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31. 发明授权

US09492884B2 Control device and control method for laser processing machine 有权
标题翻译：激光加工机控制装置及控制方法
公开(公告)号：US09492884B2
公开(公告)日：2016-11-15
申请号：US13880136
申请日：2011-09-13
申请人： Mototoshi Kumaoka , Tomohiro Kyoto , Naoki Miyamoto
发明人： Mototoshi Kumaoka , Tomohiro Kyoto , Naoki Miyamoto
IPC分类号： B23K26/04 , B23K26/00 , B23K26/12 , H01S3/04 , H01S3/02 , H01S3/036 , H01S3/223
CPC分类号： B23K26/00 , B23K26/128 , H01S3/02 , H01S3/036 , H01S3/0401 , H01S3/0407 , H01S3/2232
摘要： In a laser processing machine 100 including a plurality of element units containing at least a laser blower unit 3, an optical-path purge unit 24, and a temperature controlling unit 8, a measurement unit and a control unit 10 are provided. The measurement unit measures an elapsed time from a final trigger at which a laser processing operation of the laser processing machine has stopped and no user operation is applied with respect to the laser processing machine. The control unit 10 stops the element units based on the elapsed time after the final trigger, when a condition specified for each of the element units is satisfied.
摘要翻译：在包括至少包含激光鼓风机单元3的多个元件单元的激光加工机100中，设置有光路吹扫单元24和温度控制单元8，测量单元和控制单元10。测量单元测量从激光加工机的激光加工操作停止的最终触发器的经过时间，并且不对激光加工机器施加用户操作。当满足为每个元件单元指定的条件时，控制单元10基于最终触发之后的经过时间来停止元件单元。

32. 发明授权

US09490602B2 Laser system able to estimate hermetic seal of laser gas container 有权
标题翻译：激光系统能够估计激光气体容器的密封
公开(公告)号：US09490602B2
公开(公告)日：2016-11-08
申请号：US14196608
申请日：2014-03-04
申请人： FANUC CORPORATION
发明人： Akihiko Nishio
IPC分类号： H01S3/00 , H01S3/036
CPC分类号： H01S3/0014 , H01S3/036
摘要： A laser system including a pressure adjusting part adjusting the laser gas pressure in the laser gas container, a pressure control unit controlling the pressure adjusting part so that before startup of the laser oscillator, the laser gas pressure becomes a first gas pressure lower than atmospheric pressure and so that at a preparatory stage after startup of the laser oscillator and before radiation of the laser light, the laser gas pressure becomes a second gas pressure capable of oscillating laser light, a laser control unit controlling the laser oscillator so that the laser oscillator executes an initial operation, a laser detector detecting the laser light output by the initial operation, and a hermetic seal estimating part estimating an extent of hermetic seal of the laser gas container based on a detection value obtained by the laser detector.
摘要翻译：一种激光系统，包括调整激光气体容器中的激光气体压力的压力调节部件，控制压力调节部件的压力控制部件，使得在激光振荡器启动之前激光气体压力变为低于大气压的第一气体压力并且使得在激光振荡器起动之后并且在激光照射之前的准备阶段，激光气体压力变为能够激发激光的第二气体压力，激光控制单元控制激光振荡器，使得激光振荡器执行初始操作，激光检测器检测由初始操作输出的激光，以及气密密封估计部，其基于由激光检测器获得的检测值来估计激光气体容器的气密密封的程度。

33. 发明申请

US20160322776A1 CO2-N2-HE GAS DYNAMIC LASER 审中-公开
标题翻译： CO2-N2-HE气动激光
公开(公告)号：US20160322776A1
公开(公告)日：2016-11-03
申请号：US15141797
申请日：2016-04-28
申请人： Devin Benjamin Richardson , Jack Lloyd-Reilley , Pourya Samari , Jennifer Steffany Rodriguez , Arturo Alejo Ayon
发明人： Devin Benjamin Richardson , Jack Lloyd-Reilley , Pourya Samari , Jennifer Steffany Rodriguez , Arturo Alejo Ayon
IPC分类号： H01S3/0953 , H01S3/225 , H01S3/105 , H01S3/223 , H01S3/036 , H01S3/034
CPC分类号： H01S3/0953 , H01S3/03 , H01S3/034 , H01S3/036 , H01S3/104 , H01S3/2232
摘要： Disclosed herein is a CO2-N2-He gas dynamic laser. The operation of a gas dynamic laser involves heating the gas, rapidly cooling that gas in a supersonic nozzle, flowing the gas through an optical cavity wherein stimulated emission (lasing) takes place, and exhausting the gas. Isentropic equations are used to find flow properties throughout the nozzle and diffuser from the properties at their inlets in order to produce a Shock-Free minimum length nozzle.
摘要翻译：本文公开了一种CO2-N2-He气体动态激光器。气体动态激光器的操作包括加热气体，快速冷却超音速喷嘴中的气体，使气体流过其中发生受激发射（激光）的光学腔，并排出气体。等熵方程用于从其入口处的性质中发现整个喷嘴和扩散器的流动特性，以产生无冲击最小长度的喷嘴。

