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1. 发明公开

US20240120168A1 ELECTRON GUN AND ELECTRON BEAM APPLICATION APPARATUS 审中-公开
公开(公告)号：US20240120168A1
公开(公告)日：2024-04-11
申请号：US17768244
申请日：2019-10-31
申请人： Hitachi High-Tech Corporation
发明人： Takashi Ohshima , Hideo Morishita , Tatsuro Ide , Naohiro Kohmu , Momoyo Enyama , Yoichi Ose , Toshihide Agemura , Junichi Katane
IPC分类号： H01J37/073 , H01J1/34 , H01J37/147 , H01J37/22 , H01J37/26 , H01J37/285
CPC分类号： H01J37/073 , H01J1/34 , H01J37/1474 , H01J37/22 , H01J37/265 , H01J37/285 , H01J2237/06333
摘要： An electron beam emitted from a photoexcited electron gun is increased in luminance. An electron gun 15 includes: a photocathode 1 including a substrate 11 and a photoelectric film 10; a light source 7 that emits pulsed excitation light; a condenser lens 2 that focuses the pulsed excitation light toward the photocathode; and an extractor electrode 3 that faces the photocathode and that accelerates an electron beam generated from the photoelectric film by focusing the pulsed excitation light by the condenser lens, transmitting the pulsed excitation light through the substrate of the photocathode, and causing the pulsed excitation light to be incident on the photocathode. The pulsed excitation light is condensed at different timings at different positions on the photoelectric film of the photocathode.

2. 发明授权

US12074033B2 Plasma processing method 有权
公开(公告)号：US12074033B2
公开(公告)日：2024-08-27
申请号：US17439765
申请日：2020-12-23
申请人： Hitachi High-Tech Corporation
发明人： Chaomei Liu , Hitoshi Kobayashi , Masahito Mori , Ryota Takahashi
IPC分类号： H01L21/311 , H01J37/32 , H01L21/02
CPC分类号： H01L21/31116 , H01J37/32174 , H01L21/02129 , H01L21/31144 , H01J2237/334
摘要： In a plasma processing method for plasma etching a silicon film or polysilicon film containing boron, the polysilicon film containing boron is etched by using a mixed gas of a halogen gas, a fluorine-containing gas, and a boron trichloride gas. According to plasma processing method, it is possible to improve the etching rate and reduce etching defects when plasma etching a silicon film or polysilicon film containing boron.

3. 发明公开

US20240280602A1 AUTOMATIC ANALYSIS DEVICE CONTROL METHOD AND AUTOMATIC ANALYSIS DEVICE 审中-公开
公开(公告)号：US20240280602A1
公开(公告)日：2024-08-22
申请号：US18570131
申请日：2022-06-01
申请人： HITACHI HIGH-TECH CORPORATION
发明人： Shohei Hayakawa , Shinya Matsuoka , Iwao Suzuki
IPC分类号： G01N35/10
CPC分类号： G01N35/1009 , G01N35/1004 , G01N2035/1025
摘要： To provide a control method for an automatic analyzer by which an amount of waste liquid of a solvent such as an organic solvent whose waste amount is strictly controlled, can be controlled, and a throughput of waste liquid treatment can be improved.
A control method for an automatic analyzer according to the present disclosure includes: acquiring information about an amount of an organic solvent contained in a liquid introduced into a reaction container and determining whether or not to suck a residual liquid in the reaction container according to the information.

4. 发明授权

US12064767B2 Biochemical cartridge and biochemical analysis device 有权
公开(公告)号：US12064767B2
公开(公告)日：2024-08-20
申请号：US17274279
申请日：2018-10-19
申请人： HITACHI HIGH-TECH CORPORATION
发明人： Michiru Fujioka , Sakuichiro Adachi
IPC分类号： B01L3/00 , G01N35/08
CPC分类号： B01L3/502792 , G01N35/08 , B01L2200/0605 , B01L2200/0673 , B01L2400/0427
摘要： To enable taking in a biological sample at a position a predetermined distance away from an EWOD electrode, a biochemical cartridge, including a droplet passage on which a plurality of EWOD electrodes is arranged along a direction in which a sample droplet that is a droplet including a biological sample is transported, the plurality of EWOD electrodes configured to transport the sample droplet, and a sample take-in unit having a predetermined distance from an EWOD electrode at a tail end of the droplet passage, the sample take-in unit being provided at a position at which the biological sample in the sample droplet is taken in. When the biological sample is taken in, the sample take-in unit is located at a position lower than the droplet passage having the EWOD electrode at the tail end, and an area between the droplet passage and the sample take-in unit is smoothly connected.

