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    • 49. 发明授权
    • Piezoelectric/electrostrictive film element having wavy grain boundaries
    • 具有波纹晶界的压电/电致伸缩膜元件
    • US08084924B2
    • 2011-12-27
    • US12397476
    • 2009-03-04
    • Yukinobu YuraNobuyuki KobayashiTsutomu Nanataki
    • Yukinobu YuraNobuyuki KobayashiTsutomu Nanataki
    • H01L41/187
    • H01L41/1876H01L41/0973H01L41/43
    • An actuator includes a first electrode disposed on the top surface of a ceramic substrate (for example, zirconium oxide), a piezoelectric/electrostrictive substance disposed on the first electrode, and a second electrode disposed on the piezoelectric/electrostrictive substance, wherein the input of an electric power alters the volume of the piezoelectric/electrostrictive substance. The piezoelectric/electrostrictive substance contains a plurality of crystal grains that have a wavy structure composed of wavy grain boundaries including concave portions and convex portions. The crystal grains contain ABO3 as the main component. The A site is Pb, and the B site contains such an amount of M that M becomes excessive after the piezoelectric/electrostrictive substance is formed (wherein M is at least one element selected from Mg, Ni, and Zn). The crystal grains of the piezoelectric/electrostrictive substance are oriented in the electric field direction, independently of the orientation of the substrate.
    • 致动器包括设置在陶瓷基板(例如氧化锆)的顶表面上的第一电极,设置在第一电极上的压电/电致伸缩物质和设置在压电/电致伸缩物质上的第二电极, 电力改变压电/电致伸缩物质的体积。 压电/电致伸缩物质包含多个具有包括凹部和凸部的波浪形晶界的波浪结构的晶粒。 晶粒含有ABO3作为主要成分。 A位置为Pb,B位置含有形成压电/电致伸缩物质后M变多的M(其中M为选自Mg,Ni和Zn中的至少一种元素)。 压电/电致伸缩物质的晶粒在电场方向上取向,与基板的取向无关。