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81. 发明申请

US20150097123A1 CHARGED PARTICLE BEAM APPARATUS 有权
标题翻译：充电颗粒光束装置
公开(公告)号：US20150097123A1
公开(公告)日：2015-04-09
申请号：US14376901
申请日：2013-01-28
申请人： Hitachi High-Technologies Corporation
发明人： Yasushi Ebizuka , Seiichiro Kanno , Makoto Nishihara , Masashi Fujita
IPC分类号： H01J37/22 , H01J37/28 , H01J37/20 , H02N13/00
CPC分类号： H01J37/226 , H01J37/026 , H01J37/20 , H01J37/28 , H01J2237/0047 , H01J2237/06 , H01J2237/2007 , H01J2237/2801 , H02N13/00
摘要： An object of the present invention is to provide a charged particle beam apparatus that effectively removes electrical charges from an electrostatic chuck.In order to achieve the above object, the charged particle beam apparatus of the present invention includes a sample chamber that maintains a space containing an electrostatic chuck mechanism (5) in a vacuum state; and in which the charged particle beam apparatus includes an ultraviolet light source (6) to irradiate ultraviolet light within the sample chamber, and a irradiation target member irradiated by the ultraviolet light; and the irradiation target member is placed perpendicular to the adsorption surface of the electrostatic chuck.
摘要翻译：本发明的目的是提供一种有效地从静电卡盘去除电荷的带电粒子束装置。为了实现上述目的，本发明的带电粒子束装置包括在真空状态下保持包含静电卡盘机构（5）的空间的样本室; 并且其中带电粒子束装置包括用于照射样品室内的紫外光的紫外光源和照射由紫外光照射的照射目标构件; 并且照射目标构件垂直于静电吸盘的吸附表面放置。

82. 发明授权

US08971010B2 Electrostatic chuck and method of manufacturing electrostatic chuck 有权
标题翻译：静电吸盘及制造静电吸盘的方法
公开(公告)号：US08971010B2
公开(公告)日：2015-03-03
申请号：US13816050
申请日：2011-08-11
申请人： Kaduko Ishikawa , Junji Yonezawa , Toshihiro Aoshima
发明人： Kaduko Ishikawa , Junji Yonezawa , Toshihiro Aoshima
IPC分类号： H01T23/00 , H02N13/00 , B23Q3/152 , H01L21/683
CPC分类号： H02N13/00 , B23Q3/152 , H01L21/6833
摘要： An electrostatic chuck comprises: a dielectric substrate having a protrusion and a planar surface part. The protrusion is formed on a major surface of the dielectric substrate. An adsorption target material is mounted on the major surface. The planar surface part is formed in a periphery of the protrusion. The dielectric substrate is formed from a polycrystalline ceramics sintered body. A top face of the protrusion is a curved surface, and a first recess is formed in the top face to correspond to crystal grains that appear on the surface. The planar surface part has a flat part, and a second recess is formed in the flat part. A depth dimension of the first recess is greater than a depth dimension of the second recess. The electrostatic chuck can suppress the generation of particles and a method for manufacturing the electrostatic chuck is provided.
摘要翻译：静电卡盘包括：具有突起和平坦表面部分的电介质基板。突起形成在电介质基板的主表面上。吸附目标材料安装在主表面上。平面部分形成在突起的周边。电介质基板由多晶陶瓷烧结体形成。突起的顶面是弯曲表面，并且在顶面形成第一凹部以对应于出现在表面上的晶粒。平面部分具有平坦部分，并且在平坦部分中形成第二凹部。第一凹部的深度尺寸大于第二凹部的深度尺寸。静电卡盘可以抑制颗粒的产生，并且提供了制造静电卡盘的方法。

