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    • 34. 发明申请
    • Measuring Device for Measuring an Illumination Property
    • 用于测量照明属性的测量装置
    • US20150015875A1
    • 2015-01-15
    • US14501220
    • 2014-09-30
    • Carl Zeiss SMT GmbH
    • Michael ArnzMarkus Deguenther
    • G01N21/95G01J1/00
    • G01N21/95G01J1/00G01J1/4257G01J1/429G01N21/8806G01N21/9501G03F1/84
    • A measuring device (40) for measuring an illumination property of an illumination system (12), which is configured for two-dimensional irradiation of a substrate (24) arranged in an illumination plane (21) with illumination radiation (20). Two differing measurement beam paths (52, 54) are formed in the measuring device, each arranged to guide the illumination radiation emitted by the illumination system onto a spatially resolving intensity detector (42) of the measuring device. A first (52) of the measurement beam paths is arranged to measure an intensity distribution in the illumination plane and the second (54) of the measurement beam paths is arranged to measure an intensity distribution in a pupil of the illumination system. The measuring device also includes an imaging optical unit (44) arranged in the first measurement beam path (52) such that the illumination radiation guided in the first measurement beam path passes through the imaging optical unit.
    • 一种用于测量照明系统(12)的照明特性的测量装置(40),其被配置为用照射辐射(20)布置在照明平面(21)中的基板(24)的二维照射。 两个不同的测量光束路径(52,54)形成在测量装置中,每个测量光束路径被布置成将照明系统发射的照射辐射引导到测量装置的空间分辨强度检测器(42)上。 测量光束路径的第一(52)布置成测量照明平面中的强度分布,并且第二测量光束路径(54)被布置成测量照明系统的光瞳中的强度分布。 测量装置还包括配置在第一测量光束路径(52)中的成像光学单元(44),使得在第一测量光束路径中引导的照明辐射通过成像光学单元。
    • 36. 发明授权
    • Light distribution characteristic measurement apparatus and light distribution characteristic measurement method
    • 配光特性测量装置和配光特性测量方法
    • US08896823B2
    • 2014-11-25
    • US13771084
    • 2013-02-20
    • Otsuka Electronics Co., Ltd.
    • Yoshi Enami
    • G01J1/00G01J1/42G01J1/04G01J1/02G01J3/50G01J3/51
    • G01J1/4257G01J1/0228G01J1/0242G01J1/0403G01J1/0488G01J1/4228G01J3/505G01J3/51G01J2001/4247
    • A light distribution characteristic measurement apparatus for measuring the light distribution characteristic of a light source is provided. The apparatus includes a plurality of detectors arranged so that they have a predetermined relative relationship with each other. One detector has a detection range at least partially overlapping a detection range of another detector adjacent to the former detector. The apparatus further includes a drive unit that drives a plurality of detectors as one unit to update a positional relationship of the plurality of detectors relative to the light source, and a calculation unit that calculates the light distribution characteristic of the light source by performing a process depending on at least one of a relative relationship between a plurality of detectors and overlapping of respective detection ranges thereof, based on respective results of detection that have been acquired by the plurality of detectors at the same timing.
    • 提供一种用于测量光源的光分布特性的配光特性测量装置。 该装置包括多个检测器,其布置成使得它们彼此具有预定的相对关系。 一个检测器具有与前一个检测器相邻的另一检测器的检测范围至少部分重叠的检测范围。 该装置还包括:驱动单元,其驱动多个检测器作为一个单元,以更新多个检测器相对于光源的位置关系;以及计算单元,其通过执行处理来计算光源的光分布特性 取决于多个检测器之间的相对关系中的至少一个和其相应检测范围的重叠,基于在相同定时由多个检测器获取的检测结果。
    • 40. 发明授权
    • Light output calibration in an optoacoustic system
    • 光声系统中的光输出校准
    • US08823928B2
    • 2014-09-02
    • US13842399
    • 2013-03-15
    • Seno Medical Instruments, Inc.
    • Donald HerzogElisa GravisBryan ClingmanRemie J. SmithThomas G. Miller
    • G01J1/00G01J1/42G01J1/04G01J3/30G01J3/36
    • G01J1/4257A61B5/0073A61B5/0095A61B8/4281A61B2503/02A61B2576/00G01H9/00G01J1/04G01J1/42G01J3/30G01J3/36
    • An optoacoustic system includes first and second light sources capable of generating pulse of light at first and second wavelengths, first and second electrically controlled optical attenuators, first and second light sync detectors, and a combiner. A power meter that is calibrated to determine power at the first and second predominant wavelength measures power at the first wavelength after the first light sync is detected and measures power at the second wavelength after the second light sync is detected. The system includes a calibration mode wherein it electrically attenuates the first optical attenuator when the power measured by the power meter at the first wavelength after the first light sync is detected is above a first level, and electrically attenuated the second optical attenuator when the power measured by the power meter at the second wavelength after the second light sync is detected is above a second level.
    • 光声系统包括能够产生第一和第二波长的光脉冲的第一和第二光源,第一和第二电控光衰减器,第一和第二光同步检测器以及组合器。 被校准以确定第一和第二主要波长的功率的功率计测量在检测到第一光同步之后的第一波长处的功率,并且在检测到第二光同步之后测量第二波长处的功率。 该系统包括校准模式,其中当在检测到第一光同步之后由功率计在第一波长处测量的功率高于第一电平时,其电衰减第一光衰减器,并且当测量的功率被电衰减时,第二光衰减器 在检测到第二光同步之后的第二波长处的功率计高于第二电平。