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71. 发明授权

US5377215A Excimer laser 失效
标题翻译：准分子激光
公开(公告)号：US5377215A
公开(公告)日：1994-12-27
申请号：US975652
申请日：1992-11-13
申请人： Palash P. Das , Donald G. Larson
发明人： Palash P. Das , Donald G. Larson
IPC分类号： H01S3/038 , H01S3/03 , H01S3/036 , H01S3/04 , H01S3/041 , H01S3/134 , H01S3/225
CPC分类号： H01S3/134 , H01S3/036 , H01S3/041 , H01S3/225
摘要： A housing in a laser system encloses a cathode and a displaced anode and gases ionizable and reactive chemically when a voltage pulse produces a cathode-anode electrical discharge. Moving air cools the components (capacitors, thyratron and triggering circuitry) for producing the voltage pulses. The laser gas temperature is continuously regulated at a particular value whether or not there is an electrical discharge. The concentration of one of the gases in the chamber is regulated to values alternately on opposite sides of an optimal value to provide an optimal energy in each chemical reaction of the gases. The gases are recirculated as by a fan driven on a shaft by a pair of motors and are filtered during such recirculation. The shaft speed is regulated at a particular value and the motor currents are regulated to be equal. Any ozone formed in a compartment holding the high voltage terminals is purged by passing a neutral gas (nitrogen) through the compartment to the atmosphere. The neutral gas is passed into the housing through a hose which also holds a high voltage wire in insulated relationship to other electrical components. A collar arrangement at one wire end provides for the introduction of voltage from the collar to the anode of the thyratron with the hose coupled to the housing and grounds the collar with the wire decoupled from the housing. The different high voltage components are sequentially tested for their operability by a system and method unique to this invention.
摘要翻译：当电压脉冲产生阴极 - 阳极放电时，激光系统中的外壳包围阴极和置换的阳极以及可电化学和化学反应的气体。移动空气冷却组件（电容器，闸流管和触发电路）以产生电压脉冲。激光气体温度是否连续地调节在特定值，不管是否有放电。腔室中的一种气体的浓度在最佳值的相对侧交替地调节为值，以在气体的每个化学反应中提供最佳能量。气体通过由一对电动机驱动在轴上的风扇再循环，并且在这种再循环期间被过滤。轴速度被调节在特定值，并且电动机电流被调节为相等。通过将中性气体（氮气）通过隔室传送到大气中来清洁在保持高电压端子的隔室中形成的任何臭氧。中性气体通过软管进入壳体，该软管还保持与其它电气部件绝缘的高压电线。在一个线端处的套环布置提供了从套环到闸流管的阳极的电压的引入，其中软管联接到壳体并且将线圈与线分离的壳体接合。通过本发明特有的系统和方法，对不同的高压部件依次测试其可操作性。

72. 发明授权

US5319663A Dust precipitation in a gas laser 失效
标题翻译：气体激光器中的灰尘沉淀
公开(公告)号：US5319663A
公开(公告)日：1994-06-07
申请号：US993130
申请日：1992-12-18
申请人： John Reid , Steven D. Hastie , George S. P. Castle
发明人： John Reid , Steven D. Hastie , George S. P. Castle
IPC分类号： H01S3/036 , H01S3/225 , H01S3/22
CPC分类号： H01S3/036 , H01S3/225
摘要： Dust in a gas laser, particularly an excimer laser, is removed from the gas charge by one or more electrostatic precipitators that are located inside the laser vessel in the path of gas circulation that is produced by a fan and passes through the discharge area defined by the main discharge electrodes. The gas is caused to travel rapidly past the precipitator so that only a minor proportion of the dust is removed at each pass, but a low background level of dust in the gas is soon achieved and maintained by repeated such passes. This technique of employing multiple passes, each removing only a small percentage of the dust in the gas at any given time, can also be applied to a system in which the precipitator is located outside the vessel and is connected thereto by conduits.
摘要翻译：气体激光器中的粉尘，特别是准分子激光器，由一个或多个静电除尘器从气体充电器中除去，该静电除尘器位于激光器内部的由风扇产生的气体循环路径内并通过由主放电电极。导致气体快速移动通过除尘器，使得在每次通过时仅除去少量的灰尘，但是通过重复的这种通过，气体中的灰尘的低背景水平即将达到并保持。这种采用多次通过的技术也可以应用于除尘器位于容器外部并且通过导管与其连接的系统，每一次通过在任何给定时间仅去除气体中的一小部分灰尘。

