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71. 发明申请

US20030017359A1 Increased stability low concentration gases, products comprising same, and methods of making same 审中-公开
标题翻译：增加稳定性的低浓度气体，包含其的产品及其制备方法
公开(公告)号：US20030017359A1
公开(公告)日：2003-01-23
申请号：US10157466
申请日：2002-05-29
申请人： American Air Liquide, Inc.
发明人： Tracey J. Jacksier , Robert Benesch
IPC分类号： B32B015/00 , C25D005/10 , B32B015/10 , C25D001/00 , C21D009/08 , C22F001/00 , C21D001/00
CPC分类号： B08B9/28 , B08B9/22 , B08B2203/005 , C23C16/045 , C23G5/00 , F17C1/10 , F17C3/12 , F17C2201/0104 , F17C2201/0128 , F17C2201/052 , F17C2203/0604 , F17C2203/0636 , F17C2203/0639 , F17C2203/0643 , F17C2203/0646 , F17C2203/0648 , F17C2205/0323 , F17C2209/2172 , F17C2209/232 , F17C2221/037 , F17C2223/0123 , F17C2223/013 , F17C2223/0146 , F17C2223/0153 , F17C2260/053 , Y10T428/12736 , Y10T428/12972
摘要： Methods of passivating a metal surface are described, the methods comprising the steps of i) exposing the metal surface to a silicon-containing passivation material; ii) evacuating the metal surface; iii) exposing the treated surface to a gas composition having a concentration of reactive gas that is greater than an intended reactive gas concentration of gas to be transported by the metal surface; iv) evacuating the metal surface to remove substantially all of the gas composition to enable maintenance of an increased shelf-life, low concentration reactive gas at an intended concentration; and v) exposing the metal surface to the reactive gas at the intended reactive gas concentration. Manufactured products, high stability fluids, and methods of making same are also described.
摘要翻译：描述了钝化金属表面的方法，所述方法包括以下步骤：i）将金属表面暴露于含硅钝化材料; ii）排空金属表面; iii）将经处理的表面暴露于具有大于由金属表面输送的气体的预期反应气体浓度的反应气体浓度的气体组合物; iv）抽出金属表面以去除基本上所有的气体组合物，以便维持预期浓度的增加的保质期低浓度反应气体; 和v）以预期的反应气体浓度将金属表面暴露于反应性气体。还描述了制造产品，高稳定性流体及其制备方法。

72. 发明申请

US20030015223A1 Methods of cleaning containers using ozone compositions 审中-公开
标题翻译：使用臭氧组合物清洗容器的方法
公开(公告)号：US20030015223A1
公开(公告)日：2003-01-23
申请号：US10157536
申请日：2002-05-29
申请人： American Air Liquide, Inc.
发明人： Tracey Jacksier , V.S. Meenakshi Sundaram , Steven A. Fisher , Robert Benesch , Bruce Talbert
IPC分类号： B08B009/08
CPC分类号： C23G5/00 , B08B9/22 , B08B9/28 , B08B2203/005
摘要： Methods of cleaning metal containers, and containers having internal metal linings are described. The methods comprise the steps of exposing the internal metallic surface to a composition comprising ozone, the internal metallic surface having thereon a residue, contacting the composition comprising ozone with the internal metallic surface for a time sufficient to either remove the residue, chemically modify the residue to form a modified residue that may be removed by other means, or deactivate the residue.
摘要翻译：描述了清洁金属容器和具有内部金属衬垫的容器的方法。该方法包括以下步骤：将内部金属表面暴露于包含臭氧的组合物，其内部金属表面上具有残余物，使包含臭氧的组合物与内部金属表面接触足以消除残余物的时间，化学改性残余物以形成可以通过其它方法除去或者使残余物失活的改性残基。

