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    • 2. 发明申请
    • MEMS DEVICE WITH INTEGRATED VIA AND SPACER
    • 具有集成通风和间隔的MEMS器件
    • US20100214643A1
    • 2010-08-26
    • US12392947
    • 2009-02-25
    • Robert Ostrom
    • Robert Ostrom
    • G02B26/00B81B7/02B81C1/00
    • G02B26/0841B81B2201/045B81B2203/058B81B2207/096B81C1/00095G02B26/0866Y10T29/49002
    • A MEMS device and fabrication method are disclosed. A bottom substrate having an insulating layer sandwiched between an upper layer and a lower layer may be bonded to a device layer. One or more portions of the upper layer may be selectively removed to form one or more device cavities. Conductive vias may be formed through the lower layer at locations that underlie the one or more device cavities and electrically isolated from the lower layer. Devices may be formed from the device layer. Each device overlies a corresponding device cavity. Each device may be connected to the rest of the device layer by one or more corresponding hinges formed from the device layer. One or more electrical contacts may be formed on a back side of the lower layer. Each contact is electrically connected to a corresponding conductive via.
    • 公开了MEMS器件和制造方法。 具有夹在上层和下层之间的绝缘层的底部基板可以结合到器件层。 可以选择性地去除上层的一个或多个部分以形成一个或多个器件腔。 导电通孔可以在位于一个或多个器件空腔下方并且与下层电隔离的位置处通过下层形成。 设备可以从设备层形成。 每个设备覆盖相应的设备腔。 每个设备可以通过由设备层形成的一个或多个相应铰链连接到设备层的其余部分。 一个或多个电触头可以形成在下层的背面上。 每个触点电连接到相应的导电通孔。
    • 8. 发明申请
    • Optimized reconfigurable optical add-drop multiplexer architecture with MEMS-based attenuation or power management
    • 优化的可重配置光分插复用器架构,具有基于MEMS的衰减或电源管理
    • US20060228072A1
    • 2006-10-12
    • US11103839
    • 2005-04-11
    • Joseph DavisMark GarrettBrian TremaineMichael Darling
    • Joseph DavisMark GarrettBrian TremaineMichael Darling
    • G02B6/26
    • G02B6/356G02B6/2706G02B6/29311G02B6/29313G02B6/29383G02B6/29395G02B6/3512G02B6/3588G02B6/3594
    • A wavelength selective switch architecture for ROADMs for switching the spectral channels of a multi-channel, multi-wavelength optical signal between input and output ports employs a biaxial MEMS port mirror array for optimal coupling efficiency and ITU grid alignment, an anamorphic beam expander for expanding input optical signals to create an elongated beam profile, a diffraction grating for spatially separating the spectral channels, an anamorphic focusing lens system, an array of biaxial elongated channel MEMS micromirrors, a built-in Optical Channel Monitor, and an electronic feedback control system. The bi-axial channel micromirrors are rotatable about one axis to switch spectral channels between ports, and are rotatable about an orthogonal axis to vary the coupling of the spectral channel to an output port and control attenuation of the spectral signal for complete blocking or for a predetermined power level. The architecture affords hitless switching, near notchless operation, ITU channel alignment, high passband, stability over a broad temperature range, and minimum insertion loss through the optimal optical coupling efficiency enabled by the feedback control system.
    • 用于在输入和输出端口之间切换多通道,多波长光信号的光谱通道的ROADM的波长选择开关架构采用双轴MEMS端口镜阵列,以实现最佳耦合效率和ITU网格对齐,用于扩展的变形光束扩展器 输入光信号以产生细长的光束轮廓,用于空间分离光谱通道的衍射光栅,变形聚焦透镜系统,双轴细长通道MEMS微镜阵列,内置光通道监视器和电子反馈控制系统。 双轴通道微镜可以围绕一个轴线旋转以在端口之间切换频谱通道,并且可绕正交轴线旋转,以改变频谱通道与输出端口的耦合,并控制光谱信号的衰减以进行完全阻塞或针对 预定功率水平。 该架构通过反馈控制系统实现的最佳光耦合效率,提供无缝切换,接近无缺陷操作,ITU通道对准,高通带,宽温度范围内的稳定性和最小插入损耗。
    • 9. 发明授权
    • Flexible bandwidth wavelength selective switch
    • 灵活的带宽波长选择开关
    • US09103992B1
    • 2015-08-11
    • US13666902
    • 2012-11-01
    • Capella Photonics, Inc.
    • Daniel P. Day
    • G02B6/35G02B6/26G02B5/18G02F1/13G01J3/51
    • G02B6/3512G02B6/2931G02B6/356G02B6/3594
    • A method and an apparatus for switching a beam from a first port to a second port in an optical switch are described. Switching is performed by a single-axis beam steering element and one or more actuatable beam diffraction devices. Each beam diffraction device is actuatable between diffracting and non-diffracting states. Each beam diffraction device is configured to deflect the optical beam when in the diffracting state such that at least part of the optical beam is diffracted outside a detection area of a column of I/O ports. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.
    • 描述了用于将光束从光开关中的第一端口切换到第二端口的方法和装置。 切换由单轴光束操纵元件和一个或多个可致动的光束衍射装置执行。 每个光束衍射装置可在衍射和非衍射状态之间起动。 每个光束衍射装置被配置为在处于衍射状态时偏转光束,使得光束的至少一部分被衍射到I / O端口列的检测区域之外。 要强调的是,该摘要被提供以符合要求抽象的规则,允许搜索者或其他读者快速确定技术公开内容的主题。 提交它的理解是,它不会用于解释或限制权利要求的范围或含义。