83. 发明申请

US20140355179A1 METHOD OF PREVENTING CRACKING IN GLASS DISPLAY SCREENS 审中-公开
标题翻译：防止玻璃显示屏幕破裂的方法
公开(公告)号：US20140355179A1
公开(公告)日：2014-12-04
申请号：US13909588
申请日：2013-06-04
申请人： Spire Corporation
发明人： Roger G. Little
IPC分类号： H05K5/03 , H02N13/00
CPC分类号： H02N13/00 , G06F1/1626 , G06F1/1637 , G06F2200/1633 , G06F2200/1634 , H04M1/0266 , H04M1/185
摘要： A portable electronic device housing portion is applied to a cover glass. The cover glass is heated to generate ionic conductivity therein and the method includes anodic bonding the cover glass to the housing portion. Cooling the assembly induces compressive stress within the cover glass to increase its tensile strength. The process which seals the cover glass to the housing also strengthens the cover glass.
摘要翻译：将便携式电子设备外壳部分应用于盖玻璃。盖玻片被加热以在其中产生离子传导性，并且该方法包括将盖玻璃阳极接合到壳体部分。冷却组件会在盖玻璃内引起压应力，以提高其拉伸强度。将盖玻璃密封到外壳的过程也加强了盖玻璃。

84. 发明授权

US08861171B2 Electroadhesive handling and manipulation 有权
标题翻译：电动粘合剂处理和操作
公开(公告)号：US08861171B2
公开(公告)日：2014-10-14
申请号：US13886048
申请日：2013-05-02
申请人： SRI International
发明人： Harsha Prahlad , Ronald E. Pelrine , Brian K. McCoy
IPC分类号： H01T23/00 , H02N13/00 , B25J15/00
CPC分类号： H02N13/00 , B25J15/00 , B25J15/0009 , B25J15/0085
摘要： An electroadhesive gripping system includes a shear gripper. The shear gripper can include an electroadhesive surface associated with one or more electrodes and a load-bearing structure coupled to the electroadhesive surface. A power supply can be configured to apply voltage to the one or more electrodes associated with the electroadhesive surface. A controller can be configured to cause a voltage to be applied, via the power supply, to the one or more electrodes associated with the electroadhesive surface to thereby cause the first shear gripper to adhere to an item situated proximate the electroadhesive surface. The controller can be configured to cause a shear force to be applied to the adhered item, via the load-bearing structure, that is sufficient to move the adhered item.
摘要翻译：电粘合夹持系统包括剪切夹具。剪切夹具可以包括与一个或多个电极相关联的电粘合表面和耦合到电粘合表面的承载结构。电源可以被配置为向与电粘合表面相关联的一个或多个电极施加电压。控制器可以被配置为使得经由电源将电压施加到与电粘合表面相关联的一个或多个电极，从而使第一剪切夹具粘附到位于电附着表面附近的物品。控制器可以被配置成通过承载结构使剪切力施加到粘附的物品上，该承载结构足以移动附着的物品。

85. 发明授权

US08861170B2 Electrostatic chuck with photo-patternable soft protrusion contact surface 有权
标题翻译：静电卡盘，具有光刻图软突起接触面
公开(公告)号：US08861170B2
公开(公告)日：2014-10-14
申请号：US13667516
申请日：2012-11-02
申请人： Entegris, Inc.
发明人： I-Kuan Lin , Richard A. Cooke , Jakub Rybczynski
IPC分类号： H02N13/00 , C23C16/458 , H01L21/683 , H01L21/687
CPC分类号： H01L21/6831 , C23C16/4581 , H01L21/6875 , H01L21/68757 , H02N13/00
摘要： In accordance with an embodiment of the invention, there is provided a soft protrusion structure for an electrostatic chuck, which offers a non-abrasive contact surface for wafers, workpieces or other substrates, while also having improved manufacturability and compatibility with grounded surface platen designs. The soft protrusion structure comprises a photo-patternable polymer.
摘要翻译：根据本发明的实施例，提供了一种用于静电卡盘的软突起结构，其提供用于晶片，工件或其它基板的非研磨接触表面，同时具有改进的可制造性和与接地的平台台板设计的兼容性。软突起结构包括可光致图案的聚合物。