73. 发明申请

US20020190035A1 Methods and apparatus for localized heating of metallic and non-metallic surfaces 有权
标题翻译：用于局部加热金属和非金属表面的方法和装置
公开(公告)号：US20020190035A1
公开(公告)日：2002-12-19
申请号：US10097667
申请日：2002-03-14
申请人： American Air Liquide, Inc.
发明人： Frederick W. Giacobbe , Joseph E. Paganessi , Yves Bourhis
IPC分类号： B23K015/00
CPC分类号： B23K26/0884 , B23K1/0056 , B23K15/00 , B23K26/0624 , B23K26/064 , B23K26/0648 , B23K26/0665 , B23K26/082 , B23K26/083 , B23K26/12 , B23K26/1224 , B23K26/123 , B23K26/21 , B23K26/354 , B23K26/40 , B23K2101/42 , B23K2103/30 , B23K2103/50
摘要： A method of treating an object containing a material of metal, oxidized metal, non-metal, and the like and combinations thereof. The method includes (a) exposing an object to a controlled gas atmosphere, and (b) during at least a portion of time during such exposing, subjecting a specific area of the material to an energy beam, preferably a focused energy beam, more preferably a focused and filtered energy beam, having sufficient intensity to provide for the treating of the specific area. Such treating includes heating, welding, cutting, dicing, soldering, singulating, reducing, oxidizing, fusing, melting, and the like and combinations thereof. The energy beam source can be a laser selected from a group which includes YAG lasers, excimer lasers, gas lasers, semiconductor lasers, solid-state lasers, dye lasers, X-ray lasers, free-electron lasers, ion lasers, gas mixture lasers, chemical lasers, and the like and combinations thereof. The method can further include contacting the material with a second material or several second materials. Such contacting can include welding, soldering, fusing, melting, joining, bonding, and the like and combinations thereof.
摘要翻译：一种处理包含金属，氧化金属，非金属等材料的物体的方法及其组合。该方法包括（a）将物体暴露于受控气体气氛中，以及（b）在这种暴露期间的至少一部分时间内，使材料的特定区域经受能量束，优选聚焦能量束，更优选地聚焦和过滤的能量束，具有足够的强度以提供特定区域的处理。这种处理包括加热，焊接，切割，切割，焊接，分割，还原，氧化，熔合，熔融等及其组合。能量束源可以是从包括YAG激光器，准分子激光器，气体激光器，半导体激光器，固态激光器，染料激光器，X射线激光器，自由电子激光器，离子激光器，气体混合激光器的组中选择的激光器，化学激光器等及其组合。该方法还可以包括使材料与第二材料或几种第二材料接触。这种接触可以包括焊接，焊接，熔合，熔化，接合，粘合等及其组合。

74. 发明申请

US20020031737A1 Method for continuously monitoring chemical species and temperature in hot process gases 审中-公开
标题翻译：连续监测热处理气体中化学物质和温度的方法
公开(公告)号：US20020031737A1
公开(公告)日：2002-03-14
申请号：US09964017
申请日：2001-09-26
申请人： American Air Liquide, Inc.
发明人： William A. Von Drasek , Olivier Charon , David M. Sonnenfroh , Phillip A. Mulhall , Mark G. Allen , Eric Wetjen
IPC分类号： F23N005/08
CPC分类号： G01N21/39 , G01N21/85 , G01N2021/399 , G01N2021/8416
摘要： Methods and apparatus are presented using tunable diode lasers for monitoring and/or controlling a high temperature process using an oxidizer containing O2 and organic fuel. Real-time monitoring of key species such as O2, CO, and H2O allow determination of the global or local stoichiometry, gas temperature, particulate concentration, and air entrainment levels into the process. Coupling the measured information with a control system provides a means for optimizing and controlling the process.
摘要翻译：使用可调谐二极管激光器来呈现使用含有O 2和有机燃料的氧化剂监测和/或控制高温过程的方法和装置。关键物质如O2，CO和H2O的实时监测可以确定全局或局部化学计量，气体温度，颗粒浓度和进入该过程的气体夹带水平。将测量的信息与控制系统耦合，提供了优化和控制过程的手段。

