Smyth , Moris Dovek
IPC分类号： G11B5/23
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/315 , G11B5/3163
摘要： A PMR head comprises a substrate, a magnetic pole formed over the substrate, the pole having a pole tip having a cross-sectional tapered shape wherein the pole tip is surrounded by a write gap layer, an integrated shield comprising side shields on the substrate laterally surrounding the pole tip and a trailing shield overlying the pole tip and integral with the side shields.
摘要翻译： PMR头包括衬底，形成在衬底上的磁极，所述极具有具有横截面锥形形状的极尖，其中极尖由写间隙层围绕;集成屏蔽，包括在衬底上的侧屏蔽围绕极尖和覆盖极尖并且与侧护罩成一体的后挡板。

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