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1. 发明授权

US09644939B2 Single-position hall effect measurements 有权
公开(公告)号：US09644939B2
公开(公告)日：2017-05-09
申请号：US13996968
申请日：2011-12-21
申请人： Fei Wang , Dirch Hjorth Petersen , Ole Hansen
发明人： Fei Wang , Dirch Hjorth Petersen , Ole Hansen
IPC分类号： G01B7/14 , G01R31/26 , G01R31/28 , H01L21/66
CPC分类号： G01B7/14 , G01R31/2648 , G01R31/2831 , H01L22/14 , H01L22/34
摘要： A method for determining an electrical property of a test sample having a conductive surface portion with an electrical boundary includes (a) determining a first distance between the single position and the boundary by (1) contacting the test sample with a first four-contact configuration of a multi-contact probe at the single position; (2) applying a magnetic field at the single position; (3) measuring first and second resistances from which to calculate a first resistance difference; (4) measuring third and fourth resistances from which to calculate a second resistance difference; (5) defining a first relation including parameters representing the first and second resistance differences and the first distance; (6) determining the first distance by using the first and second resistance differences in the first relation; (b) repeating steps (1)-(6) with a second four-contact configuration to determine a second distance between the single position and the boundary; (c) defining a second relation including the electrical property and a fourth parameter representing the second distance; and (d) employing the second distance as the fourth parameter in the second relation for determining the electrical property.

2. 发明申请

US20140015552A1 SINGLE-POSITION HALL EFFECT MEASUREMENTS 有权
标题翻译：单一位置效应测量
公开(公告)号：US20140015552A1
公开(公告)日：2014-01-16
申请号：US13996968
申请日：2011-12-21
申请人： Fei Wang , Dirch Hjorth Petersen , Ole Hansen
发明人： Fei Wang , Dirch Hjorth Petersen , Ole Hansen
IPC分类号： G01B7/14
CPC分类号： G01B7/14 , G01R31/2648 , G01R31/2831 , H01L22/14 , H01L22/34
摘要： A method for determining a distance (Y) between a first position on and an electrical boundary (34) of a test sample by a multi-point probe comprising four contact elements, comprising: contacting the test sample with the four contact elements (20,22,24,26) at the first position, applying a magnetic field at the first position, performing a first and a second four-point measurement and deriving a first and a second resistance value, calculating a first resistance difference from the first and second resistance values, performing a third and a fourth four-point measurement and deriving a third and a fourth resistance value, calculating a second resistance difference from the third and fourth resistance values, defining a first relation including parameters representing the first resistance difference, the second resistance difference, and the distance between the first position and the electrical boundary, determining the distance by using the first and the second resistance differences in the first relation.
摘要翻译：用于通过包括四个接触元件的多点探针确定测试样品的第一位置和电气边界（34）之间的距离（Y）的方法，包括：使所述测试样品与所述四个接触元件 22,24,26），在第一位置施加磁场，执行第一和第二四点测量并导出第一和第二电阻值，从第一和第二位置计算第一电阻差电阻值，执行第三和第四四点测量并导出第三和第四电阻值，从第三和第四电阻值计算第二电阻差，定义包括表示第一电阻差的参数的第一关系，第二电阻值电阻差和第一位置与电气边界之间的距离，通过使用第一和第二电阻差确定距离在第一关系。

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