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1. 发明授权

US09147588B2 Substrate processing pallet with cooling 有权
标题翻译：基板加工托盘带冷却
公开(公告)号：US09147588B2
公开(公告)日：2015-09-29
申请号：US11716538
申请日：2007-03-09
申请人： Daniel Goodman , Arthur Keigler , Stephen Golovato , David Felsenthal
发明人： Daniel Goodman , Arthur Keigler , Stephen Golovato , David Felsenthal
IPC分类号： H01L21/00 , B05C11/00 , H01L21/67 , H01L21/677 , H01L21/683
CPC分类号： H01L21/67103 , H01L21/67109 , H01L21/67703 , H01L21/6831
摘要： A substrate processing pallet can cool a substrate. A substrate processing pallet can include a base member; an interface pad attachable to the base member, the interface pad having substantially the same coefficient of thermal expansion as the base member and adapted to facilitate cooling of the substrate; and a surface of the base member having features for aligning a substrate on the interface pad. A substrate processing pallet can also include a base member; an interface pad attachable to the base member; an electrostatic chuck for gripping the substrate during processing; an energy storage system for storing energy to sustain the electrostatic chuck at sufficient charge to sustain grip the substrate during processing; and a conduit for transporting gas to a backside of the substrate to facilitate cooling of the substrate.
摘要翻译：基板处理托盘可以冷却基板。基板处理托盘可以包括基部构件; 接口垫，其可附接到所述基底构件，所述界面垫具有与所述基底构件基本上相同的热膨胀系数并且适于促进所述衬底的冷却; 并且所述基底构件的表面具有用于使所述界面垫上的衬底对准的特征。基板处理托盘还可以包括基部构件; 可附接到基座构件的接口垫; 用于在加工期间夹持基板的静电卡盘; 能量存储系统，用于存储能量以在足够的电荷下维持静电卡盘，以在加工期间保持夹持基板; 以及用于将气体输送到衬底的背面以便于冷却衬底的导管。

2. 发明授权

US08671342B2 Desired font rendering 失效
标题翻译：期望的字体渲染
公开(公告)号：US08671342B2
公开(公告)日：2014-03-11
申请号：US12883609
申请日：2010-09-16
申请人： Lisa Seacat DeLuca , Brian Daniel Goodman , Angel E. Tomala-Reyes
发明人： Lisa Seacat DeLuca , Brian Daniel Goodman , Angel E. Tomala-Reyes
IPC分类号： G06F17/00 , G06F15/16 , G06F7/04
CPC分类号： G06F17/214
摘要： An embodiment of the invention provides a method for displaying a message from a first user to a second user, wherein the message from the first user is received in a system of the second user. The message includes text in an intended font and metadata, wherein the metadata includes a link to a font source. It is determined whether the intended font is on the system of the second user; and, if the intended font is not on the system of the second user, rendering instructions are obtained from the font source. The rendering instructions include instructions on how to display the text in the intended font on the system of the second user without downloading the intended font to the system of the second user. The text is displayed in the intended font on the system of the second user using the rendering instructions.
摘要翻译：本发明的实施例提供了一种用于将消息从第一用户显示给第二用户的方法，其中来自第一用户的消息被接收在第二用户的系统中。消息包括预期字体和元数据的文本，其中元数据包括到字体源的链接。确定预期字体是否在第二用户的系统上; 并且如果预期字体不在第二用户的系统上，则从字体源获得渲染指令。呈现指令包括关于如何在第二用户的系统上以预定字体显示文本而不将预期字体下载到第二用户的系统的说明。使用渲染指令在第二个用户的系统上以预期的字体显示文本。

