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    • 1. 发明申请
    • SUSPENDED MEMBRANE PRESSURE SENSING ARRAY
    • 悬挂膜压力传感阵列
    • US20110271772A1
    • 2011-11-10
    • US13086962
    • 2011-04-14
    • Thomas R. ParksChi Cao
    • Thomas R. ParksChi Cao
    • G01L1/14
    • G01L1/146G01L5/228
    • An accurate and low cost macro pressure sensor is described. The pressure sensor includes an array of capacitive sensing elements formed at the intersections of sets of conductors. A lower set of conductors is supported by a substrate and an upper set of conductors is supported on a flexible polymer membrane. Capacitive sensing elements are formed where a conductor in the upper set overlaps a spacer in the lower set. Separators hold the membrane away from the substrate with a separation that, because of deflection of the membrane, varies in relation to the pressure applied to the membrane. As a result, the separation of conductors, and therefore capacitance, in each cell varies in response to the applied pressure. By attaching the membrane to the separators and optionally using slits in the membrane between capacitive sensing elements, measurements made in each capacitive sensing element can be mechanically decoupled.
    • 描述了精确和低成本的宏观压力传感器。 压力传感器包括形成在导体组的交叉处的电容感测元件的阵列。 下一组导体由衬底支撑,并且上一组导体支撑在柔性聚合物膜上。 形成电容感测元件,其中上部集合体中的导体与下部组中的间隔物重叠。 分离器将膜远离基板,分离,因为膜的偏转相对于施加到膜的压力而变化。 结果,每个电池中导体的分离以及因此的电容随施加的压力而变化。 通过将膜连接到分离器并且可选地在电容感测元件之间使用膜中的狭缝,可以在每个电容感测元件中进行的测量被机械地去耦。
    • 4. 发明授权
    • Suspended membrane pressure sensing array
    • 悬浮膜压力传感阵列
    • US07944008B2
    • 2011-05-17
    • US12108479
    • 2008-04-23
    • Thomas R. ParksChi Cao
    • Thomas R. ParksChi Cao
    • G01L9/00
    • G01L1/146G01L5/228
    • An accurate and low cost macro pressure sensor is described. The pressure sensor includes an array of capacitive sensing elements formed at the intersections of sets of conductors. A lower set of conductors is supported by a substrate and an upper set of conductors is supported on a flexible polymer membrane. Capacitive sensing elements are formed where a conductor in the upper set overlaps a spacer in the lower set. Separators hold the membrane away from the substrate with a separation that, because of deflection of the membrane, varies in relation to the pressure applied to the membrane. As a result, the separation of conductors, and therefore capacitance, in each cell varies in response to the applied pressure. By attaching the membrane to the separators and optionally using slits in the membrane between capacitive sensing elements, measurements made in each capacitive sensing element can be mechanically decoupled.
    • 描述了精确和低成本的宏观压力传感器。 压力传感器包括形成在导体组的交叉处的电容感测元件的阵列。 下一组导体由衬底支撑,并且上一组导体支撑在柔性聚合物膜上。 形成电容感测元件,其中上部集合体中的导体与下部组中的间隔物重叠。 分离器将膜远离基板,分离,因为膜的偏转相对于施加到膜的压力而变化。 结果,每个电池中导体的分离以及因此的电容随施加的压力而变化。 通过将膜连接到分离器并且可选地在电容感测元件之间使用膜中的狭缝,可以在每个电容感测元件中进行的测量被机械地去耦。
    • 6. 发明申请
    • SUSPENDED MEMBRANE PRESSURE SENSING ARRAY
    • 悬挂膜压力传感阵列
    • US20090004767A1
    • 2009-01-01
    • US12108479
    • 2008-04-23
    • Thomas R. ParksChi Cao
    • Thomas R. ParksChi Cao
    • H01L21/00A61B5/103
    • G01L1/146G01L5/228
    • An accurate and low cost macro pressure sensor is described. The pressure sensor includes an array of capacitive sensing elements formed at the intersections of sets of conductors. A lower set of conductors is supported by a substrate and an upper set of conductors is supported on a flexible polymer membrane. Capacitive sensing elements are formed where a conductor in the upper set overlaps a spacer in the lower set. Separators hold the membrane away from the substrate with a separation that, because of deflection of the membrane, varies in relation to the pressure applied to the membrane. As a result, the separation of conductors, and therefore capacitance, in each cell varies in response to the applied pressure. By attaching the membrane to the separators and optionally using slits in the membrane between capacitive sensing elements, measurements made in each capacitive sensing element can be mechanically decoupled.
    • 描述了精确和低成本的宏观压力传感器。 压力传感器包括形成在导体组的交叉处的电容感测元件的阵列。 下一组导体由衬底支撑,并且上一组导体支撑在柔性聚合物膜上。 形成电容感测元件,其中上部集合体中的导体与下部组中的间隔物重叠。 分离器将膜远离基板,分离,因为膜的偏转相对于施加到膜的压力而变化。 结果,每个电池中导体的分离以及因此的电容随施加的压力而变化。 通过将膜连接到隔板并且可选地在电容感测元件之间使用膜中的狭缝,可以在每个电容感测元件中进行的测量被机械地去耦。