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    • 71. 发明授权
    • Method of producing a monolithically integrated two-transistor memory
cell in accordance with MOS technology
    • 根据MOS技术制造单片集成双晶体管存储单元的方法
    • US4420871A
    • 1983-12-20
    • US307884
    • 1981-10-02
    • Adolf Scheibe
    • Adolf Scheibe
    • H01L27/112H01L21/336H01L21/8246H01L21/8247H01L27/088H01L27/115H01L27/11517H01L29/788H01L29/792H01L21/76H01L21/88H01L21/95
    • H01L29/66825H01L27/088H01L27/115H01L27/11517
    • A method of producing a monolithically integrated two-transistor memory cell, including a silicon crystal for accommodating the memory cell, a first MOS field effect transistor having a current-carrying channel and both a control gate and a floating gate disposed between the control gate and surface of the crystal, a second MOS field effect transistor having a current-carrying channel and a control gate, an SiO.sub.2 film supporting the gates, a doped polycrystalline silicon layer deposited on the SiO.sub.2 film, the control gates and the floating gate being formed from the doped polycrystalline silicon layer, and an erase area for the floating gate, the improvement which includes covering a part of the silicon crystal intended for the memory cell with an SiO.sub.2 film, forming a part of the gate oxide of the first MOS field effect transistor, forming a window through the SiO.sub.2 film at a location intended for the erase area, re-oxidizing the exposed area of the surface of the crystal in the window and increasing the remaining areas of the SiO.sub.2 film, depositing a first doped polycrystalline silicon layer forming a base of the floating gate, covering the polycrystalline silicon layer with another SiO.sub.2 film, depositing a second doped polycrystalline silicon layer, and forming the control gate of the first MOS field effect transistor from the second doped polycrystalline silicon layer and producing the source and drain zone of the two MOS field effect transistors.
    • 一种制造单片集成的双晶体管存储单元的方法,包括用于容纳存储单元的硅晶体,具有载流通道的第一MOS场效应晶体管,以及设置在控制栅极与控制栅极之间的浮栅 晶体表面,具有载流通道和控制栅极的第二MOS场效应晶体管,支撑栅极的SiO 2膜,沉积在SiO 2膜上的掺杂多晶硅层,控制栅极和浮置栅极由 掺杂多晶硅层和用于浮置栅极的擦除区域,其改进包括用SiO 2膜覆盖用于存储单元的硅晶体的一部分,形成第一MOS场效应晶体管的栅极氧化物的一部分 在旨在用于擦除区域的位置处形成通过SiO 2膜的窗口,再次氧化窗口中晶体表面的暴露区域 d增加SiO 2膜的剩余面积,沉积形成浮栅的基极的第一掺杂多晶硅层,用另一SiO 2膜覆盖多晶硅层,沉积第二掺杂多晶硅层,以及形成第二掺杂多晶硅层的控制栅极 第一MOS场效应晶体管和第二掺杂多晶硅层,并产生两个MOS场效应晶体管的源极和漏极区。