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    • 86. 发明授权
    • Diodes with embedded dummy gate electrodes
    • 具有嵌入式虚拟栅电极的二极管
    • US08436430B2
    • 2013-05-07
    • US13082871
    • 2011-04-08
    • Ming-Hsin YuKvei-Feng Yen
    • Ming-Hsin YuKvei-Feng Yen
    • H01L29/772
    • H01L29/861H01L27/0255
    • A circuit structure includes a first isolation region, and a first dummy gate electrode over and vertically overlapping the first isolation region. First pickup regions of a diode are formed on opposite sides of the first isolation region, wherein sidewalls of the first pickup regions contact opposite sidewalls of the first isolation region. Second pickup regions of the diode are formed on opposite sides of a combined region of the first pickup regions and the first isolation region, wherein the first and the second pickup regions are of opposite conductive types. A well region is under the first and the second pickup regions and the first isolation region, wherein the well region is of a same conductivity type as the second pickup regions.
    • 电路结构包括第一隔离区域和与第一隔离区域垂直重叠的第一伪栅极电极。 二极管的第一拾取区域形成在第一隔离区域的相对侧上,其中第一拾取区域的侧壁接触第一隔离区域的相对侧壁。 二极管的第二拾取区域形成在第一拾取区域和第一隔离区域的组合区域的相对侧上,其中第一和第二拾取区域具有相反的导电类型。 阱区域位于第一和第二拾取区域和第一隔离区域之下,其中阱区域具有与第二拾取区域相同的导电类型。
    • 87. 发明申请
    • STRUCTURE OF FIELD EFFECT TRANSISTOR WITH FIN STRUCTURE AND FABRICATING METHOD THEREOF
    • 具有结构的场效应晶体管结构及其制备方法
    • US20130105914A1
    • 2013-05-02
    • US13281448
    • 2011-10-26
    • Chien-Ting Lin
    • Chien-Ting Lin
    • H01L29/772H01L21/336
    • H01L29/7851H01L29/66795
    • A method for fabricating a field effect transistor with fin structure includes the following steps. A substrate having an ion well with a first conductivity type is provided, wherein the ion well has a first doping concentration. At least a fin structure disposed on the substrate is formed. At least a first ion implantation is performed to form an anti-punch doped region with first conductivity type between the substrate and the channel layer, wherein the anti-punch doped region has a third doping concentration higher than the first doping concentration. At least a channel layer disposed along at least one surface of the fin structure is formed after the first ion implantation is performed. A gate covering part of the fin structure is formed. A source and a drain disposed in the fin structure beside the gate are formed, wherein the source and the drain have a second conductivity type.
    • 制造具有翅片结构的场效应晶体管的方法包括以下步骤。 提供了具有第一导电类型的离子阱的衬底,其中离子阱具有第一掺杂浓度。 至少形成设置在基板上的翅片结构。 至少进行第一离子注入以在衬底和沟道层之间形成具有第一导电类型的抗冲击掺杂区域,其中抗冲击掺杂区域具有高于第一掺杂浓度的第三掺杂浓度。 在执行第一离子注入之后,形成沿鳍片结构的至少一个表面设置的至少一个沟道层。 形成覆盖翅片结构的一部分的栅极。 形成在栅极旁边的翅片结构中设置的源极和漏极,其中源极和漏极具有第二导电类型。