75. 发明申请

US20010018962A1 Heat exchanger for preheating an oxidizing gas 审中-公开
标题翻译：用于预热氧化气体的热交换器
公开(公告)号：US20010018962A1
公开(公告)日：2001-09-06
申请号：US09768099
申请日：2001-01-23
申请人： American Air Liquide Inc.
发明人： Mahendra L. Joshi , Arnaud Fossen , Harley A. Borders , Remi Pierre Tsiava , Olivier Charon
IPC分类号： F28F001/00 , F28F011/00 , F28F009/02 , F28D001/00
CPC分类号： F28D7/06 , F28D7/1607 , F28F9/0219 , F28F9/0229 , F28F9/0236 , F28F9/26 , F28F13/08 , F28F27/00 , F28F2265/16 , F28F2275/20
摘要： A heat exchanger useful for preheating oxidizing gases in a combustion process includes a shell having an inlet and an outlet for the ingress and egress of a first heat exchange fluid, such as a flue gas or preheated air. A first tube manifold couples an inlet end-cap to the first end of the shell. The inlet end-cap has an inlet for receiving a second heat exchange fluid, such as an oxidizing gas. In one embodiment, a second manifold couples an outlet end-cap to the second end of the shell. The second manifold includes an outlet tube therein extending from the second manifold through an outlet opening in the outlet end-cap. A tube bundle is disposed within the shell for transporting the oxidizing gas through the heat exchanger and is coupled to the first and second tube manifolds. The outlet tube collects oxidizing gas flowing through the tube bundle for discharge to a combustion system. The outlet end-cap is pressurized with an inert atmosphere and houses a chemical detector to detect the presence of oxidizing gas within the outlet end-cap.
摘要翻译：在燃烧过程中用于预热氧化气体的热交换器包括具有用于第一热交换流体例如烟气或预热空气的入口和出口的入口和出口的壳体。第一管歧管将入口端盖连接到壳的第一端。入口端盖具有用于接收第二热交换流体（例如氧化气体）的入口。在一个实施例中，第二歧管将出口端盖连接到壳的第二端。第二歧管包括其中从第二歧管延伸通过出口端盖中的出口开口的出口管。管束设置在壳体内，用于将氧化气体输送通过热交换器并联接到第一和第二管道歧管。出口管收集流过管束的氧化气体，以排放到燃烧系统。出口端盖用惰性气体加压，并容纳化学检测器以检测出口端盖内的氧化气体的存在。

76. 发明授权

US6096114A Process for recovering SF.sub.6 from a gas 失效
标题翻译：从气体中回收SF6的工艺
公开(公告)号：US6096114A
公开(公告)日：2000-08-01
申请号：US182771
申请日：1998-10-30
申请人： Yao-En Li , Magdy Meimari
发明人： Yao-En Li , Magdy Meimari
IPC分类号： B01D53/22
CPC分类号： B01D53/225 , B01D53/22 , Y02C10/10
摘要： A process for recovering SF.sub.6 from a gas is provided. The process includes the step of contacting a gas stream comprising SF.sub.6 and at least one of N.sub.2, O.sub.2, CO.sub.2, and H.sub.2 O with a membrane in at least one membrane separation unit at conditions effective to obtain a retentate stream rich in SF.sub.6 and a permeate stream rich in at least one of N.sub.2, O.sub.2, CO.sub.2, and H.sub.2 O. A process for forming solidified Mg metal is also provided. The process includes recovering and/or recycling of SF.sub.6 and/or CO.sub.2.
摘要翻译：提供了从气体中回收SF6的方法。该方法包括在有效获得富含SF 6的渗余物流和渗透物流的条件下，将包含SF 6和N 2，O 2，CO 2和H 2中的至少一种的气流与至少一个膜分离单元中的膜接触的步骤富含N 2，O 2，CO 2和H 2 O中的至少一种。还提供了一种用于形成固化的Mg金属的方法。该方法包括SF6和/或CO 2的回收和/或回收。

