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    • 42. 发明授权
    • Nitride semiconductor light emitting element and nitride semiconductor light emitting device
    • 氮化物半导体发光元件和氮化物半导体发光器件
    • US07880192B2
    • 2011-02-01
    • US12159786
    • 2006-12-27
    • Yoshiaki HasegawaGaku SugaharaToshiya Yokogawa
    • Yoshiaki HasegawaGaku SugaharaToshiya Yokogawa
    • H01L21/06
    • H01S5/34333B82Y20/00H01S5/0425H01S5/22
    • A nitride semiconductor device according to the present invention includes a n-GaN substrate 10 and a semiconductor multilayer structure arranged on the principal surface of the n-GaN substrate 10 and including a p-type region, an n-type region and an active layer between them. An SiO2 layer 30 with an opening and a p-side electrode, which makes contact with a portion of the p-type region of the semiconductor multilayer structure, are arranged on the upper surface of the semiconductor multilayer structure. An n-side electrode 36 is arranged on the back surface of the substrate 10. The p-side electrode includes a p-side contact electrode 32 that contacts with the portion of the p-type region and a p-side interconnect electrode 34 that covers the p-side contact electrode 2 and the SiO2 layer 30. Part of the p-side contact electrode 32 is exposed under the p-side interconnect electrode 34.
    • 根据本发明的氮化物半导体器件包括n-GaN衬底10和布置在n-GaN衬底10的主表面上并包括p型区,n型区和有源层的半导体多层结构 它们之间。 具有与半导体多层结构的p型区域的一部分接触的开口部和p侧电极的SiO2层30配置在半导体多层结构体的上表面。 n侧电极36配置在基板10的背面.p侧电极包括与p型区域的部分接触的p侧接触电极32和p侧配线电极34 覆盖p侧接触电极2和SiO 2层30. p侧接触电极32的一部分露出在p侧互连电极34的下方。
    • 43. 发明申请
    • HOLLOW GST STRUCTURE WITH DIELECTRIC FILL
    • 中空结构与电介质填充
    • US20110001107A1
    • 2011-01-06
    • US12824749
    • 2010-06-28
    • JUN-FEI ZHENG
    • JUN-FEI ZHENG
    • H01L45/00H01L21/06
    • H01L45/124H01L45/06H01L45/144H01L45/1616H01L45/1641H01L45/1691
    • A memory cell structure, including a substrate having a via therein bound at first and second ends thereof by electrodes. The via is coated on side surfaces thereof with GST material defining a core that is hollow or at least partially filled with material, e.g., germanium or dielectric material. One or more of such memory cell structures may be integrated in a phase change memory device. The memory cell structure can be fabricated in a substrate containing a via closed at one end thereof with a bottom electrode, by conformally coating GST material on sidewall surface of the via and surface of the bottom electrode enclosing the via, to form an open core volume bounded by the GST material, optionally at least partially filling the open core volume with germanium or dielectric material, annealing the GST material film, and forming a top electrode at an upper portion of the via.
    • 一种存储单元结构,包括其第一端和第二端通过电极在其中结合的通孔的衬底。 通孔在其侧表面上涂覆有GST材料,其中GST材料限定了中空的或至少部分地填充有材料(例如锗或电介质材料)的芯。 这种存储单元结构中的一个或多个可以集成在相变存储器件中。 存储单元结构可以通过在通孔的侧壁表面和包围通孔的底部电极的表面上保形地涂覆GST材料,在包含通孔闭合的通孔的基板中制造,形成开放芯体积 由GST材料限定,任选地用锗或介电材料至少部分地填充开芯体积,退火GST材料膜,并在通孔的上部形成顶电极。