34. 发明申请

US20160248215A1 GAS LASER APPARATUS 有权
标题翻译：气体激光装置
公开(公告)号：US20160248215A1
公开(公告)日：2016-08-25
申请号：US15145016
申请日：2016-05-03
申请人： Gigaphoton Inc.
发明人： Natsushi SUZUKI , Osamu WAKABAYASHI , Hiroaki TSUSHIMA , Masanori YASHIRO
IPC分类号： H01S3/036 , H01S3/225 , B01D53/04 , H01S3/104
CPC分类号： H01S3/036 , B01D53/0446 , B01D53/346 , B01D53/685 , B01D53/82 , B01D53/86 , B01D2251/404 , B01D2251/602 , B01D2253/108 , B01D2255/20753 , B01D2255/20761 , B01D2257/2027 , B01D2258/0216 , B01D2259/40003 , H01S3/104 , H01S3/225
摘要： A gas laser apparatus may include: a laser chamber connected through a first control valve to a first laser gas supply source that supplies a first laser gas containing a halogen gas and connected through a second control valve to a second laser gas supply source that supplies a second laser gas having a lower halogen gas concentration than the first laser gas; a purification column that removes at least a part of the halogen gas and a halogen compound from at least a part of a gas exhausted from the laser chamber; a booster pump, connected through a third control valve to the laser chamber, which raises a pressure of a gas having passed through the purification column to a gas pressure that is higher than an operating gas pressure of the laser chamber; and a controller that calculates, on a basis of a first amount of a gas supplied from the booster pump through the third control valve to the laser chamber, a second amount of the first laser gas that is to be supplied to the laser chamber and controls the first control valve on a basis of a result of the calculation of the second amount.
摘要翻译：气体激光装置可以包括：激光室，其通过第一控制阀连接到第一激光气体供应源，第一激光气体供应源提供含有卤素气体的第一激光气体，并通过第二控制阀连接到第二激光气体供应源，具有比第一激光气体低的卤素气体浓度的第二激光气体; 净化塔，其从至少一部分从激光室排出的气体中除去至少一部分卤素气体和卤素化合物; 增压泵，其通过第三控制阀连接到激光室，其将通过净化塔的气体的压力升高到高于激光室的工作气体压力的气体压力; 以及控制器，其基于从所述增压泵通过所述第三控制阀向所述激光室供给的第一量的气体计算第二量的所述第一激光气体，所述第一激光气体将被供给到所述激光室并控制基于计算第二量的结果的第一控制阀。

35. 发明申请

US20160240992A1 GAS LASER OSCILLATION APPARATUS OF ORTHOGONAL EXCITATION TYPE 有权
标题翻译：正交激发类型的气体激光振荡装置
公开(公告)号：US20160240992A1
公开(公告)日：2016-08-18
申请号：US15028775
申请日：2014-05-27
申请人： MITSUBISHI ELECTRIC CORPORATION
发明人： Kouji Funaoka , Yasunari Matsumoto
IPC分类号： H01S3/041 , H01S3/038 , H01S3/036 , H01S3/032
CPC分类号： H01S3/041 , H01S3/03 , H01S3/0326 , H01S3/036 , H01S3/038 , H01S3/0407 , H01S3/073 , H01S3/0971 , H01S3/2232
摘要： A gas laser oscillation apparatus of orthogonal excitation type includes an electric discharge region having a pair of electric discharge electrodes, an axial flow blower having a plurality of rotor vanes and working by a permanent magnet motor, a first heat exchanger having a plurality of cooling fins, the cooling fins arranged on a plane perpendicular to an optical axis, a second heat exchanger having a plurality of cooling fins, the cooling fins arranged on a plane perpendicular to the optical axis, a gas duct having a gas passageway and arranged between the electric discharge region and the first heat exchanger, the axial flow blower being arranged on the gas passageway. The axial flow blower is arranged on a windward side of the first heat exchanger. The second heat exchanger is arranged on a windward side of the axial flow blower.
摘要翻译：正交激励型气体激光振荡装置包括具有一对放电电极的放电区域，具有多个转子叶片并由永磁电动机加工的轴流鼓风机，具有多个散热片的第一热交换器所述冷却翅片布置在与光轴垂直的平面上;第二热交换器，具有多个散热片，所述散热翅片布置在与所述光轴垂直的平面上;气体导管，具有气体通道并且布置在所述电气排出区域和第一热交换器，轴流鼓风机布置在气体通道上。轴流鼓风机布置在第一热交换器的迎风侧。第二热交换器设置在轴流鼓风机的迎风侧。

