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41. 发明授权

US4833920A Differential pressure sensor 失效
标题翻译：差压传感器
公开(公告)号：US4833920A
公开(公告)日：1989-05-30
申请号：US879938
申请日：1986-06-30
申请人： Thomas A. Knecht , Roger L. Frick , Steven M. Bruesehoff
发明人： Thomas A. Knecht , Roger L. Frick , Steven M. Bruesehoff
IPC分类号： G01L9/12 , G01L9/00 , G01L13/00 , G01L13/02
CPC分类号： G01L19/147 , G01L13/025 , G01L19/003 , G01L19/0038 , G01L19/0061 , G01L19/0645 , G01L19/148 , G01L9/0073
摘要： A cell for sensing differential pressures has a single brittle material diaphragm mounted on support plates positioned on opposite sides of the diaphragm. The diaphragm surfaces when at zero differential pressure facing the support are concave and shaped to conform very closely to the shape the diaphragm has when it is deflected so that when the diaphragm is under a selected pressure and it is forced against one of the supports in either direction, the diaphragm is substantially planar or flat and supported fully on its support plate. The diaphragm may be shaped by placing it under a pressure so that it bows or deflects and then grinding the surface opposite from the applied pressure flat. When the pressure is removed, the diaphragm relaxes and a cavity with the exact required shape is produced on the surface that had been bowed out and ground flat. The same procedure can be done to the other side of the diaphragm or two diaphragm sections may be fixed together.
摘要翻译：用于感测差压的电池具有安装在位于隔膜相对侧上的支撑板上的单个脆性材料隔膜。当面向支撑件的零差压时，隔膜表面是凹形的并且成形为非常接近于隔膜在其被偏转时具有的形状，使得当隔膜处于选定压力下并且其被强制地抵靠在任一支撑件中的一个方向，隔膜基本上是平面的或平坦的，并且完全支撑在其支撑板上。隔膜可以通过将其放置在压力下成形，使得其弯曲或偏转，然后研磨与施加的压力平面相对的表面。当去除压力时，隔膜松弛，并且在已经弯曲并平整的表面上产生具有精确所需形状的空腔。可以对膜片的另一侧进行相同的过程，也可以将两个隔膜部分固定在一起。

42. 发明授权

US4800758A Pressure transducer with stress isolation for hard mounting 失效
标题翻译：具有应力隔离的压力传感器用于硬安装
公开(公告)号：US4800758A
公开(公告)日：1989-01-31
申请号：US877278
申请日：1986-06-23
申请人： Thomas A. Knecht , James Ruf , John P. Schulte
发明人： Thomas A. Knecht , James Ruf , John P. Schulte
IPC分类号： G01L9/04 , G01L7/08 , G01L9/00 , G01L19/00 , G01L19/10 , G01L7/10 , G01L9/06
CPC分类号： G01L19/146 , G01L19/147 , G01L9/0051
摘要： A pressure transducer has a stress isolator layer which permits the sensor to be non-resiliently mounted (hard mounted) to a mounting surface that in turn is subjected to strain. The strain of the mounting surface tends to induce undesired stress in the sensing diaphragm, and the present stress isolator layer minimizes the amount of stress that is transferred to the measuring diaphragm, to thereby reduce error. The spring preferably comprises a silicon leaf0type spring, with or without isolating slots, and is used in various combinations of diaphragms that are sensitive to pressure. The deflection of the diaphragm in response to pressure can be measured in any desired known manner such as with strain gage resistors, or through capacitive sensing.
摘要翻译：压力传感器具有应力隔离层，其允许传感器非弹性地安装（硬安装）到安装表面，该安装表面又受到应变。安装表面的应变趋向于在感测隔膜中引起不期望的应力，并且本应力隔离层使传递到测量膜的应力量最小化，从而减少误差。弹簧优选地包括具有或不具有隔离槽的硅片簧型弹簧，并且被用于对压力敏感的各种膜片组合。响应于压力的膜片的偏转可以以任何所需的已知方式测量，例如应变计电阻器，或通过电容感测。

43. 发明授权

US4730496A Capacitance pressure sensor 失效
标题翻译：电容式压力传感器
公开(公告)号：US4730496A
公开(公告)日：1988-03-15
申请号：US877281
申请日：1986-06-23
申请人： Thomas A. Knecht , Roger L. Frick
发明人： Thomas A. Knecht , Roger L. Frick
IPC分类号： G01L9/12 , G01L7/08 , G01L9/00
CPC分类号： G01L9/0073
摘要： A capacitive pressure sensor that is fabricated by a batch process affords isolation for the sensing element and leads from the pressure media and provides stress isolation as well. The pressure sensor is made up of a sandwich construction including a silicon wafer which is etched from one side to make cavities in a plurality of desired locations to form deflecting diaphragms, one surface of which acts as a capacitor plate. A glass layer is metalized on both sides and has holes drilled in locations that align with the diaphragms formed on the silicon wafer. The glass layer is anodically bonded to the wafer to form capacitance gap of a few microns relative to the one surface of each diaphragm. The assembly of the metalized glass layer and the silicon wafer is in a preferred form sandwiched between two additional layers, and bonded together in a vacuum atmosphere. The four layer sandwich is then cut up into individual sensors. The initial assembly can be formed to provide dampening of the diaphragm response times and to minimize the likelihood of false signals at high frequency inputs.
摘要翻译：通过分批处理制造的电容式压力传感器为感测元件提供隔离，并从压力介质引出并提供应力隔离。压力传感器由夹层结构构成，该夹层构造包括硅晶片，该硅晶片从一侧被蚀刻以在多个所需位置形成空腔，以形成偏转隔膜，其一个表面用作电容器板。玻璃层在两侧金属化，并且在与硅晶片上形成的隔膜对准的位置处具有钻孔。玻璃层阳极结合到晶片上以形成相对于每个隔膜的一个表面几微米的电容间隙。金属化玻璃层和硅晶片的组装是夹在两个附加层之间的优选形式，并且在真空气氛中结合在一起。然后将四层三明治切成单独的传感器。可以形成初始组件以提供隔膜响应时间的衰减并且最小化在高频输入处的假信号的可能性。

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