86. 发明授权

US08724289B2 Substrate temperature adjusting-fixing device 有权
标题翻译：基板温度调节固定装置
公开(公告)号：US08724289B2
公开(公告)日：2014-05-13
申请号：US13453001
申请日：2012-04-23
申请人： Norio Shiraiwa , Yuichi Hata
发明人： Norio Shiraiwa , Yuichi Hata
IPC分类号： H02N13/00
CPC分类号： H01L21/67103 , H01L21/67109 , H01L21/6831
摘要： A disclosed substrate temperature adjusting-fixing device includes an electro static chuck attracting and holding an attractable object onto a base body having a built-in electrode by applying a voltage to the electrode, a base plate fixing the electro static chuck via an adhesive layer, a power supplying portion electrically connected to the electrode, and a retaining portion holding the power supplying portion, wherein the retaining portion includes a main body and a sealing portion, the main body is fixed to the base plate and has recesses opened on an opposite side of the adhesive layer and a through hole penetrating through the main body, the power supplying portion includes an electrode pin and an electric wire, the electric wire is wired inside the adhesive layer, the through hole and the recesses to electrically connect the electrode with the electrode pin, and the sealing portion fills the recesses.
摘要翻译：所公开的基板温度调节固定装置包括通过向电极施加电压而将吸引物吸引并保持在具有内置电极的基体上的静电卡盘，经由粘合剂层固定静电卡盘的基板，电连接到所述电极的供电部分和保持所述供电部分的保持部分，其中所述保持部分包括主体和密封部分，所述主体固定到所述基板并且具有在相对侧上开口的凹部所述供电部包括电极销和电线，所述电线布线在所述粘合剂层内，所述通孔和所述凹部将所述电极与所述电线电连接电极针，密封部填充凹部。

87. 发明授权

US08717737B2 Substrate conveyance method and substrate conveyance system 有权
标题翻译：基板输送方法和基板输送系统
公开(公告)号：US08717737B2
公开(公告)日：2014-05-06
申请号：US13812745
申请日：2011-07-25
申请人： Hirofumi Minami , Kazuhiro Musha
发明人： Hirofumi Minami , Kazuhiro Musha
IPC分类号： H02N13/00
CPC分类号： B65G47/92 , H01L21/67742 , H01L21/67748 , H01L21/6831
摘要： Disclosed are a substrate conveyance method and substrate conveyance system that are able to quickly transfer a substrate without losing positional accuracy. Using an electrostatic chuck mechanism in the holding of a wafer (W) by the holding surface (210) of a conveyance robot, the wafer (W) is transferred from a supporting surface (303) to the holding surface (210) in the state where an electrostatic attraction force is generated at the holding surface (210). As a result, since it is possible to hold the wafer by means of the electrostatic attraction force starting immediately after the wafer (W) has been transferred to the holding surface (210), it is possible to rapidly execute a wafer (W) conveying operation and thus it is possible to reduce the conveying time of the wafer between processing chambers.
摘要翻译：公开了能够快速地传送衬底而不失去位置精度的衬底输送方法和衬底输送系统。在通过输送机器人的保持面（210）保持晶片（W）的状态下，使用静电卡盘机构，将晶片（W）从支撑面（303）转移到保持面（210）的状态其中在保持表面（210）处产生静电吸引力。结果，由于可以通过在晶片（W）已经被转移到保持表面210之后立即开始的静电吸引力来保持晶片，所以可以快速地执行晶片（W）输送因此可以减少处理室之间的晶片的输送时间。

