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51. 发明授权

US10353284B2 Lithographic reticle system 有权
公开(公告)号：US10353284B2
公开(公告)日：2019-07-16
申请号：US15979813
申请日：2018-05-15
申请人： IMEC VZW , Imec USA Nanoelectronics Design Center
发明人： Rik Jonckheere , Cedric Huyghebaert , Emily Gallagher
IPC分类号： G03F7/20 , G03F1/64 , G03F1/62
摘要： The present disclosure provides a lithographic reticle system comprising a reticle, a first pellicle membrane mounted in front of the reticle, and a second pellicle membrane mounted in front of the first pellicle membrane, wherein the first pellicle membrane is arranged between the reticle and the second pellicle membrane, and wherein the second pellicle membrane is releasably mounted in relation to the first pellicle membrane and the reticle.

52. 发明申请

US20180329291A1 Method for Forming a Pellicle 审中-公开
公开(公告)号：US20180329291A1
公开(公告)日：2018-11-15
申请号：US15979827
申请日：2018-05-15
申请人： IMEC VZW , Imec USA Nanoelectronics Design Center
发明人： Marina Timmermans , Emily Gallagher , Ivan Pollentier , Hanns Christoph Adelmann , Cedric Huyghebaert , Jae Uk Lee
IPC分类号： G03F1/64
CPC分类号： G03F1/64 , G03F1/62
摘要： The present disclosure relates to a method for forming a pellicle for extreme ultraviolet lithography, the method comprising: forming a coating of a first material on a peripheral region of a main surface of a carbon nanotube pellicle membrane, the membrane including a carbon nanotube film, arranging the carbon nanotube pellicle membrane on a pellicle frame with the peripheral region facing a support surface of the pellicle frame, wherein the support surface of the pellicle frame is formed by a second material, and bonding together the coating of the carbon nanotube pellicle membrane and the pellicle support surface by pressing the carbon nanotube pellicle membrane and the pellicle support surface against each other. The present disclosure relates also relates to a method for forming a reticle system for extreme ultraviolet lithography.

53. 发明申请

US20170346493A1 DTC-Based PLL and Method for Operating the DTC-Based PLL 审中-公开
公开(公告)号：US20170346493A1
公开(公告)日：2017-11-30
申请号：US15605261
申请日：2017-05-25
申请人： IMEC VZW , Stichting IMEC Nederland , Vrije Universiteit Brussel
发明人： Nereo Markulic , Yao-Hong Liu , Jan Craninckx
IPC分类号： H03L7/085 , H03K5/159 , H03L7/099 , H03K5/00
CPC分类号： H03L7/085 , H03K5/159 , H03K2005/00013 , H03L7/081 , H03L7/0991 , H03L7/197 , H03L7/1976 , H03L2207/50
摘要： The disclosure provides a phase locked loop, PLL, for phase locking an output signal to a reference signal. The PLL comprises a reference path providing the reference signal to a first input of a phase detector, a feedback loop providing the output signal of the PLL as a feedback signal to a second input of the phase detector, a controllable oscillator generating the output signal based on at least a phase difference between reference and feedback signal, a digital-to-time converter, DTC, delaying a signal that is provided at one of the first and second input, a delay calculation path for calculating a DTC delay value. The PLL further comprises a randomization unit for generating and adding a random offset, i.e. a pseudo-random integer, to the delay value. The offset is such that a target output of the phase detector remains substantially unchanged.

54. 发明授权

US08937509B2 Multi-channel biopotential signal acquisition systems 有权
标题翻译：多通道生物电势信号采集系统
公开(公告)号：US08937509B2
公开(公告)日：2015-01-20
申请号：US13227316
申请日：2011-09-07
申请人： Jiawei Xu , Refet Firat Yazicioglu
发明人： Jiawei Xu , Refet Firat Yazicioglu
IPC分类号： H03F3/45 , A61B5/05
CPC分类号： A61B5/04004 , A61B5/0428 , H03F3/45475 , H03F3/45928 , H03F2200/261 , H03F2203/45138
摘要： A multi-channel biopotential signal acquisition system is disclosed. In the system, a plurality of biopotential channels is corrected for common-mode interference. In one aspect, each biopotential channel includes an electrode for providing a biopotential input signal and an associated amplifier for amplifying the biopotential input signal and providing a biopotential output signal. The output signal is processed in a processor. Each biopotential output signal is passed to a common-mode feedback system, which determines an average common-mode signal and feeds that signal back to each of the amplifiers in each of the biopotential channels to enhance common-mode rejection ratio of the system.
摘要翻译：公开了一种多通道生物电势信号采集系统。在该系统中，针对共模干扰来校正多个生物电势通道。在一个方面，每个生物电位通道包括用于提供生物电位输入信号的电极和用于放大生物电位输入信号并提供生物电位输出信号的相关放大器。在处理器中处理输出信号。每个生物电势输出信号被传递到共模反馈系统，该共模反馈系统确定平均共模信号，并将该信号反馈给每个生物电位通道中的每个放大器，以增强系统的共模抑制比。

