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    • 9. 发明授权
    • Electro-mechanical transducer, an electro-mechanical converter, and manufacturing methods of the same
    • 机电换能器,机电转换器及其制造方法
    • US08542852B2
    • 2013-09-24
    • US12936770
    • 2009-04-07
    • Kensuke Kageyama
    • Kensuke Kageyama
    • H04R25/00
    • H04R19/016B06B1/0292H01L2924/0002H04R19/005H01L2924/00
    • An electro-mechanical transducer contains a vibrating electrode (15b), a vibrating-electrode-insulating film (15a) disposed at a bottom surface of the vibrating electrode (15b), an electret layer (13) facing to the vibrating electrode (15b), an electret-insulating layer (14e) joined to a top surface of the electret layer (13), and a back electrode 17 in contact with a bottom surface of the electret layer (13). A microgap between ten nanometers and 100 micrometers is established between the vibrating-electrode-insulating film (15a) and electret-insulating layer (14e). A central line average roughness Ra of the vibrating electrode (15b), including a bending, is 1/10 or less of a gap width measured between the bottom surface of the vibrating electrode (15b) and the top surface of the electret layer (13).
    • 机电换能器包括振动电极(15b),设置在振动电极(15b)底面的振动电极绝缘膜(15a),与振动电极(15b)相对的驻极体层(13) 接合到驻极体层(13)的上表面的驻极体绝缘层(14e)和与所述驻极体层(13)的底面接触的背面电极17。 在振动电极绝缘膜(15a)和驻极体绝缘层(14e)之间建立了10纳米到100微米之间的微隙。 包括弯曲的振动电极(15b)的中心线平均粗糙度Ra是在振动电极(15b)的底表面和驻极体层(13)的顶表面之间测量的间隙宽度的1/10或更小 )。
    • 10. 发明申请
    • Surface acoustic wave excitation device
    • 表面声波激发装置
    • US20070247019A1
    • 2007-10-25
    • US11785290
    • 2007-04-17
    • Masaya Takasaki
    • Masaya Takasaki
    • H01L41/00H02N2/00
    • H03H9/02976G06F3/016H02N2/08H03K2217/96011H03K2217/96062
    • [Problems]To provide a surface acoustic wave excitation device for efficiently exciting the surface acoustic wave on the surface of a material such as glass having free size and shape for making mechanical vibration available.[Means to Solve the Problems]The surface acoustic wave excitation device according to the present invention comprises a non-piezoelectric member 30 such as glass, a piezoelectric member 20, interdigital transducers 11 interposed between the non-piezoelectric member 30 and the piezoelectric member 20, and pre-pressurizing means 42 for pressing the piezoelectric member 20 onto the non-piezoelectric member 30 by way of the interdigital transducers. Alternating voltage is applied to the interdigital transducers 11 for exciting the surface acoustic wave on the non-piezoelectric member 30. Standing waves are generated in the piezoelectric member 20 by applying alternating voltage to the interdigital transducers 11, thereby allowing alternating strains to propagate to the non-piezoelectric member 30 such as a glass substrate or the like by way of the electrodes 11 and exciting the surface acoustic wave for making mechanical vibration of the non-piezoelectric member 30 available.
    • [问题]提供一种表面声波激发装置,用于有效地激发诸如具有自由尺寸和形状的玻璃的材料的表面上的表面声波,以使机械振动可用。 解决问题的手段根据本发明的表面声波激发装置包括诸如玻璃的非压电构件30,压电构件20,介于非压电构件30和压电构件20之间的叉指式换能器11 以及用于通过叉指式换能器将压电构件20压到非压电构件30上的预加压装置42。 交替电压施加到叉指式换能器11,用于激励非压电构件30上的表面声波。通过向叉指式换能器11施加交流电压,在压电构件20中产生驻波,从而允许交变应变传播到 通过电极11等诸如玻璃基板等的非压电构件30,激励用于使非压电构件30产生机械振动的表面声波。