5. 发明公开

US20240272184A1 GLASS SLIDE SUPPLY STORAGE UNIT AND SAMPLE PROCESSING SYSTEM 审中-公开
公开(公告)号：US20240272184A1
公开(公告)日：2024-08-15
申请号：US18569250
申请日：2022-06-02
申请人： Hitachi High-Tech Corporation
发明人： Masashi ENDO , Shigeki MATSUBARA , Hidetoshi SUGIYAMA
IPC分类号： G01N35/00 , G02B21/34
CPC分类号： G01N35/00732 , G02B21/34 , G01N2035/00752 , G01N2035/00801
摘要： A glass slide supply storage unit 1 includes a supply portion 10 where a plurality of slide trays 2 are mountable such that the plurality of slide trays 2 are stacked in a z direction, and a moving mechanism TM1 configured to individually move the plurality of slide trays 2 mounted on the supply portion 10 in a X direction. A plurality of glass slides 3 on each of which a sample is placed are placeable on each of the plurality of slide trays 2.

6. 发明公开

US20240272126A1 SAMPLE LIQUID ATOMIZATION DEVICE AND ANALYSIS DEVICE 审中-公开
公开(公告)号：US20240272126A1
公开(公告)日：2024-08-15
申请号：US18567350
申请日：2021-06-15
申请人： Hitachi High-Tech Corporation
发明人： Tooru MIYASAKA , Yasushi TERUI , Masazumi HORIE , Daisuke KITAUCHI , Toru SHIBATA
IPC分类号： G01N30/06
CPC分类号： G01N30/06
摘要： A sample liquid atomization device according to the present invention includes: an ultrasonic sample liquid atomization unit (5) including an exciting part (3) that emits ultrasonic vibration, a vibration surface (1) to be excited by the exciting part (3), a vibration member (2) including the vibration surface (1), and a pipe (7a) that supplies a sample liquid (7) to the vibration surface (1), the ultrasonic sample liquid atomization unit (5) atomizing the sample liquid (7) supplied to the vibration surface (1) by the ultrasonic vibration of the vibration surface (1); and a first pipeline part (10) that is a tubular member. The first pipeline part (10) extends in a direction of the ultrasonic vibration of the vibration surface (1). The ultrasonic sample liquid atomization unit (5) is provided inside the first pipeline part (10) and supported by a holding member (11) in the first pipeline part (10).

7. 发明授权

US12062530B2 Vacuum processing apparatus and vacuum processing method 有权
公开(公告)号：US12062530B2
公开(公告)日：2024-08-13
申请号：US16911584
申请日：2020-06-25
申请人： Hitachi High-Tech Corporation
发明人： Yusuke Yoshida , Shigeru Nakamoto , Kosuke Fukuchi , Ryoji Asakura
IPC分类号： H01J37/32 , G01B11/06 , H01J37/18
CPC分类号： H01J37/32972 , G01B11/06 , G01B11/0625 , G01B11/0683 , H01J37/18
摘要： A vacuum processing apparatus includes a processing unit comprising a processing chamber disposed in a vacuum container, a detector detecting a thickness of the target film on a wafer or an end point during the processing of the wafer using a light from the wafer, the detector being functioned to detect the thickness or the end point by comparing a data pattern of obtained in advance indicating light intensities of a plurality of wavelengths related to the film thickness using the wavelength as a parameter and a real data pattern indicating the light intensities of the plurality of wavelengths obtained at a particular time during the processing, and the data pattern being obtained by dividing differential coefficient value of time-series data of the light intensities of the plurality of wavelengths by time-series data indicating values of the light intensities of the plurality of wavelengths.

