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    • 76. 发明申请
    • Optical Characterization Systems Employing Compact Synchrotron Radiation Sources
    • 使用紧凑型同步辐射源的光学表征系统
    • US20140048707A1
    • 2014-02-20
    • US13964880
    • 2013-08-12
    • KLA-Tencor Corporation
    • Yanwei LiuDaniel C. Wack
    • H05H13/04H01J37/02
    • H05H13/04H01J37/02H05G2/00H05G2/001H05H7/04H05H7/08
    • A compact synchrotron radiation source includes an electron beam generator, an electron storage ring, one or more wiggler insertion devices disposed along one or more straight sections of the electron storage ring, the one or more wiggler insertion devices including a set of magnetic poles configured to generate a periodic alternating magnetic field suitable for producing synchrotron radiation emitted along the direction of travel of the electrons of the storage ring, wherein the one or more wiggler insertion devices are arranged to provide light to a set of illumination optics of a wafer optical characterization system or a mask optical characterization system, wherein the etendue of a light beam emitted by the one or more wiggler insertion devices is matched to the illumination optics of the at least one of a wafer optical characterization system and the mask optical characterization system.
    • 紧凑型同步加速器辐射源包括电子束发生器,电子存储环,沿着电子存储环的一个或多个直线部分设置的一个或多个摆动插入装置,一个或多个摆动插入装置包括一组磁极, 产生适于产生沿着存储环的电子的行进方向发射的同步加速器辐射的周期性交变磁场,其中一个或多个摆动插入装置被布置成向晶片光学表征系统的一组照明光学器件提供光 或掩模光学表征系统,其中由一个或多个摆动插入装置发射的光束的光密度与晶片光学表征系统和掩模光学表征系统中的至少一个的照明光学器件相匹配。
    • 77. 发明申请
    • CHARGED PARTICLE ACCELERATOR AND PARTICLE BEAM THERAPY SYSTEM
    • 充电颗粒加速器和颗粒束治疗系统
    • US20130193353A1
    • 2013-08-01
    • US13582645
    • 2012-01-26
    • Masahiro IkedaYuko KijimaShunsuke Okada
    • Masahiro IkedaYuko KijimaShunsuke Okada
    • H05H13/04A61N5/10
    • H05H13/04A61N2005/1087H05H2007/046H05H2277/11
    • The objective is to obtain a charged particle accelerator where the amount of pattern data for operating an acceleration cavity and electromagnets based on time clocks is reduced and the pattern data communication time is shortened. An accelerator control apparatus provided in a charged particle accelerator of the present invention is characterized by including a clock generation unit that generates an acceleration cavity clock and an electromagnet clock that is synchronized with the acceleration cavity clock and has a frequency lower than that of the acceleration cavity clock; a high-frequency control unit that controls an acceleration cavity, based on an acceleration cavity pattern stored in a first pattern memory and the acceleration cavity clock; and a deflection electromagnet control unit that controls a deflection electromagnet, based on a deflection electromagnet pattern stored in a second pattern memory and the electromagnet clock.
    • 目的是获得一种带电粒子加速器,其中用于操作基于时钟的加速腔和电磁体的模式数据量减少,并且模式数据通信时间缩短。 在本发明的带电粒子加速器中设置的加速器控制装置的特征在于,包括:时钟生成部,其生成加速腔时钟;以及与加速腔时钟同步的电磁时钟,其频率比加速度 腔钟; 基于存储在第一图案存储器中的加速腔图案和加速腔时钟控制加速腔的高频控制单元; 以及基于存储在第二图案存储器中的偏转电磁体图案和电磁时钟来控制偏转电磁体的偏转电磁体控制单元。
    • 78. 发明申请
    • ACCELERATOR FOR CHARGED PARTICLES
    • 加速器填充颗粒
    • US20120313554A1
    • 2012-12-13
    • US13581263
    • 2011-02-02
    • Oliver Heid
    • Oliver Heid
    • H05H13/04H05H5/06
    • H05H5/04H05H5/02H05H5/06
    • An accelerator for charged particle may include: a capacitor stack which includes a first electrode that can be brought to a first potential, a second electrode that is concentric to the first electrode and can be brought to a second potential differing from the first potential, and at least one intermediate electrode that is concentrically arranged between the first electrode and the second electrode and can be brought to an intermediate potential lying between the first potential and the second potential; a switching device to which the electrodes of the capacitor stack are connected and which is designed such that the concentric electrodes of the capacitor stack can be brought to increasing potential stages during operation of the switching device; a first and a second acceleration channel formed by first and second openings in the electrodes of the capacitor stack such that charged particles can be accelerated along the first and second acceleration channel by means of the electrodes; and a device which can influence the accelerated particle beam within the capacitor stack such that photons emitted by the particle beam are produced.
