专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20230139507A1 CHARGED PARTICLE BEAM DEVICE 有权
公开(公告)号：US20230139507A1
公开(公告)日：2023-05-04
申请号：US17918144
申请日：2020-05-19
申请人： Hitachi High-Tech Corporation
发明人： Shiano ONO , Yuuji KASAI , Shuichi NAKAGAWA , Toshihiko SHIMIZU
IPC分类号： H01J37/20 , H01J37/16
摘要： The present invention provides a charged particle beam device (1) capable of attenuating intrinsic vibrations of an ion pump (104) which is connected to a lens barrel (101), regardless of the length of the lens barrel (101). A charged particle beam device (1) according to the present invention comprises: a lens barrel (101) for irradiating a sample (108) with a charged particle beam (106); an ion pump (104) which is connected to the lens barrel (101) and which evacuates the air inside the lens barrel (101); and a support member (117), one end of which is connected to the ion pump (104), and the other end of which is connected the lens barrel (101). The support member (117) includes a viscoelastic body (118) which is provided substantially parallel to the central axis (114) of the lens barrel (101).

2. 发明申请

US20230139301A1 AUTOMATED ANALYZER 有权
公开(公告)号：US20230139301A1
公开(公告)日：2023-05-04
申请号：US17910927
申请日：2021-02-03
申请人： Hitachi High-Tech Corporation
发明人： Daisuke EBIHARA , Shinya MATSUOKA
IPC分类号： G01N35/10 , G01N35/00
摘要： To provide an automatic analyzer capable of relaxing the effect of a previously created mixed liquid when a new mixed liquid is created. An automatic analyzer according to the present disclosure: is configured so as to create a second mixed liquid after a first mixed liquid is created; and introduces a relaxation reagent to relax the effect of a first reagent remaining in a mixed liquid chamber when the second mixed liquid is created into the mixed liquid chamber on the basis of characteristics of the first mixed liquid.

3. 发明申请

US20230136020A1 NUCLEIC ACID ANALYSIS DEVICE 有权
公开(公告)号：US20230136020A1
公开(公告)日：2023-05-04
申请号：US17918447
申请日：2020-05-27
申请人： HITACHI HIGH-TECH CORPORATION
发明人： Toshifumi MITSUYAMA , Junji ISHIZUKA , Hitoshi MIYATA , Tomohiro SHOJI
IPC分类号： G01N35/02 , G01N35/10
摘要： The present invention provides a nucleic acid analysis device that, even when a plurality of flow cells is handled, does not require an increase in the required movement amount, and can be reduced in size by reducing the size of a stage mechanism. This nucleic acid analysis device is characterized by having a sample container containing a nucleic acid sample to be analyzed, an imaging means for observing the nucleic acid sample, and a stage mechanism for moving the sample container, and is characterized in that the stage mechanism has two translation means and at least one rotation means, one of the two translation means is disposed on the upper surface of the rotation means, and the other is disposed on the lower surface of the rotation means.

4. 发明申请

US20230123459A1 LIQUID CHROMATOGRAPHIC APPARATUS AND AIR BUBBLE REMOVAL METHOD OF LIQUID CHROMATOGRAPHIC APPARATUS 有权
公开(公告)号：US20230123459A1
公开(公告)日：2023-04-20
申请号：US17911763
申请日：2021-03-05
申请人： HITACHI HIGH-TECH CORPORATION
发明人： Midori TOBITA , Yuichiro HASHIMOTO , Nobuhiro TSUKADA
IPC分类号： G01N30/32
摘要： A liquid chromatographic apparatus which removes air bubbles during preparatory operation for apparatus startup which includes a liquid feeding pump to feed a solvent, an injector to inject a sample into the solvent, a separation column to receive the solvent and the sample through the injector and separate the sample into components, a detector to detect the components supplied from the separation column, a pressure sensor to measure a pressure in a solvent flow channel of the liquid feeding pump, and a controller to control a purge operation for removing air bubbles in the solvent flow channel by the liquid feeding pump, judges whether a pressure change amount in the solvent flow channel measured by the pressure sensor during the purge operation is a specified change amount or larger, and completes the air bubble removal operation when the pressure change amount is the specified change amount or larger.

5. 发明申请

US20230118576A1 WAFER PROCESSING METHOD AND PLASMA PROCESSING APPARATUS 有权
公开(公告)号：US20230118576A1
公开(公告)日：2023-04-20
申请号：US16978911
申请日：2019-12-20
申请人： Hitachi High-Tech Corporation
发明人： Hiroyuki Kobayashi , Atsushi Sekiguchi , Tatehito Usui , Soichiro Eto , Shigeru Nakamoto , Kazunori Shinoda , Nobuya Miyoshi
IPC分类号： H01J37/32 , H01L21/66
摘要： This invention provides a wafer processing method comprising a process of irradiating a wafer to be processed placed on the upper surface of a sample table arranged in a processing chamber with light or electromagnetic waves to heat and remove a compound layer of a film layer that is preliminarily formed on the upper surface of the film layer of the upper surface of the wafer, wherein in the process, by receiving the light or electromagnetic waves reflected by the upper surface of the wafer, a signal indicating a temporal change in intensity using the wavelength of the light or electromagnetic waves as a parameter is corrected using information of the intensity of the light or electromagnetic waves detected by receiving the light or electromagnetic waves at a position on the circumferential side of the upper surface of the sample table.

