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    • 40. 发明授权
    • Complementary back end of line (BEOL) capacitor
    • 互补后端(BEOL)电容
    • US09252104B2
    • 2016-02-02
    • US14512191
    • 2014-10-10
    • QUALCOMM INCORPORATED
    • John J. ZhuBin YangPr ChidambaramLixin GeJihong Choi
    • H01L29/00H01L23/538H01L27/08H01L49/02H01L23/522
    • H01L23/538H01L23/5223H01L27/0805H01L28/40H01L2924/0002H01L2924/00
    • A complementary back end of line (BEOL) capacitor (CBC) structure includes a metal oxide metal (MOM) capacitor structure. The MOM capacitor structure is coupled to a first upper interconnect layer of an interconnect stack of an integrated circuit (IC) device. The MOM capacitor structure includes a lower interconnect layer of the interconnect stack. The CBC structure also includes a second upper interconnect layer of the interconnect stack coupled to the MOM capacitor structure. The CBC structure also includes a metal insulator metal (MIM) capacitor layer between the first upper interconnect layer and the second upper interconnect layer. In addition, CBC structure also includes a MIM capacitor structure coupled to the MOM capacitor structure. The MIM capacitor structure includes a first capacitor plate having a portion of the first upper interconnect layer, and a second capacitor plate having a portion of the MIM capacitor layer(s).
    • 互补的后端(BEOL)电容器(CBC)结构包括金属氧化物金属(MOM)电容器结构。 MOM电容器结构耦合到集成电路(IC)器件的互连堆叠的第一上互连层。 MOM电容器结构包括互连叠层的下互连层。 CBC结构还包括耦合到MOM电容器结构的互连叠层的第二上互连层。 CBC结构还包括在第一上部互连层和第二上部互连层之间的金属绝缘体金属(MIM)电容器层。 此外,CBC结构还包括耦合到MOM电容器结构的MIM电容器结构。 MIM电容器结构包括具有第一上部互连层的一部分的第一电容器板和具有MIM电容器层的一部分的第二电容器板。