77. 发明授权

US6068468A Refractory block for use in a burner assembly 失效
$Refractory block for use in a burner assembly$
标题翻译：用于燃烧器组件的耐火块
公开(公告)号：US6068468A
公开(公告)日：2000-05-30
申请号：US093495
申请日：1998-06-08
申请人： Louis C. Philippe , Harley A. Borders , Kenneth A. Mulderink , Pierre Bodelin , Patrick Recourt , Lahcen Ougarane , Remi Tsiava , Bernard Dubi , Laurent Rio
发明人： Louis C. Philippe , Harley A. Borders , Kenneth A. Mulderink , Pierre Bodelin , Patrick Recourt , Lahcen Ougarane , Remi Tsiava , Bernard Dubi , Laurent Rio
IPC分类号： F23C99/00 , C03B5/235 , F23C5/14 , F23C7/02 , F23D14/22 , F23D14/32 , F23D99/00 , F23M5/02 , F23D14/84 , F23D21/00 , F23M3/02
CPC分类号： C03B5/2353 , F23D14/22 , F23D14/32 , F23M5/025 , F23D2900/00013 , Y02P40/55
摘要： A burner assembly having improved flame length and shape control is presented, which includes in exemplary embodiments at least one fuel fluid inlet and at least one oxidant fluid inlet, means for transporting the fuel fluid from the fuel inlet to a plurality of fuel outlets-, the fuel fluid leaving the fuel outlets in fuel streams that are injected into a combustion chamber, means for transporting the oxidant fluid from the oxidant inlets to at least one oxidant outlet, the oxidant fluid leaving the oxidant outlets in oxidant fluid streams that are injected into the combustion chamber, with the fuel and oxidant outlets being physically separated, and geometrically arranged in order to impart to the fuel fluid streams and the oxidant fluid streams angles and velocities that allow combustion of the fuel fluid with the oxidant in a stable, wide, and luminous flame. Alternatively, injectors may be used alone or with the refractory block to inject oxidant and fuel gases. The burner assembly affords improved control over flame size and shape and may be adjusted for use with a particular furnace as required.
摘要翻译：提供了具有改进的火焰长度和形状控制的燃烧器组件，其在示例性实施例中包括至少一个燃料流体入口和至少一个氧化剂流体入口，用于将燃料流体从燃料入口输送到多个燃料出口的装置，燃料流体在喷射到燃烧室中的燃料流中离开燃料出口，用于将氧化剂流体从氧化剂入口输送到至少一个氧化剂出口的装置，氧化剂流体在注入到氧化剂流体流中离开氧化剂出口所述燃烧室与所述燃料和氧化剂出口物理分离，并且几何地布置以便赋予燃料流体流和氧化剂流体流的角度和速度，其允许燃料流体与氧化剂在稳定，宽的，和发光的火焰。或者，喷射器可以单独使用或与耐火块一起使用以注入氧化剂和燃料气体。燃烧器组件提供了对火焰尺寸和形状的改进的控制，并且可以根据需要调节用于特定的炉。

78. 发明授权

US6045353A Method and apparatus for optical flame control of combustion burners 失效
标题翻译：燃烧式燃烧器的光学火焰控制方法和装置
公开(公告)号：US6045353A
公开(公告)日：2000-04-04
申请号：US859393
申请日：1997-05-20
申请人： William VonDrasek , Louis C. Philippe , Eric L. Duchateau
发明人： William VonDrasek , Louis C. Philippe , Eric L. Duchateau
IPC分类号： F23N1/02 , F23N5/08
CPC分类号： F23N5/082 , F23N1/02 , F23N2035/06 , F23N2035/12
摘要： In accordance with the present invention, methods and apparatus to control the combustion of a burner are presented which overcome many of the problems of the prior art. One aspect of the invention comprises a burner control apparatus including a device for viewing light emitted by a flame from a burner, a device for optically transporting the viewed light into an optical processor, an optical processor for processing the optical spectrum into electrical signals, a signal processing for processing the electrical signals obtained from the optical spectrum, and a control device which accepts the electrical signals and produces an output acceptable to one or more oxidant or fuel flow control devices. The control device, which may be referred to as a "burner computer," functions to control the oxidant flow and/or the fuel flow to the burner. In a particularly preferred apparatus embodiment of the invention, a burner and the burner control apparatus are integrated into a single unit, which may be referred to as a "smart" burner.
摘要翻译：根据本发明，提出了一种控制燃烧器燃烧的方法和装置，其克服了现有技术的许多问题。本发明的一个方面包括一种燃烧器控制装置，包括用于观察来自燃烧器的火焰发出的光的装置，用于将观察到的光光学传输到光学处理器的装置，用于将光谱处理成电信号的光学处理器，用于处理从光谱获得的电信号的信号处理;以及接受电信号并产生一个或多个氧化剂或燃料流量控制装置可接受的输出的控制装置。可以称为“燃烧器计算机”的控制装置用于控制氧化剂流和/或燃烧器的燃料流。在本发明的特别优选的装置实施例中，燃烧器和燃烧器控制装置集成到单个单元中，其可以被称为“智能”燃烧器。

