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    • 52. 发明申请
    • Titanium-Based High-K Dielectric Films
    • 钛基高K介电薄膜
    • US20130044404A1
    • 2013-02-21
    • US13657782
    • 2012-10-22
    • Intermolecular, Inc.
    • Hanhong ChenNobumichi FuchigamiImran HashimEdward L. HaywoodPragati KUMARSandra G. MalhotraMonica Sawkar MathurPrashant B. PhatakSunil Shanker
    • H01G4/30H01G4/018
    • H01G4/1218C23C16/405C23C16/45531C23C16/56H01G4/33H01L21/02186H01L21/022H01L21/0228H01L21/02312H01L21/02337H01L21/3141H01L21/3142H01L28/40
    • This disclosure provides (a) methods of making an oxide layer (e.g., a dielectric layer) based on titanium oxide, to suppress the formation of anatase-phase titanium oxide and (b) related devices and structures. A metal-insulator-metal (“MIM”) stack is formed using an ozone pretreatment process of a bottom electrode (or other substrate) followed by an ALD process to form a TiO2 dielectric, rooted in the use of an amide-containing precursor. Following the ALD process, an oxidizing anneal process is applied in a manner is hot enough to heal defects in the TiO2 dielectric and reduce interface states between TiO2 and electrode; the anneal temperature is selected so as to not be so hot as to disrupt BEL surface roughness. Further process variants may include doping the titanium oxide, pedestal heating during the ALD process to 275-300 degrees Celsius, use of platinum or ruthenium for the BEL, and plural reagent pulses of ozone for each ALD process cycle. The process provides high deposition rates, and the resulting MIM structure has substantially no x-ray diffraction peaks associated with anatase-phase titanium oxide.
    • 本公开内容提供(a)制造基于氧化钛的氧化物层(例如电介质层)的方法,以抑制锐钛矿相氧化钛的形成和(b)相关的器件和结构。 使用底部电极(或其他基底)的臭氧预处理随后进行ALD工艺形成金属 - 绝缘体 - 金属(MIM)堆叠,以形成使用含酰胺前体的TiO 2电介质。 在ALD工艺之后,氧化退火工艺的应用热度足以愈合TiO2电介质中的缺陷,并降低TiO2和电极之间的界面态; 选择退火温度以使其不那么热,以致破坏BEL表面粗糙度。 进一步的工艺变型可以包括在ALD工艺期间掺杂氧化钛,基座加热至275-300摄氏度,对于BEL使用铂或钌,对于每个ALD工艺循环使用多个试剂脉冲的臭氧。 该方法提供高沉积速率,并且所得MIM结构基本上没有与锐钛矿相氧化钛相关的x射线衍射峰。
    • 55. 发明申请
    • MLCC module
    • MLCC模块
    • US20100020467A1
    • 2010-01-28
    • US12230189
    • 2008-08-26
    • Jung Rag YoonKyung Min LeeBong Wha MoonSang Won LeeMin Kee Kim
    • Jung Rag YoonKyung Min LeeBong Wha MoonSang Won LeeMin Kee Kim
    • H01G4/008H01G4/018
    • H01G4/232H01G4/224H01G4/2325Y02T10/7022
    • Provided is a MLCC module used as a direct current (DC) link capacitor that is included in an inverter of a hybrid vehicle. The MLCC module includes: a plurality of first ceramic sheets 10, each including a plurality of first internal electrode portions 20; a plurality of second ceramic sheets 30, each being disposed between the plurality of first ceramic sheets 10 respectively to include a plurality of second internal electrode portions 40; a plurality of external electrode portions 50 being connected to the plurality of first internal electrode portions 20, respectively; a plurality of clamp lead electrode portions 60 being connected to the plurality of external electrode portions 50 to input and output electrical signals, respectively; and an epoxy molding compound (EMC) molding member sealing the plurality of first ceramic sheets 10, the plurality of second ceramic sheets 30, and the plurality of external electrode portions 50 to expose one ends of the plurality of clamp lead electrode portions 50, respectively.
    • 提供了一种用作混合动力车辆的逆变器中的直流(DC)链路电容器的MLCC模块。 MLCC模块包括:多个第一陶瓷片10,每个第一陶瓷片10包括多个第一内部电极部分20; 多个第二陶瓷片30分别设置在多个第一陶瓷片10之间,以包括多个第二内部电极部分40; 多个外部电极部分50分别连接到多个第一内部电极部分20; 多个夹持引线电极部分60分别连接到多个外部电极部分50以输入和输出电信号; 和密封多个第一陶瓷片10,多个第二陶瓷片30和多个外部电极部分50的环氧树脂模塑料(EMC)模塑件,以分别暴露多个夹持引线电极部分50的一端 。