73. 发明授权

US5315610A System for controlling the flow of gas into and out of a gas laser 失效
标题翻译：用于控制气体流入和流出气体激光器的系统
公开(公告)号：US5315610A
公开(公告)日：1994-05-24
申请号：US911189
申请日：1986-09-22
申请人： Terry Alger , Dennis M. Uhlich , William J. Benett , Earl R. Ault
发明人： Terry Alger , Dennis M. Uhlich , William J. Benett , Earl R. Ault
IPC分类号： H01S3/036 , H01S3/00
CPC分类号： H01S3/036
摘要： A modularized system for controlling the gas pressure within a copper vapor or like laser is described herein. This system includes a gas input assembly which serves to direct gas into the laser in a controlled manner in response to the pressure therein for maintaining the laser pressure at a particular value, for example 40 torr. The system also includes a gas output assembly including a vacuum pump and a capillary tube arrangement which operates within both a viscous flow region and a molecular flow region for drawing gas out of the laser in a controlled manner.
摘要翻译：本文描述了用于控制铜蒸汽或类似激光器内的气体压力的模块化系统。该系统包括气体输入组件，其用于响应于其中的压力以受控的方式将气体引导到激光器中，以将激光压力保持在特定值，例如40托。该系统还包括气体输出组件，其包括真空泵和毛细管装置，其在粘性流动区域和分子流动区域内操作，用于以受控的方式将气体引出激光器。

74. 发明授权

US5291509A Gas laser apparatus 失效
标题翻译：气体激光设备
公开(公告)号：US5291509A
公开(公告)日：1994-03-01
申请号：US911137
申请日：1992-07-09
申请人： Hakaru Mizoguchi , Junichi Fujimoto , Yoshiho Amada
发明人： Hakaru Mizoguchi , Junichi Fujimoto , Yoshiho Amada
IPC分类号： H01S3/03 , F16C33/76 , F16J15/43 , H01S3/036
CPC分类号： H01S3/036 , F16C33/765 , F16J15/43
摘要： A gas laser apparatus in which a gas medium in a case and a lubricant for bearings supporting a blower for circulating the gas medium are isolated from each other, so that the lubricant can be prevented from mixing into the gas medium while no substantially large resistance is applied to the blower drive. To isolate the gas medium and the lubricant, magnetic fluid shaft seals (10, 11) are used for sealing between the lubricant for the bearings (6) for supporting rotation shafts (3a, 3b) of the blower (3) and the gas medium in the case (1).
摘要翻译：一种气体激光装置，其中壳体中的气体介质和支撑用于使气体介质循环的鼓风机的轴承的润滑剂彼此隔离，使得可以防止润滑剂混入气体介质中，而基本上没有大的阻力是应用于鼓风机驱动。为了隔离气体介质和润滑剂，磁流体轴密封件（10,11）用于密封用于支撑鼓风机（3）的旋转轴（3a，3b）的轴承（6）的润滑剂和气体介质在（1）的情况下。

75. 发明授权

US5289488A Pump assembly for a gas discharge laser 失效
标题翻译：用于气体放电激光器的泵组件
公开(公告)号：US5289488A
公开(公告)日：1994-02-22
申请号：US948212
申请日：1992-09-21
申请人： Heinz Wegmann
发明人： Heinz Wegmann
IPC分类号： H01S3/036 , H01S3/22
CPC分类号： H01S3/036
摘要： A pump assembly for a gas discharge laser comprises a first pump (P.sub.1)hich has a relatively high suction capacity and relatively short service life and a second pump (P.sub.2) which has a relatively low suction capacity and relatively longer service life.
摘要翻译：用于气体放电激光器的泵组件包括具有相对较高的吸入能力和相对较短的使用寿命的第一泵（P1）和具有相对低的吸入能力和相对较长的使用寿命的第二泵（P2）。

