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    • 8. 发明申请
    • Device and Method for Micro-Electro-Mechanical-System Photonic Switch
    • 微电子机械系统光电开关的装置和方法
    • US20170038577A1
    • 2017-02-09
    • US15333930
    • 2016-10-25
    • Huawei Technologies Co., Ltd.
    • Alan Frank GravesDominic John Goodwill
    • G02B26/08G01B11/27G02B6/35
    • G02B26/0833G01B11/272G01J1/44G01J2001/446G02B6/3518G02B6/3556G02B26/0841
    • In one embodiment, a micro-electro-mechanical-system (MEMS) photonic switch includes a first plurality of collimators including a first collimator configured to receive a first traffic optical beam having a traffic wavelength and a first control optical beam having a control wavelength, where a first focal length of the first collimators at the traffic wavelength is different than a second focal length of the first collimators at the control wavelength. The MEMS photonic switch also includes a first mirror array optically coupled to the first plurality of collimators, where the first mirror array including a first plurality of first MEMS mirrors integrated on a first substrate and a first plurality of first photodiodes integrated on the first substrate, where the photodiodes are disposed in interstitial spaces between the MEMS mirrors.
    • 在一个实施例中,微电子机械系统(MEMS)光子开关包括第一多个准直器,其包括被配置为接收具有业务波长的第一业务光束的第一准直仪和具有控制波长的第一控制光束, 其中在交通波长处的第一准直仪的第一焦距不同于处于控制波长的第一准直仪的第二焦距。 MEMS光子开关还包括光耦合到第一多个准直器的第一反射镜阵列,其中第一反射镜阵列包括集成在第一基板上的第一多个第一MEMS反射镜和集成在第一基板上的第一多个第一光电二极管, 其中光电二极管设置在MEMS镜之间的间隙空间中。