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    • 1. 发明申请
    • PROCESS FOR PRODUCTION OF CARBONYL FLUORIDE
    • 碳氟化物生产工艺
    • US20100191013A1
    • 2010-07-29
    • US12067243
    • 2006-09-26
    • Heng-dao QuanMasanori TamuraAkira Sekiya
    • Heng-dao QuanMasanori TamuraAkira Sekiya
    • C07C51/58C07C21/185
    • C01B32/80
    • The present invention provides a method for inexpensively, efficiently, safely, and continuously producing COF2, without using highly toxic raw materials such as phosgene or difficult-to-get raw materials, with no risk of explosion or the like. Tetrafluoroethylene gas and oxygen gas are introduced into a reactor, and they are then heated in a gas phase in the absence of nitrogen gas for reaction, so as to produce carbonyl fluoride. The reactor is preferably a tubular reaction tube. As such tetrafluoroethylene gas, unpurified or purified tetrafluoroethylene gas obtained by heating HCFC-22 gas for thermal decomposition can be used. According to the present invention, COF2 that is useful as cleaning gas for CVD devices (chemical vapor deposition method) can be inexpensively, efficiently, and safely produced.
    • 本发明提供了一种廉价,有效,安全,连续地生产COF2的方法,而不使用高毒性的原料如光气或难以获得的原料,不会有爆炸等危险。 将四氟乙烯气体和氧气引入反应器中,然后在不存在氮气的气相中加热反应,以产生碳酰氟。 反应器优选为管式反应管。 作为这样的四氟乙烯气体,可以使用通过加热用于热分解的HCFC-22气体获得的未纯化或纯化的四氟乙烯气体。 根据本发明,可以廉价,高效,安全地制造用作CVD装置的清洁气体(化学气相沉积法)的COF 2。