76. 发明授权

US5136605A Apparatus for purifying laser gas 失效
标题翻译：用于净化激光气体的装置
公开(公告)号：US5136605A
公开(公告)日：1992-08-04
申请号：US670743
申请日：1991-03-15
申请人： Dirk Basting , Gerd Steinfuhrer , Frank Voss
发明人： Dirk Basting , Gerd Steinfuhrer , Frank Voss
IPC分类号： B01D8/00 , H01S3/03 , H01S3/036 , H01S3/225
CPC分类号： H01S3/036 , H01S3/225
摘要： An apparatus for purifying laser gas, in particular for excimer and F.sub.2 lasers, employs liquid nitrogen (12) for freezing impurities out of the laser gas, the freeze-out temperature being set by means of the pressure above the surface (14) of the liquid nitrogen (12).
摘要翻译：一种用于净化激光气体的装置，特别是用于准分子激光器和F2激光器的装置，使用液氮（12）将杂质从激光气体中冷冻，冻结温度通过上述压力表面（14）上方的压力来设定液氮（12）。

77. 发明授权

US5048041A Compact excimer laser 失效
公开(公告)号：US5048041A
公开(公告)日：1991-09-10
申请号：US550389
申请日：1990-07-10
申请人： Robert P. Akins , Donald G. Larson , Uday K. Sengupta , Richard L. Sandstrom
发明人： Robert P. Akins , Donald G. Larson , Uday K. Sengupta , Richard L. Sandstrom
IPC分类号： H01S3/03 , H01S3/036 , H01S3/0971 , H01S3/225
CPC分类号： H01S3/036 , H01S3/0305 , H01S3/0971 , H01S3/225
摘要： A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure and with the other electrode mounted on a main insulator member. The main insulator member is formed of ceramic material and is located intermediate to the one wall of the housing and the other electrode but is spaced from the one wall of the housing to have the main insulator member floating relative to the housing structure. The main ceramic insulator member is compressively supported at a central position of the member and extends outward from this central position without any additional support to have the floating main insulator respond to any bending forces within the laser without any constraint other than the central support.

78. 发明授权

US5025952A Gas resupply valve with microscopic aperture and with sealing member supported by valve body 失效
标题翻译：具有微小孔径的气体补给阀和由阀体支撑的密封构件
公开(公告)号：US5025952A
公开(公告)日：1991-06-25
申请号：US449244
申请日：1989-12-07
申请人： Lee Carlson , Mike Green , Mike Miller , Rudy Nissen , Steve Sheng
发明人： Lee Carlson , Mike Green , Mike Miller , Rudy Nissen , Steve Sheng
IPC分类号： H01S3/036
CPC分类号： H01S3/036 , Y10T137/86389
摘要： There is disclosed herein several gas resupply valves for replenishment of lost gas in gas lasers in general and argon ion lasers in particular. The first embodiment uses a valve which controls flow of gas into a metering volume. The metering volume has an aperture therein which is microscopically small and which has a diffusion constant for gas moving through the aperture which is less than the time the valve is held open. The second embodiment uses the same general structure, but separates the soft sealing member of the valve from the solenoid core which moves to open and close the valve. The soft sealing member is attached to the valve body and supported above a valve seat surrounding the opening of the metering volume. The third embodiment uses a thin diaphragm which overlies a flat surface of the valve body in which are formed an input port and an output port. A solenoid applies pressure against the diaphragm to cause it to flatten against the flat surface thereby sealing the valve.
摘要翻译：这里公开了一些用于补充气体激光器中的失去气体的气体补给阀，特别是氩离子激光器。第一实施例使用控制气体流入计量容积的阀。计量体积在其中具有微小的孔径，并且其具有通过孔径移动的气体的扩散常数，其小于阀门保持打开的时间。第二实施例使用相同的一般结构，但是将阀的软密封构件与电磁铁芯分离，电磁铁芯移动以打开和关闭阀。软密封构件附接到阀体并且支撑在围绕计量容积的开口的阀座上。第三实施例使用覆盖在形成输入端口和输出端口的阀体的平坦表面上的薄膜。螺线管对隔膜施加压力，使其平坦于平面，从而密封阀。

