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    • 54. 发明授权
    • Pitch reduced patterns relative to photolithography features
    • 相对于光刻特征的间距减小
    • US07718540B2
    • 2010-05-18
    • US11670296
    • 2007-02-01
    • Luan TranWilliam T RerichaJohn LeeRamakanth AlapatiSheron HonarkhahShuang MengPuneet SharmaJingyi BaiZhiping YinPaul MorganMirzafer K AbatchevGurtej S SandhuD. Mark Durcan
    • Luan TranWilliam T RerichaJohn LeeRamakanth AlapatiSheron HonarkhahShuang MengPuneet SharmaJingyi BaiZhiping YinPaul MorganMirzafer K AbatchevGurtej S SandhuD. Mark Durcan
    • H01L21/302
    • H01L21/0338H01L21/0337H01L21/3086H01L21/3088
    • Differently-sized features of an integrated circuit are formed by etching a substrate using a mask which is formed by combining two separately formed patterns. Pitch multiplication is used to form the relatively small features of the first pattern and conventional photolithography used to form the relatively large features of the second pattern. Pitch multiplication is accomplished by patterning a photoresist and then etching that pattern into an amorphous carbon layer. Sidewall spacers are then formed on the sidewalls of the amorphous carbon. The amorphous carbon is removed, leaving behind the sidewall spacers, which define the first mask pattern. A bottom anti-reflective coating (BARC) is then deposited around the spacers to form a planar surface and a photoresist layer is formed over the BARC. The photoresist is next patterned by conventional photolithography to form the second pattern, which is then is transferred to the BARC. The combined pattern made out by the first pattern and the second pattern is transferred to an underlying amorphous silicon layer and the pattern is subjected to a carbon strip to remove BARC and photoresist material. The combined pattern is then transferred to the silicon oxide layer and then to an amorphous carbon mask layer. The combined mask pattern, having features of difference sizes, is then etched into the underlying substrate through the amorphous carbon hard mask layer.
    • 通过使用通过组合两个单独形成的图案形成的掩模蚀刻衬底来形成集成电路的不同尺寸的特征。 间距乘法用于形成第一图案的相对较小的特征以及用于形成第二图案的较大特征的常规光刻。 间距倍增通过对光致抗蚀剂进行图案化,然后将该图案蚀刻成无定形碳层来实现。 然后在无定形碳的侧壁上形成侧壁间隔物。 去除无定形碳,留下限定第一掩模图案的侧壁间隔物。 然后将底部抗反射涂层(BARC)沉积在间隔物周围以形成平坦表面,并且在BARC上形成光致抗蚀剂层。 接下来通过常规光刻法将光致抗蚀剂图案化以形成第二图案,然后将其转印到BARC。 通过第一图案和第二图案形成的组合图案被转印到下面的非晶硅层,并且图案经受碳带以去除BARC和光致抗蚀剂材料。 然后将组合图案转移到氧化硅层,然后转移到无定形碳掩模层。 具有不同尺寸特征的组合掩模图案然后通过无定形碳硬掩模层蚀刻到下面的衬底中。
    • 55. 发明申请
    • PITCH REDUCED PATTERNS RELATIVE TO PHOTOLITHOGRAPHY FEATURES
    • 相对于光刻特征的PITCH减少图案
    • US20100092891A1
    • 2010-04-15
    • US12636581
    • 2009-12-11
    • Luan TranWilliam T. RerichaJohn LeeRamakanth AlapatiSheron HonarkhahShuang MengPuneet SharmaJingyi BaiZhiping YinPaul MorganMirzafer K. AbatchevGurtej S. SandhuD. Mark Durcan
    • Luan TranWilliam T. RerichaJohn LeeRamakanth AlapatiSheron HonarkhahShuang MengPuneet SharmaJingyi BaiZhiping YinPaul MorganMirzafer K. AbatchevGurtej S. SandhuD. Mark Durcan
    • G03F7/20
    • H01L21/0338H01L21/0337H01L21/3086H01L21/3088
    • Differently-sized features of an integrated circuit are formed by etching a substrate using a mask which is formed by combining two separately formed patterns. Pitch multiplication is used to form the relatively small features of the first pattern and conventional photolithography used to form the relatively large features of the second pattern. Pitch multiplication is accomplished by patterning a photoresist and then etching that pattern into an amorphous carbon layer. Sidewall spacers are then formed on the sidewalls of the amorphous carbon. The amorphous carbon is removed, leaving behind the sidewall spacers, which define the first mask pattern. A bottom anti-reflective coating (BARC) is then deposited around the spacers to form a planar surface and a photoresist layer is formed over the BARC. The photoresist is next patterned by conventional photolithography to form the second pattern, which is then is transferred to the BARC. The combined pattern made out by the first pattern and the second pattern is transferred to an underlying amorphous silicon layer and the pattern is subjected to a carbon strip to remove BARC and photoresist material. The combined pattern is then transferred to the silicon oxide layer and then to an amorphous carbon mask layer. The combined mask pattern, having features of difference sizes, is then etched into the underlying substrate through the amorphous carbon hard mask layer.
