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    • 71. 发明授权
    • Vertical channel type nonvolatile memory device and method for fabricating the same
    • 垂直通道型非易失性存储器件及其制造方法
    • US08519471B2
    • 2013-08-27
    • US12964233
    • 2010-12-09
    • Seoung-Woo KukKang-Jae Lee
    • Seoung-Woo KukKang-Jae Lee
    • H01L29/792
    • H01L27/11551H01L27/11556H01L27/11578
    • A method for fabricating a vertical channel type nonvolatile memory device includes forming alternately a plurality of interlayer dielectric layers and a plurality of conductive layers over a substrate, forming a trench having a plurality of recesses on a surface of the trench by etching the plurality of interlayer dielectric layers and a plurality of conductive layers, wherein the plurality of recesses are formed at a certain interval on the surface of the trench, forming a charge blocking layer over a plurality of surfaces of the plurality of recesses, forming a charge storage layer over the charge blocking layer for filling a plurality of the remaining recesses with a charge storage material, forming a tunnel dielectric layer to cover the charge storage layer, and forming a vertical channel layer by filling the remaining trench.
    • 一种用于制造垂直沟道型非易失性存储器件的方法包括在衬底上交替地形成多个层间电介质层和多个导电层,通过蚀刻多个中间层在沟槽的表面上形成具有多个凹槽的沟槽 电介质层和多个导电层,其中所述多个凹槽在所述沟槽的表面上以一定间隔形成,在所述多个凹槽的多个表面上形成电荷阻挡层,在所述多个凹槽的上方形成电荷存储层 电荷阻挡层,用于用电荷存储材料填充多个剩余的凹槽,形成隧道电介质层以覆盖电荷存储层,以及通过填充剩余的沟槽形成垂直沟道层。
    • 75. 发明授权
    • Method for fabricating metal pattern in semiconductor device
    • 在半导体器件中制造金属图案的方法
    • US08513132B2
    • 2013-08-20
    • US13324419
    • 2011-12-13
    • Mi-Na Ku
    • Mi-Na Ku
    • H01L21/311H01L21/461H01L21/31H01L21/00
    • H01L21/32139H01L21/0337H01L21/31116H01L21/32136H01L21/76885
    • A method for fabricating a metal pattern in a semiconductor device includes forming a metal layer over a substrate, forming a hard mask layer over the metal layer, forming a sacrifice pattern over the hard mask layer, forming a spacer pattern on sidewalks of the sacrifice pattern, removing the sacrifice pattern, forming a hard mask pattern by etching the hard mask layer using the spacer pattern as an etch barrier, forming an etching protection layer over the hard mask pattern and on sidewalks of the hard mask pattern, and forming the metal pattern by performing primary and secondary etching processes on the metal layer using the etching protection layer as an etch barrier.
    • 在半导体器件中制造金属图案的方法包括在衬底上形成金属层,在金属层上形成硬掩模层,在硬掩模层上形成牺牲图案,在牺牲图案的人行道上形成间隔图案 去除牺牲图案,通过使用间隔图案作为蚀刻阻挡层蚀刻硬掩模层形成硬掩模图案,在硬掩模图案上方和硬掩模图案的人行道上形成蚀刻保护层,并且形成金属图案 通过使用蚀刻保护层作为蚀刻屏障在金属层上进行初级和次级蚀刻工艺。
    • 76. 发明授权
    • Data output circuit and data output method thereof
    • 数据输出电路及其数据输出方法
    • US08508272B2
    • 2013-08-13
    • US12778770
    • 2010-05-12
    • Jin-Il Chung
    • Jin-Il Chung
    • H03L7/00
    • H03K5/04H03K5/1565H03L7/0816
    • A data output circuit and a data output method thereof are provided. The data output circuit includes a delay locked loop, a duty ratio correction block, and an output unit. The delay locked loop corrects a duty ratio of a first internal clock. The delay locked loop includes a correction enable signal output unit configured to output a correction enable signal when the operation of correcting the duty ratio of the first internal clock is completed. The duty ratio correction block corrects the duty ratio of the first internal clock by using a duty ratio detection signal in response to the correction enable signal, and outputs the corrected first internal clock as an output clock. The output unit detects a duty ratio of the output clock, generates the duty ratio detection signal to the duty ratio correction block, and outputs a data strobe signal in response to the output clock.
    • 提供数据输出电路及其数据输出方法。 数据输出电路包括延迟锁定环,占空比校正块和输出单元。 延迟锁定环校正第一个内部时钟的占空比。 所述延迟锁定环路包括校正使能信号输出单元,被配置为当校正所述第一内部时钟的占空比的操作完成时,输出校正使能信号。 占空比校正块通过响应于校正使能信号使用占空比检测信号来校正第一内部时钟的占空比,并输出校正后的第一内部时钟作为输出时钟。 输出单元检测输出时钟的占空比,产生与占空比校正块的占空比检测信号,并响应于输出时钟输出数据选通信号。
    • 79. 发明授权
    • Semiconductor integrated circuit
    • 半导体集成电路
    • US08493135B2
    • 2013-07-23
    • US13100991
    • 2011-05-04
    • Jae-Boum Park
    • Jae-Boum Park
    • G05F1/10
    • H02M1/36H02M3/07H02M2001/0041
    • A semiconductor integrated circuit includes a pre-charge signal generator configured to pre-charge a plurality of oscillation signals to a certain voltage level in a pre-charge mode, wherein the pre-charge signal generator includes: a first storage unit for storing a first pre-charge oscillation signal in response to a reference oscillation signal, a feedback unit for feeding back a second pre-charge oscillation signal, a second storage unit for storing the second pre-charge oscillation signal corresponding to an output signal of the first storage unit in response to the reference oscillation signal, and a pre-charge signal output unit for outputting a pre-charge signal in response to the first pre-charge oscillation signal and the second pre-charge oscillation signal.
    • 半导体集成电路包括预充电信号发生器,其被配置为在预充电模式下将多个振荡信号预充电到一定电压电平,其中所述预充电信号发生器包括:第一存储单元,用于存储第一 响应于参考振荡信号的预充电振荡信号,用于反馈第二预充电振荡信号的反馈单元,用于存储与第一存储单元的输出信号相对应的第二预充电振荡信号的第二存储单元 响应于参考振荡信号,以及预充电信号输出单元,用于响应于第一预充电振荡信号和第二预充电振荡信号而输出预充电信号。