55. 发明申请

US20150005585A1 Biopotential Signal Acquisition System and Method 有权
标题翻译：生物电位信号采集系统及方法
公开(公告)号：US20150005585A1
公开(公告)日：2015-01-01
申请号：US14315520
申请日：2014-06-26
申请人： IMEC VZW , Stichting IMEC Nederland
发明人： Jiawei Xu , Refet Firat Yazicioglu
IPC分类号： A61B5/00 , A61B5/0476 , A61B5/04 , A61B5/0496 , A61B5/0428 , A61B5/0402 , A61B5/0488
CPC分类号： A61B5/7207 , A61B5/04004 , A61B5/0402 , A61B5/0408 , A61B5/0428 , A61B5/0476 , A61B5/0478 , A61B5/0488 , A61B5/0492 , A61B5/0496 , A61B2562/0209
摘要： A biopotential signal acquisition system, comprising: a first active electrode including an integrated pre-amplifier and an analogue to digital converter; a second active electrode including an integrated pre-amplifier and an analogue to digital converter, wherein the second active electrode has variable gain; a test signal generator for generating a test signal at a test frequency and coupling the test signal to the first and/or second active electrodes; and a digital signal processor configured to: process the digital outputs of the first and second active electrodes to derive a gain control signal based on a difference between the first and second active electrode outputs at the test frequency, and apply the gain control signal to the second active electrode. The disclosure also relates to an electronic circuit or device and a biopotential signal acquisition method.
摘要翻译：一种生物电势信号采集系统，包括：第一有源电极，包括集成前置放大器和模数转换器; 包括集成前置放大器和模数转换器的第二有源电极，其中所述第二有源电极具有可变增益; 测试信号发生器，用于产生测试频率的测试信号，并将测试信号耦合到第一和/或第二有源电极; 以及数字信号处理器，被配置为：处理第一和第二有源电极的数字输出，以基于在测试频率处的第一和第二有源电极输出之间的差异导出增益控制信号，并将增益控制信号施加到第二活性电极。本公开还涉及电子电路或装置以及生物电势信号采集方法。

56. 发明申请

US20140070972A1 Circuit For Digitizing A Sum Of Signals 有权
标题翻译：数字化信号总和的电路
公开(公告)号：US20140070972A1
公开(公告)日：2014-03-13
申请号：US14022351
申请日：2013-09-10
申请人： IMEC , Katholieke Universiteit Leuven, K.U. LEUVEN R&D , Stichting IMEC Nederland
发明人： Alonso Morgado , Serena Porrazzo , Francesco Cannillo
IPC分类号： H03M3/00
CPC分类号： H03M3/32 , H03M3/426 , H03M3/452
摘要： A circuit for digitizing a sum of a first input signal and a plurality of second input signals has a passive adder that sums the second input signals and outputs a summation signal and a multi-bit quantizer circuit. The quanitzer circuit compares the summation signal at a first comparator input with a signal at a second comparator input, which is derived from the first input signal and has an appropriate polarity so that the difference between the summation signal and the signal at the second comparator input is indicative of the sum of the first input signal and the plurality of second input signals. The comparator also produces a comparator output signal based on the sum of the first input signal and the plurality of second input signals. The quantizer circuit also has a control logic block for determining a multi-bit representation of the sum from the comparator output signal.
摘要翻译：用于对第一输入信号和多个第二输入信号的和进行数字化的电路具有对第二输入信号求和并输出求和信号和多位量化器电路的无源加法器。量化器电路将第一比较器输入端的求和信号与第二比较器输入端的信号进行比较，该第二比较器输入端从第一输入信号导出并具有适当的极性，使得求和信号与第二比较器输入端的信号之间的差值表示第一输入信号和多个第二输入信号的和。比较器还基于第一输入信号和多个第二输入信号的和产生比较器输出信号。量化器电路还具有用于确定来自比较器输出信号的和的多位表示的控制逻辑块。

