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    • 31. 发明授权
    • Piston-tube electrostatic microactuator
    • 活塞式静电微致动器
    • US09306475B1
    • 2016-04-05
    • US14449544
    • 2014-08-01
    • Faez Ba-TisRidha Ben-Mrad
    • Faez Ba-TisRidha Ben-Mrad
    • H02N1/00H02N1/08
    • H02N1/008B81B3/0062B81B2203/0136B81B2203/053H02N1/002H02N1/006
    • A three-degrees-of-freedom MEMS electrostatic piston-tube actuator is disclosed. The actuator comprises two structures. A structure that comprises a plurality of fixed piston-like electrodes that are attached to a base, and form the stator of the actuator. A second structure that comprises a plurality of moving tube-like electrodes that are attached to the body of the upper structure and form the rotor of the actuator. The rotor is attached to the stator through a mechanical spring. The rotor of the actuator provides a 3-DOF motion, comprising vertical translation and bi-axial rotation about the axes of the structures. The present piston-tube actuator utilizes a configuration that enables the use of wide area electrodes, and therefore, provides a high output force enabling translation of the rotor or a high output torque enabling rotation of the rotor.
    • 公开了一种三自由度MEMS静电活塞管致动器。 致动器包括两个结构。 一种结构,其包括附接到基座并形成致动器的定子的多个固定的活塞状电极。 第二结构,其包括附接到上部结构的主体并形成致动器的转子的多个移动的管状电极。 转子通过机械弹簧连接到定子。 致动器的转子提供3自由度运动,包括围绕结构轴的垂直平移和双轴旋转。 本活塞管致动器使用能够使用广域电极的构造,因此提供能够平移转子的高输出力或能够使转子旋转的高输出转矩。