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    • 1. 发明授权
    • Reticle cleaning apparatus for wafer exposure system
    • 晶圆曝光系统的光罩清洁装置
    • US6055742A
    • 2000-05-02
    • US156602
    • 1998-09-18
    • Beom-Soo Kim
    • Beom-Soo Kim
    • G03F7/20H01L21/00F26B11/22
    • H01L21/67028G03F7/70925
    • A reticle cleaning apparatus for a wafer exposure system includes a chamber enclosing the reticle, a door opening and closing at least one side of the chamber, a door switching member opening and closing the door coupled to the chamber including the door, a gas injection nozzle at an upper portion of the chamber, a nozzle transport member moving the gas injection nozzle in a vertical direction, a gas supply member supplying a cleaning gas into the gas injection nozzle, an ion injection nozzle over the gas injection nozzle, an ion supply member supplying ions into the ion injection nozzle, and a drain member draining the cleaning gas outside the chamber.
    • 一种用于晶片曝光系统的掩模版清洁装置,包括:封闭掩模版的腔室;打开和关闭腔室的至少一侧的门;打开和关闭连接到包括门的腔室的门开关构件;气体喷射喷嘴 在所述室的上部,沿着垂直方向移动所述气体注入喷嘴的喷嘴输送构件,向所述气体喷射喷嘴供给清洁气体的气体供给构件,所述气体喷射喷嘴上方的离子注入喷嘴,离子供给构件 将离子供应到离子注入喷嘴中,以及排出构件,将清洁气体排出室外。
    • 2. 发明授权
    • Method of extracting color difference signal motion vector and a motion
compensation in high definition television
    • 在高分辨率电视中提取色差信号运动矢量和运动补偿的方法
    • US5777681A
    • 1998-07-07
    • US562752
    • 1995-11-27
    • Beom Soo KimJin Hak LeeKyoung Bong Koo
    • Beom Soo KimJin Hak LeeKyoung Bong Koo
    • H04N19/50H04N7/12H04N11/04H04N19/42H04N19/423H04N19/436H04N19/44H04N19/46H04N19/503H04N19/51H04N19/513H04N19/61H04N19/625H04N19/70H04N7/18
    • H04N19/433H04N19/51
    • A method of extracting a color difference signal, a motion vector and motion compensator in HDTV, wherein motion vectors are multiplexed to one serial motion vector in a 4 step parallel process when compressing data, and in a motion compensation device for a memory address controller of HDTV, the first and second multiplexers are connected to data bus for horizontal address between a Raster format write and a memory of the address controller, and the third multiplexer is connected to a data bus for vertical address, and above the first to the third multiplexers selects addresses of color difference vertical/horizontal motion vector generator and luminance vertical/horizontal motion vector generator, and a motion compensator is structured to control motion compensation of the memory, and the output pixel from the memory is selected in the motion compensator by the motion pixel selector; motion vector, which is processed in 4 step parallel, is multiplexed to one serial motion vector, and the circuit is simply structured by using a motion compensation controller, exchanging serial the luminance motion vector into a color difference signal motion vector, and it is easy to compensate motion difference in HDTV since a motion vector of color difference is used for selecting the motion pixel and compensation motion difference.