36. 发明授权

US09356414B2 Method and system for performing automatic gas refills for a gas laser 有权
标题翻译：对气体激光进行自动气体补充的方法和系统
公开(公告)号：US09356414B2
公开(公告)日：2016-05-31
申请号：US14585062
申请日：2014-12-29
申请人： Teledyne Instruments, Inc.
发明人： John Roy
IPC分类号： H01S3/22 , H01S3/036 , H01S3/225
CPC分类号： H01S3/036 , H01S3/225
摘要： An apparatus to automatically refill a gas laser is disclosed. The apparatus includes a computing device coupled to a memory. The memory storing instructions that when executed by the computing device cause the computing device to monitor a time elapsed since a last recorded gas refill and when a predetermined time interval is reached since the last recorded gas refill, effectuate a gas refill process to refill the gas laser with gas from a gas supply coupled to the gas laser by automatically controlling the gas laser and the gas supply; and upon completing the gas refill process, record a time stamp of the completed gas refill process. A method and system to automatically refill a gas laser also are disclosed.
摘要翻译：公开了一种自动重新填充气体激光器的装置。该装置包括耦合到存储器的计算装置。存储指令的存储器，当由计算装置执行时，使计算装置监视从上次记录的气体再填充以来经过的时间，并且当从最后记录的气体再填充到达预定的时间间隔时，执行气体补充处理以再填充气体通过自动控制气体激光器和气体供应，通过与气体激光器连接的气体供应气体进行激光; 在完成气体补充处理之后，记录完成的气体补充过程的时间戳。还公开了一种自动重新填充气体激光器的方法和系统。

37. 发明授权

US09331450B2 Laser apparatus 有权
标题翻译：激光设备
公开(公告)号：US09331450B2
公开(公告)日：2016-05-03
申请号：US14663086
申请日：2015-03-19
申请人： Gigaphoton Inc.
发明人： Takeshi Asayama , Hakaru Mizoguchi , Kouji Kakizaki , Hiroaki Tsushima , Osamu Wakabayashi , Kazuya Takezawa
IPC分类号： H01S3/097 , H01S3/038 , H01S3/225 , H01S3/034 , H01S3/08 , H01S3/104 , H01S3/036
CPC分类号： H01S3/038 , H01S3/03 , H01S3/034 , H01S3/036 , H01S3/0388 , H01S3/08009 , H01S3/09702 , H01S3/104 , H01S3/134 , H01S3/225 , H01S3/2251 , H01S3/2256
摘要： A laser apparatus according to embodiments may include a laser chamber including a laser gain medium; a power source; a first electrode to which a voltage is applied from the power source and a second electrode that is grounded, the first and second electrodes being disposed in the laser chamber; and a connector connected to the power source, and supporting the first electrode in a way that allows the first electrode to move toward a side where the second electrode is disposed.
摘要翻译：根据实施例的激光装置可以包括包括激光增益介质的激光室; 电源; 从电源施加电压的第一电极和接地的第二电极，第一和第二电极设置在激光室中; 以及连接到所述电源的连接器，并且以允许所述第一电极向所述第二电极设置的一侧移动的方式支撑所述第一电极。

