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    • 6. 发明授权
    • FINFET fin height control
    • FINFET翅片高度控制
    • US09530654B2
    • 2016-12-27
    • US13862819
    • 2013-04-15
    • GLOBALFOUNDRIES Inc.
    • Nicholas V. Licausi
    • H01L21/308H01L21/306H01L27/088H01L29/66H01L21/8234H01L21/762H01L21/3105
    • H01L21/30625H01L21/3105H01L21/762H01L21/823431H01L27/0886H01L29/66795
    • Fin height control techniques for FINFET fabrication are disclosed. The technique includes a method for controlling the height of plurality of fin structures to achieve uniform height thereof relative to a top surface of isolation material located between fin structures on a semiconductor substrate. The isolation material located between fin structures may be selectively removed after treatment to increase its mechanical strength such as by, for example, annealing and curing. A sacrificial material may be deposited over the isolation material between the fin structures in a substantially uniform thickness. The top portion of the fin structures may be selectively removed to achieve a uniform planar surface over the fin structures and sacrificial material. The sacrificial material may then be selectively removed to achieve a uniform fin height relative to the isolation material.
    • 公开了FinFET制造的翅片高度控制技术。 该技术包括一种用于控制多个翅片结构的高度以实现其相对于位于半导体衬底上的翅片结构之间的隔离材料的顶表面的均匀高度的方法。 位于翅片结构之间的隔离材料可以在处理之后选择性地除去以增加其机械强度,例如通过退火和固化。 牺牲材料可以以基本均匀的厚度沉积在翅片结构之间的隔离材料上。 可以选择性地去除翅片结构的顶部以在翅片结构和牺牲材料上实现均匀的平坦表面。 然后可以选择性地去除牺牲材料以实现相对于隔离材料的均匀的翅片高度。