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    • 41. 发明授权
    • Thin film optical waveguide and optical deflecting device
    • 薄膜光波导和光学偏转装置
    • US5852702A
    • 1998-12-22
    • US804689
    • 1997-02-25
    • Naoki NishidaTsuyoshi IwamotoShunichi Hayamizu
    • Naoki NishidaTsuyoshi IwamotoShunichi Hayamizu
    • B41J2/465G02F1/335G02B6/10
    • G02F1/335B41J2/465
    • A thin film waveguide and an optical deflecting device which have a substrate and a waveguide layer. An optical buffer layer which has a refractive index smaller than that of the waveguide layer is provided between the substrate and the waveguide layer, and the optical buffer layer has such a thickness as to make a zero mode guided light beam progressing in the waveguide layer have a propagation loss not more than 2 dB/cm and as to make a first mode guided light beam progressing in the waveguide layer have a propagation loss not less than 4 dB/cm. For example, the waveguide layer is a ZnO thin film, the substrate is a silicon substrate, and the optical buffer layer is a SiO.sub.2 thin film. Further, an interdigital transducer is provided on the waveguide layer to excite Sezawa waves as surface acoustic waves. For example, the waveguide layer is designed to have a thickness which meets the following condition: 1.0
    • 具有基板和波导层的薄膜波导和光学偏转装置。 在衬底和波导层之间设置折射率小于波导层的光学缓冲层,并且光缓冲层具有使在波导层中前进的零模式引导光束具有的厚度 传播损耗不大于2dB / cm,并且使得在波导层中前进的第一模式引导光束具有不小于4dB / cm的传播损耗。 例如,波导层是ZnO薄膜,衬底是硅衬底,光学缓冲层是SiO 2薄膜。 此外,在波导层上提供叉指式换能器,以激发Sezawa波作为表面声波。 例如,波导层被设计成具有满足以下条件的厚度:1.0