57. 发明授权

US11609223B2 Device and a method for analysis of cells 有权
公开(公告)号：US11609223B2
公开(公告)日：2023-03-21
申请号：US16035574
申请日：2018-07-13
申请人： IMEC VZW
发明人： Carolina Mora Lopez
IPC分类号： G01N33/483 , G01N27/414 , H03F3/45 , B01L3/00 , B01J19/00
摘要： A device for analysis of cells comprises: an active sensor area (104) presenting a surface for cell growth; a microelectrode array (102) comprising a plurality of pixels (110) in the active sensor area (104), wherein each pixel (110) comprises at least one electrode (120) at the surface, wherein each pixel (110) is configured to control the configuration of the pixel circuitry and set a measurement modality of the pixel; recording circuitry having a plurality of recording channels (130), wherein each pixel (110) is connected to a recording channel (130), wherein each recording channel (130) comprises a reconfigurable component (131), which is selectively controlled between being set to a first mode, in which the reconfigurable component (131) is configured to amplify a received pixel signal, and being set to a second mode, in which the reconfigurable component (131) is configured to selectively pass a frequency band of the received pixel signal.

58. 发明申请

US20230078976A1 MACH-ZEHNDER MODULATOR 有权
公开(公告)号：US20230078976A1
公开(公告)日：2023-03-16
申请号：US17800931
申请日：2021-02-19
申请人： UNIVERSITEIT GENT , IMEC VZW
发明人： Laurens BREYNE
IPC分类号： G02F1/21 , G02F1/225 , G02B6/125
摘要： An electro-optic Mach-Zehnder modulator comprising a first and a second optical waveguide, and a plurality of pairs of electro-optic phase shifters forming segments, for each pair one phase shifter per optical waveguide, distributed over the length of the optical waveguides, wherein the electro-optic phase shifters are configured for phase-modulating the optical signals. The modulator, moreover, comprising at least one crossing element configured for crossing the optical waveguides between two segments.

59. 发明申请

US20230067864A1 System and Method for Photoacoustic Inspection of an Object 有权
公开(公告)号：US20230067864A1
公开(公告)日：2023-03-02
申请号：US17800322
申请日：2021-02-15
申请人： IMEC VZW , Universiteit Gent
发明人： YanLu Li , Roeland Baets
IPC分类号： G01N29/24 , G01N29/46
摘要： The disclosure includes a system for photoacoustic inspection of an object. The system includes a broadband emission source configured to generate an emission beam, a direction apparatus including at least one spectrum splitter configured to split the emission beam into at least a first and a second component, the direction apparatus being configured to sequentially direct the respective components to N respective locations on the object at N times to generate N respective acoustic waves within the object. The N respective locations and N times are such that the respective N acoustic waves at least semi-constructively interfere to generate a respective propagating acoustic wave within the object. The system also includes a vibration sensing system configured to detect said respective propagating acoustic waves at a respective detection location on the object.

60. 发明授权

US11587708B2 Magnetic device with a hybrid free layer stack 有权
公开(公告)号：US11587708B2
公开(公告)日：2023-02-21
申请号：US17038470
申请日：2020-09-30
申请人： IMEC vzw , Katholieke Universiteit Leuven
发明人： Van Dai Nguyen , Sebastien Couet , Olivier Bultynck , Danny Wan , Eline Raymenants
IPC分类号： G11C11/16 , H01F10/32 , G01R33/09 , H01L27/22 , H01L43/02 , H01L43/08 , H01L43/10 , H01L43/12
摘要： In one aspect, the disclosed technology relates to a magnetic device, which may be a magnetic memory and/or logic device. The magnetic device can comprise a seed layer; a first free magnetic layer provided on the seed layer; an interlayer provided on the first free magnetic layer; a second free magnetic layer provided on the interlayer; a tunnel barrier provided on the second free magnetic layer; and a fixed magnetic layer. The first free magnetic layer and the second free magnetic layer can be ferromagnetically coupled across the interlayer through exchange interaction.

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