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    • 72. 发明授权
    • Method for forming semiconductor device
    • 半导体器件形成方法
    • US07615451B2
    • 2009-11-10
    • US11819852
    • 2007-06-29
    • Yoon Suk Hyun
    • Yoon Suk Hyun
    • H01L21/336
    • H01L29/66621H01L21/3086H01L27/1052
    • A method for forming a semiconductor device is provided. More specifically, a method for forming a bulb-shaped portion of a bulb-shaped recess gate is provided to overcome an etching process margin reduction caused by a spacer oxide film formed on sidewalls of a recess and thickly laminated to a lower part of a recess. In one aspect, a buffer dielectric film pattern is formed additionally by a plasma enhanced chemical vapor deposition (PECVD) process over a hard mask pattern, so that a sufficient process margin used for forming the bulb-shaped portion is ensured and a process margin for forming a semiconductor device is increased.
    • 提供一种形成半导体器件的方法。 更具体地,提供了一种用于形成灯泡状凹槽的灯泡形部分的方法,以克服由形成在凹槽的侧壁上的厚度层叠到凹部的下部的间隔氧化膜引起的蚀刻工艺边缘减小 。 在一个方面,通过在硬掩模图案上的等离子体增强化学气相沉积(PECVD)工艺另外形成缓冲电介质膜图案,从而确保用于形成灯泡形部分的足够的工艺余量和用于 形成半导体器件增加。
    • 74. 发明授权
    • RFID device having a nonvolatile ferroelectric memory
    • 具有非易失性铁电存储器的RFID装置
    • US07800481B2
    • 2010-09-21
    • US11482029
    • 2006-07-07
    • Hee Bok KangJin Hong Ahn
    • Hee Bok KangJin Hong Ahn
    • H04Q5/22G11C7/10G11C7/00
    • G06K19/07749G06K19/0701
    • A radio frequency identification (RFID) device includes an antenna configured to transmit or receive a radio frequency signal to or from an external communication apparatus; an analog block configured to generate a first power voltage in response to the radio frequency signal; a digital block configured to receive the first power voltage from the analog block, to transmit a response signal to the analog block, and to output a memory control signal; and a memory configured to read/write data in response to the memory control signal, the memory including a high voltage generating unit for generating a second power voltage from the first power voltage, a first portion driven by the second power voltage, and a second portion driven by the first power voltage, wherein the level of the first power voltage is lower than that of the second power voltage.
    • 射频识别(RFID)设备包括配置成向外部通信设备发送或接收射频信号的天线; 模拟块,被配置为响应于所述射频信号产生第一电源电压; 配置成从所述模拟块接收所述第一电源电压的数字模块,向所述模拟模块发送响应信号,并输出存储器控制信号; 以及存储器,被配置为响应于所述存储器控制信号读/写数据,所述存储器包括用于从所述第一电源电压产生第二电源电压的高电压产生单元,由所述第二电源电压驱动的第一部分, 部分由第一电源电压驱动,其中第一电源电压的电平低于第二电源电压的电平。
    • 75. 发明授权
    • Radio frequency identification device
    • 射频识别装置
    • US07786847B2
    • 2010-08-31
    • US11812832
    • 2007-06-22
    • Hee Bok Kang
    • Hee Bok Kang
    • H03K17/62
    • G01K1/024
    • An RFID device includes an analog block configured to receive a radio frequency signal so as to output an operation command signal, a digital block configured to output an address, a temperature address, an operation control signal, and a temperature sensor activation signal in response to the operation command signal received from the analog block and to provide a corresponding response signal into the analog block. The device further includes a memory block configured to receive the address, the temperature address, and the operation control signal so as to generate an internal control signal for controlling the internal operation, and to read/write data in a cell array including a non-volatile ferroelectric capacitor in response to the internal control signal, and a temperature sensor processing unit configured to detect a temperature change state of an RFID tag in response to the temperature sensor activation signal.