    • 一种在HDTV中提取色差信号,运动矢量和运动补偿器的方法,其中当压缩数据时,以4级并行处理将运动矢量复用到一个串行运动矢量,并且在用于存储器地址控制器的运动补偿装置 HDTV,第一和第二多路复用器连接到用于地址控制器的栅格格式写入和存储器之间的水平地址的数据总线,并且第三多路复用器连接到用于垂直地址的数据总线,并且在第一至第三多路复用器之上 选择色差垂直/水平运动矢量发生器和亮度垂直/水平运动矢量发生器的地址,并且构造运动补偿器来控制存储器的运动补偿,并且通过运动在运动补偿器中选择来自存储器的输出像素 像素选择器 以4级并行处理的运动矢量被多路复用为一个串行运动矢量,并且通过使用运动补偿控制器简单地构造电路,将亮度运动矢量串行化为色差信号运动矢量,并且容易 以补偿HDTV中的运动差异,因为色差的运动矢量用于选择运动像素和补偿运动差。
    • 4. 发明申请
    • MASK MANAGEMENT SYSTEM AND METHOD FOR OLED ENCAPSULATION
    • 用于OLED封装的掩模管理系统和方法
    • US20140170785A1
    • 2014-06-19
    • US14126211
    • 2012-06-18
    • Shinichi KuritaBeom Soo Kim
    • Shinichi KuritaBeom Soo Kim
    • H01L51/56
    • H01L51/56C23C16/042
    • A system and method for encapsulating an organic light-emitting diode (OLED) device by enabling a substrate and a plurality of masks to be efficiently received into a vacuum processing environment, transferred between one or more process chambers for the deposition of encapsulating layers, and removed from the processing system. A method of encapsulating an organic light-emitting diode (OLED) device includes positioning one or more masks over a substrate to deposit encapsulating layers on an OLED device disposed on the substrate. A processing system for encapsulating an organic light-emitting diode (OLED) device includes one or more transfer chambers, one or more load lock chambers coupled to each transfer chamber and operable to receive a mask into a vacuum environment, and one or more process chambers coupled to each transfer chamber and operable to deposit an encapsulating layer on a substrate.
    • 一种用于封装有机发光二极管(OLED)器件的系统和方法,其通过使衬底和多个掩模能够被有效地接收到真空处理环境中,在一个或多个用于沉积封装层的处理室之间传送的真空处理环境中,以及 从处理系统中删除。 封装有机发光二极管(OLED)器件的方法包括将一个或多个掩模定位在衬底上以将封装层沉积在设置在衬底上的OLED器件上。 用于封装有机发光二极管(OLED)器件的处理系统包括一个或多个传送室,耦合到每个传送室的一个或多个负载锁定室,并可操作以将掩模接收到真空环境中,以及一个或多个处理室 耦合到每个传送室并可操作以将封装层沉积在衬底上。
    • 5. 发明授权
    • Mask management system and method for OLED encapsulation
    • 面罩管理系统和OLED封装方法
    • US09076991B2
    • 2015-07-07
    • US14126211
    • 2012-06-18
    • Shinichi KuritaBeom Soo Kim
    • Shinichi KuritaBeom Soo Kim
    • H01L21/00H01L51/56C23C16/04
    • H01L51/56C23C16/042
    • A system and method for encapsulating an organic light-emitting diode (OLED) device by enabling a substrate and a plurality of masks to be efficiently received into a vacuum processing environment, transferred between one or more process chambers for the deposition of encapsulating layers, and removed from the processing system. A method of encapsulating an organic light-emitting diode (OLED) device includes positioning one or more masks over a substrate to deposit encapsulating layers on an OLED device disposed on the substrate. A processing system for encapsulating an organic light-emitting diode (OLED) device includes one or more transfer chambers, one or more load lock chambers coupled to each transfer chamber and operable to receive a mask into a vacuum environment, and one or more process chambers coupled to each transfer chamber and operable to deposit an encapsulating layer on a substrate.
    • 一种用于封装有机发光二极管(OLED)器件的系统和方法,其通过使衬底和多个掩模能够被有效地接收到真空处理环境中,在一个或多个用于沉积封装层的处理室之间传送的真空处理环境中,以及 从处理系统中删除。 封装有机发光二极管(OLED)器件的方法包括将一个或多个掩模定位在衬底上以将封装层沉积在设置在衬底上的OLED器件上。 用于封装有机发光二极管(OLED)器件的处理系统包括一个或多个传送室,耦合到每个传送室的一个或多个负载锁定室,并可操作以将掩模接收到真空环境中,以及一个或多个处理室 耦合到每个传送室并可操作以将封装层沉积在衬底上。