3. 发明授权

US08613474B2 Substrate loader and unloader having a Bernoulli support 有权
标题翻译：具有伯努利支持的基板装载机和卸载机
公开(公告)号：US08613474B2
公开(公告)日：2013-12-24
申请号：US13279405
申请日：2011-10-24
申请人： Daniel Goodman , Arthur Keigler , Freeman Fisher , David G. Guarnaccia
发明人： Daniel Goodman , Arthur Keigler , Freeman Fisher , David G. Guarnaccia
IPC分类号： A47J45/00
CPC分类号： H01L21/67092 , H01L21/6838 , H01L21/68764 , H01L21/68785
摘要： A substrate chuck includes a frame forming a support adapted to support an adhering surface thereon, and a Bernoulli chuck surface coupled to the frame and adapted to support the substrate. The Bernoulli chuck surface is axially moveable relative to the support between first and second positions. In the first position, the substrate is coupled to the adhering surface, and the substrate is separated from the adhering surface with movement of the Bernoulli chuck from the first position to the second position, without contact between the substrate and the Bernoulli chuck surface.
摘要翻译：衬底卡盘包括形成支撑其上的粘合表面的支撑件的框架，以及联接到框架并适于支撑衬底的伯努利卡盘表面。伯努利卡盘表面相对于第一和第二位置之间的支撑件可轴向移动。在第一位置，衬底被耦合到粘附表面，并且当伯努利卡盘从第一位置移动到第二位置时，衬底与粘附表面分离，而不与衬底和伯努利卡盘表面接触。

4. 发明申请

US20130009415A1 SUBSTRATE LOADER AND UNLOADER HAVING AN AIR BEARING SUPPORT 有权
标题翻译：底座装载机和卸载机具有空气轴承支持
公开(公告)号：US20130009415A1
公开(公告)日：2013-01-10
申请号：US13279414
申请日：2011-10-24
申请人： Daniel Goodman , Arthur Keigler , Freeman Fisher
发明人： Daniel Goodman , Arthur Keigler , Freeman Fisher
IPC分类号： B25J15/06
CPC分类号： H01L21/67092 , H01L21/6838 , H01L21/68764 , H01L21/68785
摘要： A substrate separation chuck adapted to separate a substrate from an adhering surface. The substrate separation chuck has a support adapted to support the adhering surface. An air bearing surface is adapted to support the substrate, the air bearing surface axially moveable relative to the support. The air bearing surface has a first position adjacent the substrate with the substrate coupled to the adhering surface. The air bearing surface is moveable from the first position to a second position separating the substrate from the adhering surface without contact between the substrate and the air bearing surface.
摘要翻译：衬底分离卡盘，其适于将衬底与粘附表面分离。衬底分离卡盘具有适于支撑粘附表面的支撑件。空气轴承表面适于支撑基底，空气轴承表面相对于支撑件可轴向移动。空气轴承表面具有与衬底相邻的第一位置，衬底与粘附表面相连。空气轴承表面可以从第一位置移动到第二位置，从而将基板与粘合表面分离，而不会在基板和空气轴承表面之间接触。

5. 发明申请

US20120152752A1 SEED LAYER DEPOSITION IN MICROSCALE FEATURES 审中-公开
标题翻译：微粒特征中的种子层沉积
公开(公告)号：US20120152752A1
公开(公告)日：2012-06-21
申请号：US12971744
申请日：2010-12-17
申请人： Arthur Keigler , Johannes Chiu , Zhenqiu Liu , Daniel Goodman
发明人： Arthur Keigler , Johannes Chiu , Zhenqiu Liu , Daniel Goodman
IPC分类号： C25D5/00 , C25D5/48 , C25D5/02
CPC分类号： C25D5/02 , C25D5/10 , C25D5/50 , H01L24/11 , H01L2224/11462 , H01L2224/11502 , H01L2224/11849 , H01L2224/11901 , H01L2924/01322 , H01L2924/14 , H01L2924/00 , H01L2224/1146
摘要： A method of forming a metal feature on a workpiece with deposition is provided. The method includes providing an under bump metal layer for solder of an electronic device on the workpiece, depositing a substantially pure tin layer directly to the under bump metal layer, and depositing a tin silver alloy layer onto the substantially pure tin layer.
摘要翻译：提供了一种在沉积工件上形成金属特征的方法。该方法包括在工件上提供用于焊接电子器件的凸块下金属层，将基本上纯的锡层直接沉积到凸块下金属层上，并将锡银合金层沉积到基本上纯的锡层上。