88. 发明申请

US20130120897A1 Electrostatic Chuck with Photo-Patternable Soft Protrusion Contact Surface 有权
标题翻译：静电卡盘与光图案软突起接触面
公开(公告)号：US20130120897A1
公开(公告)日：2013-05-16
申请号：US13667516
申请日：2012-11-02
申请人： Entegris, Inc.
发明人： I-Kuan Lin , Richard A. Cooke , Jakub Rybczynski
IPC分类号： H02N13/00
CPC分类号： H01L21/6831 , C23C16/4581 , H01L21/6875 , H01L21/68757 , H02N13/00
摘要： In accordance with an embodiment of the invention, there is provided a soft protrusion structure for an electrostatic chuck, which offers a non-abrasive contact surface for wafers, workpieces or other substrates, while also having improved manufacturability and compatibility with grounded surface platen designs. The soft protrusion structure comprises a photo-patternable polymer.
摘要翻译：根据本发明的实施例，提供了一种用于静电卡盘的软突起结构，其提供用于晶片，工件或其它基板的非研磨接触表面，同时具有改进的可制造性和与接地的平台台板设计的兼容性。软突起结构包括可光致图案的聚合物。

89. 发明申请

US20130088808A1 ELECTROSTATIC CHUCK 有权
标题翻译：静电卡
公开(公告)号：US20130088808A1
公开(公告)日：2013-04-11
申请号：US13630136
申请日：2012-09-28
申请人： APPLIED MATERIALS, INC.
发明人： VIJAY D. PARKHE , STEVEN V. SANSONI , CHENG-HSIUNG MATTHEW TSAI
IPC分类号： H02N13/00
CPC分类号： H02N13/00 , H01L21/6833
摘要： Embodiments of electrostatic chucks are provided herein. In some embodiments, an electrostatic chuck for retaining a substrate includes a base plate, a ceramic plate, supported by the base plate, having a substrate supporting surface, a first plurality of electrodes disposed within the ceramic plate having a first polarity, and a second plurality of electrodes disposed within the ceramic plate have a second polarity opposite from the first polarity, wherein the first and second plurality of electrodes are independently controllable to provide a desired chucking power and frequency.
摘要翻译：本文提供了静电卡盘的实施例。在一些实施例中，用于保持基板的静电卡盘包括基板，由基板支撑的陶瓷板，具有基板支撑表面，设置在具有第一极性的陶瓷板内的第一多个电极，设置在陶瓷板内的多个电极具有与第一极性相反的第二极性，其中第一和第二多个电极是独立可控的以提供期望的夹持功率和频率。

90. 发明申请

US20130070384A1 High Surface Resistivity Electrostatic Chuck 有权
标题翻译：高表面电阻静电卡盘
公开(公告)号：US20130070384A1
公开(公告)日：2013-03-21
申请号：US13699279
申请日：2011-05-24
申请人： Richard A. Cooke , Dale K. Stone , Lyudmila Stone , Julian Blake , David Suuronen
发明人： Richard A. Cooke , Dale K. Stone , Lyudmila Stone , Julian Blake , David Suuronen
IPC分类号： H02N13/00 , C23F1/00 , B05D5/12
CPC分类号： H02N13/00 , B05D5/12 , B23Q3/152 , C04B37/005 , C04B37/008 , C04B2237/06 , C04B2237/062 , C04B2237/08 , C04B2237/083 , C04B2237/086 , C04B2237/341 , C04B2237/343 , C04B2237/365 , C04B2237/368 , C23F1/00 , H01L21/6833
摘要： In accordance with an embodiment of the invention, there is provided an electrostatic chuck. The electrostatic chuck comprises an electrode, and a surface layer activated by a voltage in the electrode to form an electric charge to electrostatically clamp a substrate to the electrostatic chuck, the surface layer including a charge control layer comprising a surface resistivity of greater than about 1011 ohms per square.
摘要翻译：根据本发明的实施例，提供了一种静电卡盘。静电卡盘包括电极和由电极中的电压激活的表面层以形成电荷以将基板静电夹持到静电卡盘，该表面层包括电荷控制层，该电荷控制层包括大于约1011的表面电阻率欧姆每平方

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