    • RFID装置包括:模拟块,被配置为接收射频信号以输出操作命令信号;数字块,被配置为输出地址,温度地址,操作控制信号和温度传感器激活信号,以响应于 所述操作命令信号从所述模拟块接收并且向所述模拟块提供相应的响应信号。 该装置还包括一个存储块,被配置为接收地址,温度地址和操作控制信号,以便产生用于控制内部操作的内部控制信号,并且读取/写入包括非易失性存储器的单元阵列中的数据, 响应于内部控制信号的挥发性铁电电容器;以及温度传感器处理单元,被配置为响应于温度传感器激活信号来检测RFID标签的温度变化状态。
    • 76. 发明授权
    • Method for fabricating nonvolatile memory device
    • 非易失性存储器件的制造方法
    • US07786020B1
    • 2010-08-31
    • US12647052
    • 2009-12-24
    • Hye-Ran KangSung-Yoon Cho
    • Hye-Ran KangSung-Yoon Cho
    • H01L21/302
    • H01L21/31138H01L21/02071H01L21/0273H01L21/28123H01L21/28273H01L21/31116H01L21/31144H01L21/32137H01L21/32139
    • A method for fabricating a nonvolatile memory device includes repeatedly stacking a stacked structure over a substrate to form a multi-stacked structure, wherein the stacked structure includes a conductive layer and an insulation layer, forming a photoresist pattern over the multi-stacked structure, first-etching an uppermost stacked structure of the multi-stacked structure using the photoresist pattern as an etch barrier, second-etching a resultant structure formed by the first-etching through the use of a breakthrough etching, slimming the photoresist pattern to form a slimmed photoresist pattern, and third-etching the uppermost stacked structure using the slimmed photoresist pattern as an etch barrier and, at the same time, etching a stacked structure disposed under the uppermost stacked structure and exposed by the first-etching.
    • 一种非易失性存储器件的制造方法,其特征在于,在基板上重叠层叠叠层结构,形成多层叠结构体,其特征在于,叠层结构包括导电层和绝缘层,在多层叠结构上形成光致抗蚀剂图案 - 使用光致抗蚀剂图案作为蚀刻阻挡层来蚀刻多层叠结构的最上层叠结构,通过使用穿透蚀刻来第二蚀刻通过第一蚀刻形成的结构结构,使光致抗蚀剂图案减薄以形成纤薄的光致抗蚀剂 并且使用薄的光致抗蚀剂图案作为蚀刻阻挡层对第一层叠结构进行第三蚀刻,并且同时蚀刻设置在最上层叠结构下方并通过第一蚀刻曝光的层叠结构。
    • 79. 发明授权
    • Semiconductor memory device and method for operating the same
    • 半导体存储器件及其操作方法
    • US07773709B2
    • 2010-08-10
    • US11646418
    • 2006-12-28
    • Sang-Hee Lee
    • Sang-Hee Lee
    • H04L7/00
    • G11C7/1039G11C7/1006G11C7/1078G11C7/1087G11C7/1093G11C7/22G11C7/222G11C2207/107
    • A semiconductor memory device includes an aligning signal generator, a data aligning unit, a data transmitting controller and a data transmitter. The aligning signal generator receives a data strobe signal to output aligning signals. The data aligning unit aligns a plurality of data pieces input in succession in response to the aligning signals. The data transmitting controller generates a data transmitting signal synchronized with the transition of the aligning signal. The data transmitter transmits an aligned data output from the data aligning unit to a data storage area in response to the data transmitting signal. A method for driving the semiconductor memory device includes aligning data pieces input in succession as parallel data in response to a data strobe signal, generating a data transmitting signal corresponding to transition of the data strobe signal and transmitting the parallel data to a data storage area in response to the data transmitting signal.
    • 半导体存储器件包括对准信号发生器,数据对准单元,数据发送控制器和数据发送器。 对准信号发生器接收数据选通信号以输出对准信号。 数据对齐单元响应于对准信号对准连续输入的多个数据段。 数据发送控制器产生与对准信号的转换同步的数据发送信号。 数据发送器响应于数据发送信号将从数据对准单元输出的对准数据发送到数据存储区域。 一种用于驱动半导体存储器件的方法包括响应于数据选通信号将连续输入的数据片段对准为并行数据,产生与数据选通信号的转换相对应的数据发送信号,并将并行数据发送到数据存储区域 响应数据发送信号。