6. 发明申请

US20110114623A1 Apparatus for thermal processing with micro-environment 失效
标题翻译：微环境热处理设备
公开(公告)号：US20110114623A1
公开(公告)日：2011-05-19
申请号：US12590852
申请日：2009-11-13
申请人： Daniel Goodman , Arthur Keigler , David G. Guarnaccia , Matthew R. Jeffers
发明人： Daniel Goodman , Arthur Keigler , David G. Guarnaccia , Matthew R. Jeffers
IPC分类号： H01L21/477
CPC分类号： H01L21/6719 , H01L21/67109
摘要： A substrate thermal processing system. The system has at least one substrate holding module having a housing configured for holding an isolated environment therein. A substrate heater is located in the housing and has a substrate heating surface. A substrate cooler is located in the housing and having a substrate cooling surface. A gas feed opening into the housing and feeding inert or reducing gas into the housing when the substrate is heated by the heating surface. A gas restrictor is within the housing restricting the fed gas between the substrate heating surface and a surrounding atmospheric region substantially surrounding the substrate heating surface in the housing and forming an aperture through which the fed gas communicates with the atmospheric region.
摘要翻译：基板热处理系统。该系统具有至少一个基板保持模块，该模块具有用于在其中保持隔离环境的壳体。衬底加热器位于壳体中并且具有衬底加热表面。衬底冷却器位于壳体中并且具有衬底冷却表面。当基板被加热表面加热时，气体进入开口并进入惰性气体或还原气体进入壳体。气体限制器在壳体内部，限制基板加热表面和基本上围绕壳体中的基板加热表面的周围大气区域之间的进料气体，并形成进料气体与大气区域连通的孔。

7. 发明申请

US20110082793A1 SECURE NETWORKED TRANSACTION SYSTEM 有权
标题翻译：安全网络交易系统
公开(公告)号：US20110082793A1
公开(公告)日：2011-04-07
申请号：US12966558
申请日：2010-12-13
申请人： Scott Krueger , Daniel Goodman
发明人： Scott Krueger , Daniel Goodman
IPC分类号： G06Q20/00 , G06Q30/00
CPC分类号： G06Q30/06 , G06Q20/02 , G06Q20/04 , G06Q20/10 , G06Q20/102 , G06Q20/12 , G06Q20/24 , G06Q20/3674 , G06Q20/382 , G06Q20/383 , G06Q20/385 , G06Q20/40 , G06Q20/401 , G06Q20/4012 , G06Q20/403 , G06Q40/00 , G06Q40/025
摘要： A method and system for approving a transaction between a customer and a merchant including the steps of transmitting a transaction request from a customer to a merchant; transmitting a verification request from the merchant to a verification entity, the verification request comprising first data; the customer device transmitting second data to the verification entity; and the verification entity performing a verification step by using the first data and the second data to verify if the transaction should be approved.
摘要翻译：一种用于批准客户和商家之间的交易的方法和系统，包括从客户向商家发送交易请求的步骤; 将来自所述商家的验证请求发送到验证实体，所述验证请求包括第一数据; 所述客户设备向所述验证实体发送第二数据; 并且所述验证实体通过使用所述第一数据和所述第二数据来执行验证步骤，以验证所述交易是否应被批准。

8. 发明申请

US20110024964A1 SUBSTRATE PROCESSING PALLET WITH COOLING 审中-公开
标题翻译：带冷却的基板加工托盘
公开(公告)号：US20110024964A1
公开(公告)日：2011-02-03
申请号：US12901173
申请日：2010-10-08
申请人： Daniel Goodman , Arthur Keigler , Stephen Golovato , David Felsenthal
发明人： Daniel Goodman , Arthur Keigler , Stephen Golovato , David Felsenthal
IPC分类号： B23Q3/00
CPC分类号： H01L21/67103 , H01L21/67109 , H01L21/67703 , H01L21/6831
摘要： In one exemplary embodiment, a substrate processing pallet is provided. The substrate processing pallet includes a base member, and an interface pad attachable to the base member. The interface pad has substantially the same coefficient of thermal expansion as the base member and adapted to facilitate cooling of the substrate. The substrate processing pallet also having a surface of the base member having features for aligning a substrate on the interface pad.
摘要翻译：在一个示例性实施例中，提供了基板处理托盘。基板处理托盘包括基部构件和可附接到基座构件的接口垫。界面垫具有与基底构件基本上相同的热膨胀系数，并且适于促进衬底的冷却。衬底处理托盘也具有基底构件的表面，其具有用于对准接口衬垫上的衬底的特征。