38. 发明授权

US09306361B2 Gas lasers including heat exchangers 有权
标题翻译：气体激光器包括热交换器
公开(公告)号：US09306361B2
公开(公告)日：2016-04-05
申请号：US14091896
申请日：2013-11-27
申请人： TRUMPF Laser- und Systemtechnik GmbH
发明人： Mark Geschwandner , Matthias Breisacher
IPC分类号： H01S3/04 , H01S3/041 , F28D7/16 , F28F1/24 , H01S3/036 , F28F21/08 , H01S3/083 , H01S3/0971 , H01S3/223 , F28F19/06
CPC分类号： H01S3/041 , F28D7/1623 , F28F1/24 , F28F19/06 , F28F21/083 , F28F21/084 , F28F2220/00 , F28F2280/02 , H01S3/036 , H01S3/0835 , H01S3/0971 , H01S3/2232
摘要： A gas laser includes a fan for producing a flow of a laser gas and a heat exchanger including multiple heat exchanger pipes. The heat exchanger further includes two end plates to which the multiple heat exchanger pipes are secured at the opposing ends thereof. The two end plates include openings for supplying a heat exchanger fluid to the multiple heat exchanger pipes. The multiple heat exchanger pipes extend substantially transversely relative to a flow direction of the flow of laser gas.
摘要翻译：气体激光器包括用于产生激光气体流的风扇和包括多个热交换器管的热交换器。热交换器还包括两个端板，多个热交换器管在其两端固定到该端板上。两个端板包括用于将热交换器流体供应到多个热交换器管的开口。多个热交换器管相对于激光气流的流动方向基本上横向延伸。

39. 发明申请

US20160056602A1 LASER OSCILLATOR PROVIDED WITH LASER MEDIUM FLOW PATH 有权
标题翻译：激光振荡器提供激光介质流路
公开(公告)号：US20160056602A1
公开(公告)日：2016-02-25
申请号：US14833479
申请日：2015-08-24
申请人： FANUC CORPORATION
发明人： Tetsuhisa Takazane
IPC分类号： H01S3/032 , H01S3/223 , H01S3/041 , H01S3/036
CPC分类号： H01S3/032 , H01S3/03 , H01S3/036 , H01S3/041 , H01S3/076 , H01S3/2232
摘要： A laser oscillator which can keep distributions of pressure of a laser medium inside of a plurality of discharge tubes constant while making the laser medium circulate without stagnating. The laser oscillator is comprised of a first discharge tube, second discharge tube, first light guide, laser medium flow path, and blower. A flow resistance of a laser medium flow path between the blower and the first discharge tube and a flow resistance of the laser medium flow path between the blower and second discharge tube are the same as each other. A flow resistance of the laser medium flow path between the blower and a first end of the first light guide and a flow resistance of the laser medium flow path between the blower and a second end of the first light guide differ from each other.
摘要翻译：激光振荡器可以使激光介质在多个放电管内部的压力分布恒定，同时使激光介质循环而不停滞。激光振荡器包括第一放电管，第二放电管，第一光导，激光介质流路和鼓风机。鼓风机和第一放电管之间的激光介质流路的流动阻力和鼓风机与第二放电管之间的激光介质流路的流动阻力彼此相同。鼓风机与第一导光体的第一端之间的激光介质流路的流动阻力和鼓风机与第一导光体的第二端之间的激光介质流路的流动阻力彼此不同。

40. 发明授权

US09257809B2 Laser device for exposure apparatus 有权
标题翻译：用于曝光设备的激光装置
公开(公告)号：US09257809B2
公开(公告)日：2016-02-09
申请号：US13401734
申请日：2012-02-21
申请人： Hidenori Watanabe , Hiroshi Tanaka , Osamu Wakabayashi
发明人： Hidenori Watanabe , Hiroshi Tanaka , Osamu Wakabayashi
IPC分类号： H01S3/223 , H01S3/03 , H01S3/134 , H01S3/23 , H01S3/036 , G03F7/20
CPC分类号： H01S3/03 , G03F7/70025 , H01S3/036 , H01S3/134 , H01S3/2316 , H01S3/2366
摘要： A laser device for an exposure apparatus may include: a MOPA-type or MOPO-type laser device including a seed laser and at least one gas discharge-pumped amplifier stage that receives output light from the seed laser as an input, amplifies the light, and outputs the amplified light; and at least one of a laser gas control device that at least changes the total pressure of a laser gas in said amplifier stage in accordance with requested energy and a laser power source control device that at least changes pump intensity of discharge electrodes in said amplifier stage in accordance with said requested energy, in a case where the energy of laser output light from said laser device is to be changed discontinuously in response to a request from an exposure apparatus.
摘要翻译：用于曝光装置的激光装置可以包括：MOPA型或MOPO型激光装置，其包括种子激光器和至少一个气体放电泵浦放大器级，其接收来自种子激光器的输出光作为输入，放大光，并输出放大的光; 以及激光气体控制装置中的至少一个，所述激光气体控制装置至少根据所要求的能量来改变所述放大器级中的激光气体的总压力，激光电源控制装置至少改变放大器级中的放电电极的泵浦强度根据所述要求的能量，在来自所述激光装置的激光输出光的能量将根据来自曝光装置的请求而不连续地改变的情况下。

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