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    • 78. 发明授权
    • Complex micromechanical part
    • 复杂微机械部件
    • US09511990B2
    • 2016-12-06
    • US13983682
    • 2012-01-05
    • Pierre CusinDavid RichardPhilippe Dubois
    • Pierre CusinDavid RichardPhilippe Dubois
    • B22C7/00B22D19/00B81B1/00B81C99/00B81C1/00
    • B81B1/006B81B2201/035B81C1/00634B81C99/0085Y10T74/19949
    • A method of fabricating a micromechanical part in a single-piece made of a synthetic carbon-allotrope includes forming a substrate which includes the negative cavity for the micromechanical part to be fabricated, coating the negative cavity of the substrate with a layer of the synthetic carbon allotrope in a thickness of between 0.2 μm and 20 μm, the thickness being less than the depth of the negative cavity, removing from the substrate a larger thickness than the thickness of the deposited layer, so as to leave a limited thickness of the layer of material in the negative cavity, and removing the substrate so as to release the single-piece micromechanical part formed in the negative cavity comprising an external surface of comparable roughness to that of the substrate.
    • 制造由合成碳 - 同素异形体制成的单件中的微机械部件的方法包括形成衬底,其包括用于要制造的微机械部件的负空腔,用合成碳层涂覆衬底的负空腔 同素异形体的厚度在0.2μm和20μm之间,其厚度小于负空腔的深度,从衬底移除比沉积层的厚度更大的厚度,以便留下有限厚度的层 在空腔中的材料,并且去除衬底以便释放形成在负空腔中的单件微机械部件,其包括与衬底相当的粗糙度的外表面。