79. 发明授权

US5954940A Method for measuring coating quality 失效
公开(公告)号：US5954940A
公开(公告)日：1999-09-21
申请号：US885351
申请日：1997-06-30
申请人： Alan D. Zdunek , Paul Vanecek , Eugene A. Kernerman
发明人： Alan D. Zdunek , Paul Vanecek , Eugene A. Kernerman
IPC分类号： G01B5/06 , G01B7/06 , G01N17/02 , G01N17/04 , G01N27/26
CPC分类号： G01N17/046 , G01B5/066 , G01B7/06 , G01N17/02
摘要： A method and apparatus for measuring the quality, e.g., thickness, porosity, or corrosion rate, of a coating inside a hollow body having an opening. The method comprises attaching a probe from a coating measuring device to one end of an extender arm having a flexible portion therein, placing the probe inside the hollow body through the opening, and making the desired measurements of the coating.The apparatus includes a flexible extender arm for use with a coating measuring device. The flexible extender arm comprises an elongated, substantially rigid body portion; a handle assembly connected to one end of the substantially rigid body portion; a flexible portion connected to an opposite end of the substantially rigid body portion; a coating measurement probe holder portion connected to an end of the flexible portion opposite the substantially rigid body portion; and a pull connected at one end thereof to the substantially rigid body portion and connected at an opposite end thereof to the coating measurement probe holder portion.

80. 发明授权

US5835230A Method for calibration of a spectroscopic sensor 失效
标题翻译：光谱传感器校准方法
公开(公告)号：US5835230A
公开(公告)日：1998-11-10
申请号：US890926
申请日：1997-07-10
申请人： James J. F. McAndrew , Ronald S. Inman
发明人： James J. F. McAndrew , Ronald S. Inman
IPC分类号： G01J3/28 , G01J3/42 , G01N21/03 , G01N21/27 , G01N21/31 , G01N21/59
CPC分类号： G01N21/276 , G01J3/42 , G01J2003/2866
摘要： A novel method for calibration of a spectroscopic sensor is provided. In the method, a spectroscopic system is provided. The system includes a measurement cell having one or more walls which at least partially enclose a sample region. The cell further includes a light entry port and a light exit port. The light entry port and the light exit port can be the same port or separate ports. Each of the ports contains a light transmissive window through which a light beam passes along an internal light path inside the measurement cell. The system further has an optical chamber which contains a light source for generating the light beam which passes through the light entry port into the cell, and a detector for measuring the light beam exiting the cell through the light exit port. The light beam passes along an external light path inside the optical chamber. In addition, a gas inlet is connected to the optical chamber. A calibration gas stream is introduced into the optical chamber. The calibration gas stream contains a calibrating gas species and a carrier gas. The calibrating gas species is present in the calibration gas stream in a known concentration. A spectroscopy measurement of the calibration gas stream is then performed. The method finds particular applicability in the calibration of an in-line spectroscopic sensor useful in the detection of molecules of interest in a semiconductor processing tool.
摘要翻译：提供了一种用于校准光谱传感器的新方法。在该方法中，提供了光谱系统。该系统包括具有至少部分地包围样品区域的一个或多个壁的测量单元。电池还包括光入口和光出口。光入口和光出口可以是相同的端口或单独的端口。每个端口包含透光窗口，光束通过该透光窗口沿测量单元内部的内部光路传播。该系统还具有光学室，该光学室包含用于产生通过光入口进入单元的光束的光源，以及用于测量通过光出口离开单元的光束的检测器。光束通过光学室内的外部光路。此外，气体入口连接到光学室。校准气流被引入到光学室中。校准气流包含校准气体种类和载气。校正气体种类以已知浓度存在于校准气流中。然后进行校准气流的光谱测量。该方法在用于检测半导体加工工具中的分子的在线光谱传感器的校准中具有特别的适用性。

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