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    • 2. 发明授权
    • Bi-directional actuator utilizing both attractive and repulsive electrostatic forces
    • 双向致动器利用吸引力和排斥静电力
    • US07705514B2
    • 2010-04-27
    • US11249628
    • 2005-10-14
    • Siyuan HeRidha Ben Mrad
    • Siyuan HeRidha Ben Mrad
    • H02N1/00G02B26/08
    • H02N1/006
    • An electrostatic actuator comprising: first and second comb arrays of electrodes arranged on a base, the electrodes of the first and second comb arrays being interleaved; a third comb array of electrodes spring mounted over the first and second comb arrays, the electrodes of the third comb array being essentially aligned with the electrodes of the second comb array; means for applying a first voltage to the third comb array and a second voltage to the first and second comb arrays to generate an attractive force acting on the third comb array to move the third comb array toward the second comb array; and, means for applying the first voltage to the second and third comb arrays and the second voltage to the first comb array to generate a repulsive force acting on the third comb array to move the third comb array away from the second comb array.
    • 一种静电致动器,包括:布置在基座上的电极的第一和第二梳状阵列,第一和第二梳状阵列的电极交错; 弹簧安装在第一和第二梳状阵列上的电极的第三梳阵列,第三梳阵列的电极基本上与第二梳阵列的电极对准; 用于将第一电压施加到第三梳状阵列的装置和用于向第一和第二梳状阵列施加第二电压以产生作用在第三梳状阵列上的吸引力以将第三梳状阵列朝向第二梳状阵列移动的装置; 以及用于将第一电压施加到第二梳状阵列和第三梳状阵列并将第二电压施加到第一梳状阵列以产生作用在第三梳状阵列上以使第三梳状阵列远离第二梳状阵列的斥力的装置。
    • 6. 发明授权
    • Piston-tube electrostatic microactuator
    • 活塞式静电微致动器
    • US09306475B1
    • 2016-04-05
    • US14449544
    • 2014-08-01
    • Faez Ba-TisRidha Ben-Mrad
    • Faez Ba-TisRidha Ben-Mrad
    • H02N1/00H02N1/08
    • H02N1/008B81B3/0062B81B2203/0136B81B2203/053H02N1/002H02N1/006
    • A three-degrees-of-freedom MEMS electrostatic piston-tube actuator is disclosed. The actuator comprises two structures. A structure that comprises a plurality of fixed piston-like electrodes that are attached to a base, and form the stator of the actuator. A second structure that comprises a plurality of moving tube-like electrodes that are attached to the body of the upper structure and form the rotor of the actuator. The rotor is attached to the stator through a mechanical spring. The rotor of the actuator provides a 3-DOF motion, comprising vertical translation and bi-axial rotation about the axes of the structures. The present piston-tube actuator utilizes a configuration that enables the use of wide area electrodes, and therefore, provides a high output force enabling translation of the rotor or a high output torque enabling rotation of the rotor.
    • 公开了一种三自由度MEMS静电活塞管致动器。 致动器包括两个结构。 一种结构,其包括附接到基座并形成致动器的定子的多个固定的活塞状电极。 第二结构,其包括附接到上部结构的主体并形成致动器的转子的多个移动的管状电极。 转子通过机械弹簧连接到定子。 致动器的转子提供3自由度运动,包括围绕结构轴的垂直平移和双轴旋转。 本活塞管致动器使用能够使用广域电极的构造,因此提供能够平移转子的高输出力或能够使转子旋转的高输出转矩。