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    • 6. 发明申请
    • PARTICLE SOURCES AND METHODS FOR MANUFACTURING THE SAME
    • 颗粒源及其制造方法
    • US20140077684A1
    • 2014-03-20
    • US13512396
    • 2012-05-04
    • Huarong LiuPing Chen
    • Huarong LiuPing Chen
    • H01J37/04H01J9/02
    • H01J37/04B82Y40/00H01J9/02H01J9/025H01J27/26H01J37/073H01J37/08H01J2237/06341H01J2237/0807H01J2237/2623H01L21/31116
    • The present disclosure provides a method for manufacturing a particle source comprising: placing a metal wire in vacuum, introducing active gas, adjusting a temperature of the metal wire and applying a positive high voltage V to the metal wire to generate at a side of the head of the metal wire an etching zone in which field induced chemical etching (FICE) is performed; increasing by the FICE a surface electric field at the top of the metal wire head to be greater than a field evaporation electric field of material for the metal wire, so that metal atoms at the top of the metal wire are evaporated off; after the field evaporation is activated by the FICE, causing mutual adjustment between the FICE and the field evaporation, until the head of the metal wire has a shape of combination of a base and a tip on the base; and stopping the FICE and the field evaporation when the head of the metal wire takes a predetermine shape.
    • 本公开提供了一种制造颗粒源的方法,包括:将金属丝放置在真空中,引入活性气体,调节金属丝的温度并向金属丝施加正高电压V以在头的一侧产生 的金属线,其中执行场诱导化学蚀刻(FICE)的蚀刻区域; 通过FICE增加金属线头顶部的表面电场比金属线材料的场蒸发电场大,金属线顶部的金属原子被蒸发掉; 在通过FICE激活场蒸发之后,引起FICE和场蒸发之间的相互调节,直到金属丝的头部具有基部和底部的尖端的组合的形状; 并且当金属丝的头部具有预定形状时,停止FICE和场蒸发。