79. 发明授权

US4964137A Method of refining rare gas fluoride excimer laser gas 失效
标题翻译：精炼稀有气体氟化物准分子激光气体的方法
公开(公告)号：US4964137A
公开(公告)日：1990-10-16
申请号：US466930
申请日：1990-01-18
申请人： Minoru Aramaki , Shinsuke Nakagawa , Hisaji Nakano , Hiroshi Ichimura , Masahiro Tainaka
发明人： Minoru Aramaki , Shinsuke Nakagawa , Hisaji Nakano , Hiroshi Ichimura , Masahiro Tainaka
IPC分类号： H01S3/097 , H01S3/036 , H01S3/223 , H01S3/225
CPC分类号： H01S3/036 , H01S3/225
摘要： A laser gas used in a rare gas fluoride excimer laser is efficiently refined with little loss of the principal rare gas such as Ar, Kr or Xe by sequential contact of the laser gas first with a reactive metal, e.g. Si or Fe, for conversion of the fluorine source gas such as F.sub.2 or NF.sub.3 to a metal fluoride, then with a solid alkaline compound, e.g. Ca(OH).sub.2, for conversion of gaseous fluorides to solid metal fluorides, next with zeolite which is adsorbent of most of the remaining impurities and finally with an alkaline metal, e.g. Ca or Na, for decomposition of CF.sub.4 to form a solid metal fluoride and carbon. CF.sub.4 is formed during operation of the excimer laser by reaction of fluorine with a fluororesin used as electrical insulator in the laser apparatus, and accumulation of CF.sub.4 in the laser gas caused significal lowering of the laser output power.
摘要翻译：在稀有气体氟化物准分子激光器中使用的激光气体通过先将激光气体与活性金属例如反应性金属顺序接触而有效地精制而不损失诸如Ar，Kr或Xe的主要稀有气体。 Si或Fe，用于将氟源气体如F2或NF3转化为金属氟化物，然后用固体碱性化合物，例如， Ca（OH）2，用于将气态氟化物转化为固体金属氟化物，接下来是沸石，其是大部分剩余杂质的吸附剂，最后是碱金属，例如碱金属。 Ca或Na，用于分解CF4以形成固体金属氟化物和碳。在激光装置中通过氟与用作电绝缘体的氟树脂反应而在准分子激光器的操作期间形成CF4，并且CF4在激光气体中的积聚导致激光输出功率的显着降低。

80. 发明授权

US4949353A Laser processing 失效
标题翻译：激光加工
公开(公告)号：US4949353A
公开(公告)日：1990-08-14
申请号：US293264
申请日：1989-01-04
申请人： Holger Jaenisch
发明人： Holger Jaenisch
IPC分类号： H01S3/036
CPC分类号： H01S3/036
摘要： A modified laser tube including a second pinch off tube or port for flowing argon and krypton gas through the laser for processing to remove contaminants to improve performance of new and used tubes such as ALC 60X argon ion lasers. Lasing discharge is maintained during processing to release contaminants for removal by plasma scrubbing of the laser bore. A magnetic field is applied and rotated in a plane perpendicular to the laser during discharge to enhance contamination release during plasma scrubbing. Preliminary cathode activation, control of gas flow rates and tube power as well as alternating of argon and krypton gas controls the contaminant release rate to prevent recontamination of the laser by released contaminants before removal.
摘要翻译：一种改进的激光管，其包括用于通过激光器流动氩气和氪气的第二夹管或端口，用于处理以除去污染物以改善新的和使用的管（例如ALC 60X氩离子激光器）的性能。在加工期间保持激光放电以通过等离子体洗涤激光孔释放污染物以便去除。在放电期间施加磁场并在与激光器垂直的平面中旋转，以增强等离子体洗涤期间的污染物释放。初步的阴极活化，气体流速和管功率的控制以及氩和氪气的交替控制污染物释放速率，以防止在去除之前被释放的污染物对激光进行再污染。

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