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    • 65. 发明公开
    • OPTICAL MEASUREMENT APPARATUS AND METHOD OF RAPID MEASUREMENT
    • US20240241041A1
    • 2024-07-18
    • US18563783
    • 2022-05-16
    • Occuity Limited
    • James REYNOLDS
    • G01N21/31G01B11/06
    • G01N21/31G01B11/06
    • An optical measurement apparatus (100) combining confocal measurement and low-coherence interferometric measurement comprising: a Fourier domain interferometric measurement subsystem (104) comprising a spectrometer (110) operably coupled to a reference arm (136), a measurement arm (138) and a source of electromagnetic radiation (106) via an optical coupler (108), the spectrometer (110) comprising a spectral signal generator (146) responsive to received reflected electromagnetic radiation. A confocal measurement subsystem (102) is also provided comprising an optical scanner (120) having a predetermined scan range for longitudinally scanning, when in use, a beam along a region (128) to be measured. A processing resource (142, 144) is operably coupled to the Fourier domain interferometric measurement subsystem (104) and the confocal measurement subsystem (102) and the confocal measurement subsystem (102) shares the measurement arm (138) with the Fourier domain interferometric measurement subsystem (104), the shared measurement arm (138) comprising the optical scanner (120) of the confocal measurement subsystem (102). The reference arm (136) comprises a reference optical reflector element (130, 132, 134), and the processing resource (142, 144) is configured to provide an accumulator (148) operably coupled to the spectral signal generator (146).