    • 通过使用通过组合两个单独形成的图案形成的掩模蚀刻衬底来形成集成电路的不同尺寸的特征。 间距乘法用于形成第一图案的相对较小的特征以及用于形成第二图案的较大特征的常规光刻。 间距倍增通过对光致抗蚀剂进行图案化,然后将该图案蚀刻成无定形碳层来实现。 然后在无定形碳的侧壁上形成侧壁间隔物。 去除无定形碳,留下限定第一掩模图案的侧壁间隔物。 然后将底部抗反射涂层(BARC)沉积在间隔物周围以形成平坦表面,并且在BARC上形成光致抗蚀剂层。 接下来通过常规光刻法将光致抗蚀剂图案化以形成第二图案,然后将其转印到BARC。 通过第一图案和第二图案形成的组合图案被转印到下面的非晶硅层,并且图案经受碳带以去除BARC和光致抗蚀剂材料。 然后将组合图案转移到氧化硅层,然后转移到无定形碳掩模层。 具有不同尺寸特征的组合掩模图案然后通过无定形碳硬掩模层蚀刻到下面的衬底中。
    • 57. 发明授权
    • Pitch reduced patterns relative to photolithography features
    • 相对于光刻特征的间距减小
    • US07253118B2
    • 2007-08-07
    • US11214544
    • 2005-08-29
    • Luan TranWilliam T. RerichaJohn LeeRaman AlapatiSheron HonarkhahShuang MengPuneet SharmaJingyi (Jenny) BaiZhiping YinPaul MorganMirzafer K. AbatchevGurtej S. SandhuD. Mark Durcan
    • Luan TranWilliam T. RerichaJohn LeeRaman AlapatiSheron HonarkhahShuang MengPuneet SharmaJingyi (Jenny) BaiZhiping YinPaul MorganMirzafer K. AbatchevGurtej S. SandhuD. Mark Durcan
    • H01L21/302
    • H01L21/0338H01L21/0337H01L21/3086H01L21/3088
    • Differently-sized features of an integrated circuit are formed by etching a substrate using a mask which is formed by combining two separately formed patterns. Pitch multiplication is used to form the relatively small features of the first pattern and conventional photolithography used to form the relatively large features of the second pattern. Pitch multiplication is accomplished by patterning a photoresist and then etching that pattern into an amorphous carbon layer. Sidewall spacers are then formed on the sidewalls of the amorphous carbon. The amorphous carbon is removed, leaving behind the sidewall spacers, which define the first mask pattern. A bottom anti-reflective coating (BARC) is then deposited around the spacers to form a planar surface and a photoresist layer is formed over the BARC. The photoresist is next patterned by conventional photolithography to form the second pattern, which is then is transferred to the BARC. The combined pattern made out by the first pattern and the second pattern is transferred to an underlying amorphous silicon layer and the pattern is subjected to a carbon strip to remove BARC and photoresist material. The combined pattern is then transferred to the silicon oxide layer and then to an amorphous carbon mask layer. The combined mask pattern, having features of difference sizes, is then etched into the underlying substrate through the amorphous carbon hard mask layer.
    • 通过使用通过组合两个单独形成的图案形成的掩模蚀刻衬底来形成集成电路的不同尺寸的特征。 间距乘法用于形成第一图案的相对较小的特征以及用于形成第二图案的较大特征的常规光刻。 间距倍增通过对光致抗蚀剂进行图案化,然后将该图案蚀刻成无定形碳层来实现。 然后在无定形碳的侧壁上形成侧壁间隔物。 去除无定形碳,留下限定第一掩模图案的侧壁间隔物。 然后将底部抗反射涂层(BARC)沉积在间隔物周围以形成平坦表面,并且在BARC上形成光致抗蚀剂层。 接下来通过常规光刻法将光致抗蚀剂图案化以形成第二图案,然后将其转印到BARC。 通过第一图案和第二图案形成的组合图案被转印到下面的非晶硅层,并且图案经受碳带以去除BARC和光致抗蚀剂材料。 然后将组合图案转移到氧化硅层,然后转移到无定形碳掩模层。 具有不同尺寸特征的组合掩模图案然后通过无定形碳硬掩模层蚀刻到下面的衬底中。
    • 60. 发明申请
    • Method and system for transferring video and audio files to portable computing devices
    • 将视频和音频文件传输到便携式计算设备的方法和系统
    • US20050076057A1
    • 2005-04-07
    • US10679111
    • 2003-10-03
    • Puneet SharmaJohn BrassilSujata Banerjee
    • Puneet SharmaJohn BrassilSujata Banerjee
    • G06F17/00G06F21/00
    • G06F21/10
    • The present teachings provide for the download and purchase of a digital movie. Several schemes are described for handling a large file that is a digital movie including separately handling its audio and video component. Because the video component is downloaded separately from an audio component, it can be downloaded over several sessions. A user can separately initiate the download of the corresponding audio component. Because the audio component is significantly smaller, its download can be achieved in a much shorter time, often in one session. Thus, content is provided to a user in a substantially transparent manner such that a user's perception of receiving the functionality of a digital movie essentially becomes the time required to initiate payment and download of a relatively small audio component.
    • 本教导提供数字电影的下载和购买。 描述了用于处理作为数字电影的大文件的几种方案,包括单独处理其音频和视频组件。 由于视频组件是从音频组件单独下载的,因此可以通过多个会话进行下载。 用户可以单独启动相应音频组件的下载。 由于音频组件明显较小,因此可以在短时间内(通常在一个会话中)实现其下载。 因此,以基本透明的方式向用户提供内容,使得用户接收数字电影的功能的感觉基本上成为启动相对较小的音频组件的支付和下载所需的时间。