8. 发明公开

US20240264193A1 Dispensing Device, Automatic Analysis Device, and Dispensing Method 审中-公开
公开(公告)号：US20240264193A1
公开(公告)日：2024-08-08
申请号：US18562979
申请日：2022-04-18
申请人： Hitachi High-Tech Corporation
发明人： Masaaki HIRANO , Masafumi SHIMADA
IPC分类号： G01N35/10
CPC分类号： G01N35/1016
摘要： The present disclosure provides a technique for determining, with high accuracy, an abnormality that occurs when a plurality of types of liquids are simultaneously dispensed. A dispensing device of the present disclosure includes: a dispensing nozzle; a pressure source; a sensor configured to detect a pressure inside the dispensing nozzle; a processor configured to control the dispensing nozzle and the pressure source, to perform aspiration of a second liquid different from a first liquid in a state where the first liquid is aspirated and held, and to determine an abnormality during the aspiration of the second liquid; and a storage device configured to store reference pressure data and predetermined threshold. A plurality of pieces of at least one of the reference pressure data and the predetermined threshold are acquired in advance and stored in the storage device so as to respectively correspond to different physical property values of the first liquid. The processor acquires pressure data to be a target of abnormality determination, and selects, according to the physical property values of the first liquid, one of a plurality of pieces of the reference pressure data if the plurality of pieces of the reference pressure data are stored, and one of a plurality of pieces of the predetermined threshold if the plurality of pieces of the predetermined threshold are stored.

9. 发明公开

US20240264186A1 LABORATORY OPERATION MANAGEMENT SYSTEM, OPERATION MANAGEMENT SERVER, AND OPERATION MANAGEMENT METHOD 审中-公开
公开(公告)号：US20240264186A1
公开(公告)日：2024-08-08
申请号：US18565583
申请日：2022-05-23
申请人： Hitachi High-Tech Corporation
发明人： Kenji KAWASAKI , Nobuhiro KOIZUMI , Aika NAKAJIMA , Yoshihiro SEKI
IPC分类号： G01N35/00
CPC分类号： G01N35/00722 , G01N2035/009 , G01N2035/0091
摘要： Communication between laboratory technicians is assisted, and cooperation between the laboratory technicians is promoted. Accordingly, in response to an alarm from an automated analysis device: estimating, on the basis of sensor data regularly transmitted from a first mobile device, a status including a location and an action of a first laboratory technician holding the first mobile device that has been registered for a planned handler; estimating, on the basis of sensor data regularly transmitted from a second mobile device, a status including a location and an action of a second laboratory technician holding the second mobile device that has been registered for a helper; and identifying a handler for resolving the alarm of the automated analysis device on the basis of the statuses that the first laboratory technician and the second laboratory technician immediately before a timing where the alarm of the automated analysis device was resolved.

10. 发明公开

US20240259688A1 IMAGING SYSTEM AND IMAGING RANGE ADJUSTMENT METHOD 审中-公开
公开(公告)号：US20240259688A1
公开(公告)日：2024-08-01
申请号：US18564749
申请日：2021-06-18
申请人： HITACHI HIGH-TECH CORPORATION
发明人： Yoshio KAMURA , Takeshi ISHIDA , Junko TANAKA
IPC分类号： H04N23/695 , H04N23/69
CPC分类号： H04N23/695 , H04N23/69
摘要： An imaging system images measurement targets arranged on a plane and includes a light source that irradiates the measurement targets with light, a photodetector that detects light from the measurement targets, one or more lenses, an adjustment mechanism that focuses imaging on the measurement targets, and a drive mechanism that changes the relative position of the photodetector and the measurement targets. The measurement targets have the same shape and size and are arranged at equal pitches in a longitudinal direction and a lateral direction on the plane, based on a value obtained by multiplying the pitch of the measurement targets by an imaging magnification that is an integer multiple of two or more times of a pixel pitch of the photodetector. In the changing of the relative position by the drive mechanism, an adjustment unit of an imaging range is equal to or less than the pixel pitch.

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