6. 发明申请

US20230101039A1 MANUFACTURING METHOD AND INSPECTION METHOD OF INTERIOR MEMBER OF PLASMA PROCESSING APPARATUS 有权
公开(公告)号：US20230101039A1
公开(公告)日：2023-03-30
申请号：US16979671
申请日：2019-12-23
申请人： Hitachi High-Tech Corporation
发明人： Kazuhiro Ueda , Masaru Kurihara , Kazuyuki Ikenaga , Tomoyuki Tamura
IPC分类号： C23C16/44 , C23C4/134 , G01N23/20 , H01J37/32 , H01L21/3065
摘要： Provided is a manufacturing method of an interior member of a plasma processing apparatus, which improves processing yield. The interior member is disposed inside a processing chamber of the plasma processing apparatus and includes, on a surface thereof, a film of a material having resistance to plasma. The manufacturing method includes: a step of moving a gun by a predetermined distance along the surface of the interior member to spray the material to form the film, and disposing a test piece having a surface having a shape simulating a surface shape of the interior member within a range of the distance within which the gun is moved and forming the film of the material on the surface of the test piece; and a step of adjusting, based on a result of detecting a crystal size of the film on the surface of the test piece and presence or absence of a residual stress or inclusion of a contaminant element, a condition of forming the film on the surface of the interior member by the gun.

7. 发明申请

US20230097384A1 BIOLOGICAL SAMPLE ANALYSIS DEVICE 有权
公开(公告)号：US20230097384A1
公开(公告)日：2023-03-30
申请号：US17913565
申请日：2021-02-08
申请人： HITACHI HIGH-TECH CORPORATION
发明人： Mayu SAO , Hirofumi INOMATA , Fumiyasu SATO
IPC分类号： G06V10/22 , G06V10/60 , G06V10/75 , G06V10/26 , G06V10/56 , G06V10/764 , G06T7/73 , G06T5/00 , G06T7/90 , G01N21/27 , G01N21/03 , G01N35/00
摘要： An object of the present disclosure is to provide a technique capable of acquiring an analysis target region and color information without causing a decrease in extraction accuracy of the analysis target region due to erroneous extraction of a color of a colored label, measuring a solution volume of the specimen, and determining a specimen type. The biological specimen analysis device according to the present disclosure creates a developed view by cutting out a partial region from a color image of a biological sample tube and connecting the partial region along a circumferential direction of the biological sample tube, and extracts a detection target region from the developed view (see FIG. 6B).

8. 发明申请

US20230095937A1 Automatic Analysis Apparatus 有权
公开(公告)号：US20230095937A1
公开(公告)日：2023-03-30
申请号：US18075707
申请日：2022-12-06
申请人： Hitachi High-Tech Corporation
发明人： Ayaka Hashimoto , Kazunori Yamazawa , Takenori Okusa
IPC分类号： G01N35/10
摘要： To provide a high-throughput automatic analysis apparatus at a lower cost. The automatic analysis apparatus includes an incubator which accommodates a plurality of reaction vessels; a specimen dispensing mechanism which dispenses a specimen into each of the plurality of reaction vessels; a mounting unit which mounts a dispensing tip on the specimen dispensing mechanism; a suction unit which sucks a specimen from a specimen vessel containing the specimen by means of the specimen dispensing mechanism having the dispensing mounted thereon; a discharging unit which is provided in the incubator and discharges the specimen from the specimen dispensing mechanism to the reaction vessel; a disposal unit which discards the dispensing tip; a sensor which detects whether the dispensing tip is mounted to the specimen dispensing mechanism; and a control unit which controls the specimen dispensing mechanism. The mounting unit, the suction unit, the discharging unit, and the disposal unit are arranged along a movement path of the specimen dispensing mechanism. The sensor is arranged so as to be able to detect the dispensing tip at a position sandwiched between any two of the mounting unit, the suction unit, the discharging unit, and the disposal unit.

9. 发明授权

US11610754B2 Charged particle beam device 有权
公开(公告)号：US11610754B2
公开(公告)日：2023-03-21
申请号：US17294468
申请日：2018-12-06
申请人： Hitachi High-Tech Corporation
发明人： Katsura Takaguchi , Yohei Nakamura , Masahiro Sasajima , Toshihide Agemura , Natsuki Tsuno
IPC分类号： H01J37/22 , H01J37/244 , H01J37/28
摘要： An object of the invention is to provide a charged particle beam device capable of specifying an irradiation position of light on a sample when there is no mechanism for forming an image of backscattered electrons. The charged particle beam device according to the invention determines whether an irradiation position of a primary charged particle beam and an irradiation position of light match based on a difference between a first observation image acquired when the sample is irradiated with only the primary charged particle beam and a second observation image acquired when sample is irradiated with the light in addition to the primary charged particle beam. It is determined whether the irradiation position of the primary charged particle beam and the irradiation position of the light match using the first observation image and a measurement result by a light amount measuring device.

10. 发明申请

US20230079568A1 AUTOMATIC ANALYZER 有权
公开(公告)号：US20230079568A1
公开(公告)日：2023-03-16
申请号：US17802215
申请日：2021-02-17
申请人： Hitachi High-Tech Corporation
发明人： Shunsuke BABA , Toshiyuki INABE
IPC分类号： G01N35/04
摘要： Provided is an automatic analyzer capable of detecting a specimen vessel even when a barcode label is not attached to the specimen vessel. Included are a reagent specimen disk including a mounting unit for mounting a specimen vessel that stores a specimen to be analyzed on an outer peripheral portion thereof, a two-dimensional code arranged on the reagent specimen disk at a back position of the mounting unit, a barcode arranged on a side surface of the specimen vessel, a sensor arranged at a front position of the mounting unit and capable of reading the two-dimensional code and the barcode, and a control unit for determining whether the specimen vessel is mounted on the mounting unit based on whether a contrast value of the light reflected from the two-dimensional code is equal to or greater than a threshold set in advance, by using an output signal of the sensor.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式