    • 用于带电粒子的加速器可以包括:电容器堆叠,其包括可以被带到第一电位的第一电极,与第一电极同心并且可以被带到与第一电位不同的第二电位的第二电极,以及 至少一个中间电极,其同心地布置在所述第一电极和所述第二电极之间,并且可以处于位于所述第一电位和所述第二电位之间的中间电位; 连接电容器堆叠的电极的开关装置,其被设计成使得电容器堆叠的同心电极在开关装置的操作期间可以增加电位级; 第一加速通道和第二加速通道,由电容器叠层的电极中的第一和第二开口形成,使得带电粒子可以通过电极沿第一和第二加速通道加速; 以及可以影响电容器堆叠内的加速粒子束的装置,从而产生由粒子束发射的光子。
    • 79. 发明申请
    • SYNCHROTRON POWER SUPPLY APPARATUS AND METHOD OF USE THEREOF
    • 同步电源装置及其使用方法
    • US20110284761A1
    • 2011-11-24
    • US13196720
    • 2011-08-02
    • Vladimir Balakin
    • Vladimir Balakin
    • H01J3/14H05H13/04
    • A61N5/10A61N2005/1087H05H7/10H05H13/04
    • The invention comprises a charged particle cancer therapy system or synchrotron system using a single power supply electrically connected to a plurality of magnet sections to provide a uniform current to a plurality of magnets at a given period in time. Optionally, one or more switches introduce a corresponding one or more resistors into a circuit linking the power supply to a magnet or an inductor during an applied power recovery phase between acceleration cycles of the synchrotron, which reduces time of reduction in power from an active applied power to a power suitable for use with a subsequent injection of charged particles into the synchrotron.
    • 本发明包括带电粒子癌症治疗系统或同步加速器系统,其使用电连接到多个磁体部分的单个电源,以在给定的时间段内向多个磁体提供均匀的电流。 可选地,一个或多个开关将相应的一个或多个电阻器引入到在同步加速器的加速循环之间的施加的功率恢复阶段期间将电源连接到磁体或电感器的电路中,从而减少来自主动施加的功率的时间 功率适用于随后将带电粒子注入同步加速器中的功率。
    • 80. 发明授权
    • Charged particle beam extraction system and method
    • 带电粒子束提取系统及方法
    • US07755305B2
    • 2010-07-13
    • US12129145
    • 2008-05-29
    • Masumi UmezawaKazuo HiramotoKoji Matsuda
    • Masumi UmezawaKazuo HiramotoKoji Matsuda
    • H05H13/04H05H7/10A61N5/10
    • A61N5/10A61N2005/1074A61N2005/1087G21K1/043H05H7/10
    • A charged particle beam extraction system and method capable of shortening the irradiation time and increasing the number of patients treatable per unit time. The charged particle beam extraction system comprises a synchrotron for cyclically performing patterned operation including four steps of introducing, accelerating, extracting and decelerating an ion beam, an on/off switch for opening or closing connection between an RF knockout electrode and an RF power supply for applying RF power to the RF knockout electrode, and a timing controller for controlling on/off-timing of the on/off switch such that when extraction of the ion beam is stopped at least once during the extraction step of the synchrotron, an amount of the ion beam extracted from the synchrotron in one cycle is held substantially at a setting value.
    • 一种带电粒子束提取系统和方法,其能够缩短照射时间并增加每单位时间可治疗的患者数量。 带电粒子束提取系统包括用于循环执行图案化操作的同步加速器,其包括引入,加速,提取和减速离子束的四个步骤,用于打开或关闭RF击穿电极和RF电源之间的连接的开/关开关, 将RF功率施加到RF击穿电极,以及定时控制器,用于控制开/关开关的接通/断开定时,使得当在同步加速器的提取步骤期间离子束的提取停止至少一次时, 在一个周期内从同步加速器提取的离子束基本保持在设定值。