9. 发明申请

US20080220622A1 Substrate processing pallet with cooling 有权
标题翻译：基板加工托盘带冷却
公开(公告)号：US20080220622A1
公开(公告)日：2008-09-11
申请号：US11716538
申请日：2007-03-09
申请人： Daniel Goodman , Arthur Keigler , Stephen Golovato , David Felsenthal
发明人： Daniel Goodman , Arthur Keigler , Stephen Golovato , David Felsenthal
IPC分类号： H01L21/00 , B05C11/00
CPC分类号： H01L21/67103 , H01L21/67109 , H01L21/67703 , H01L21/6831
摘要： A substrate processing pallet can cool a substrate. A substrate processing pallet can include a base member; an interface pad attachable to the base member, the interface pad having substantially the same coefficient of thermal expansion as the base member and adapted to facilitate cooling of the substrate; and a surface of the base member having features for aligning a substrate on the interface pad. A substrate processing pallet can also include a base member; an interface pad attachable to the base member; an electrostatic chuck for gripping the substrate during processing; an energy storage system for storing energy to sustain the electrostatic chuck at sufficient charge to sustain grip the substrate during processing; and a conduit for transporting gas to a backside of the substrate to facilitate cooling of the substrate.
摘要翻译：基板处理托盘可以冷却基板。基板处理托盘可以包括基部构件; 接口垫，其可附接到所述基底构件，所述界面垫具有与所述基底构件基本上相同的热膨胀系数并且适于促进所述衬底的冷却; 并且所述基底构件的表面具有用于使所述界面垫上的衬底对准的特征。基板处理托盘还可以包括基部构件; 可附接到基座构件的接口垫; 用于在加工期间夹持基板的静电卡盘; 能量存储系统，用于存储能量以在足够的电荷下维持静电卡盘，以在加工期间保持夹持基板; 以及用于将气体输送到衬底的背面以便于冷却衬底的导管。

10. 发明申请

US20060143119A1 Secure networked transaction system 审中-公开
公开(公告)号：US20060143119A1
公开(公告)日：2006-06-29
申请号：US11246907
申请日：2005-10-07
申请人： Scott Krueger , Daniel Goodman
发明人： Scott Krueger , Daniel Goodman
IPC分类号： G06Q40/00
CPC分类号： G06Q30/06 , G06Q20/02 , G06Q20/04 , G06Q20/10 , G06Q20/102 , G06Q20/12 , G06Q20/24 , G06Q20/3674 , G06Q20/382 , G06Q20/383 , G06Q20/385 , G06Q20/40 , G06Q20/401 , G06Q20/4012 , G06Q20/403 , G06Q40/00 , G06Q40/025
摘要： A method and system for approval by a verification computer of an online transaction between a user computer and a merchant computer over the Internet. The user computer transmits a transaction request to the merchant computer, which may include a product to be purchased and the payment amount. The merchant computer transmits to the verification computer a verification request including a first data string associated with the payment card (such as a debit card account number or a portion thereof) and the payment amount. The verification request is stored at the verification computer with a transaction identifier and a verification data string, which are also transmitted to the merchant computer. The merchant computer stores the verification data string as an expected verification data string and the transaction identifier, transmits the transaction identifier to the user computer, and the user computer transmits the transaction identifier to the verification computer. This may be accomplished by the merchant computer redirecting the web browser of the user computer to the verification computer. The user computer also transmits a second data string associated with the payment card (such as the PIN for the debit card) after being requested by the verification computer. The verification computer uses the transaction identifier received via the user computer to retrieve the verification request previously stored with that received transaction identifier, and then it performs a verification step by using the first data string associated with the payment card retrieved from storage and the second data string associated with the payment card received from the user computer to verify if the transaction should be approved, e.g. by determining if an account associated with the payment card is sufficient to cover the payment amount in the verification request. The verification computer will, upon successful verification that the transaction should be approved, transmit a verification approval message to the user computer, which includes the transaction identifier and the verification data string associated therewith as a confirmation verification data string, and the user computer transmits the verification approval message to the merchant computer. This may also be accomplished by the verification computer redirecting the web browser of the user computer to the merchant computer with the appropriate data. The merchant computer uses the transaction identifier in the verification approval message to retrieve an expected verification data string it had previously stored. The merchant computer then compares the expected verification data string with the confirmation verification data string from the verification approval message and indicates that the transaction has been approved if the comparison is positive.

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