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    • 3. 发明申请
    • METHOD FOR FORMING A SELF-ALIGNED ISOLATION STRUCTURE UTILIZING SIDEWALL SPACERS AS AN ETCH MASK AND REMAINING AS A PORTION OF THE ISOLATION STRUCTURE
    • 用于形成隔离隔离层的自对准隔离结构的方法作为隔离层,并且作为隔离结构的一部分
    • US20120208345A1
    • 2012-08-16
    • US13454187
    • 2012-04-24
    • Fernando GonzalezDavid ChapekRandhir P.S. Thakur
    • Fernando GonzalezDavid ChapekRandhir P.S. Thakur
    • H01L21/762
    • H01L21/76237
    • The present invention relates to methods for forming microelectronic structures in a semiconductor substrate. The method includes selectively removing dielectric material to expose a portion of an oxide overlying a semiconductor substrate. Insulating material may be formed substantially conformably over the oxide and remaining portions of the dielectric material. Spacers may be formed from the insulating material. An isolation trench etch follows the spacer etch. An optional thermal oxidation of the surfaces in the isolation trench may be performed, which may optionally be followed by doping of the bottom of the isolation trench to further isolate neighboring active regions on either side of the isolation trench. A conformal material may be formed substantially conformably over the spacer, over the remaining portions of the dielectric material, and substantially filling the isolation trench. Planarization of the conformal material may follow.
    • 本发明涉及在半导体衬底中形成微电子结构的方法。 该方法包括选择性地去除介电材料以暴露覆盖半导体衬底的氧化物的一部分。 绝缘材料可以基本上顺应地形成在电介质材料的氧化物和剩余部分上。 间隔物可以由绝缘材料形成。 隔离沟蚀刻遵循间隔物蚀刻。 可以执行隔离沟槽中的表面的可选热氧化,其可以任选地随后掺杂隔离沟槽的底部以进一步隔离隔离沟槽的任一侧上的相邻有源区。 可以在绝缘材料的剩余部分上基本上顺应地在间隔物上形成共形材料,并且基本上填充隔离沟槽。 保形材料的平面化可能遵循。
    • 4. 发明授权
    • Method for forming a self-aligned isolation structure utilizing sidewall spacers as an etch mask and remaining as a portion of the isolation structure
    • 用于形成利用侧壁间隔物作为蚀刻掩模并保留为隔离结构的一部分的自对准隔离结构的方法
    • US08173517B2
    • 2012-05-08
    • US12828868
    • 2010-07-01
    • Fernando GonzalezDavid L. ChapekRandhir P. S. Thakur
    • Fernando GonzalezDavid L. ChapekRandhir P. S. Thakur
    • H01L21/764H01L29/00
    • H01L21/76237
    • The present invention relates to methods for forming microelectronic structures in a semiconductor substrate. The method includes selectively removing dielectric material to expose a portion of an oxide overlying a semiconductor substrate. Insulating material may be formed substantially conformably over the oxide and remaining portions of the dielectric material. Spacers may be formed from the insulating material. An isolation trench etch follows the spacer etch. An optional thermal oxidation of the surfaces in the isolation trench may be performed, which may optionally be followed by doping of the bottom of the isolation trench to further isolate neighboring active regions on either side of the isolation trench. A conformal material may be formed substantially conformably over the spacer, over the remaining portions of the dielectric material, and substantially filling the isolation trench. Planarization of the conformal material may follow.
    • 本发明涉及在半导体衬底中形成微电子结构的方法。 该方法包括选择性地去除介电材料以暴露覆盖半导体衬底的氧化物的一部分。 绝缘材料可以基本上顺应地形成在电介质材料的氧化物和剩余部分上。 间隔物可以由绝缘材料形成。 隔离沟蚀刻遵循间隔物蚀刻。 可以执行隔离沟槽中的表面的可选热氧化,其可以任选地随后掺杂隔离沟槽的底部以进一步隔离隔离沟槽的任一侧上的相邻有源区。 可以在绝缘材料的剩余部分上基本上顺应地在间隔物上形成共形材料,并且基本上填充隔离沟槽。 保形材料的平面化可能遵循。
    • 5. 发明授权
    • Needle catheter
    • 针导管
    • US08152758B2
    • 2012-04-10
    • US11841470
    • 2007-08-20
    • Gregory Waimong ChanFernando GonzalezThuhuong Thi PhanDwight A. AmbatManolo LumauigMina W. Chow
    • Gregory Waimong ChanFernando GonzalezThuhuong Thi PhanDwight A. AmbatManolo LumauigMina W. Chow
    • A61M29/00
    • A61M29/00
    • An apparatus including an expandable body; at least one delivery cannula coupled to an exterior portion of the expandable body; a needle having a protuberance thereon disposed in a lumen of the at least one delivery cannula; a stop disposed in the lumen of the at least one delivery cannula at a position distal to the protuberance on the needle. A method including positioning a catheter assembly including at least one needle delivery device disposed in an at least one delivery cannula, the at least one delivery cannula having an exit end; modifying the shape of the catheter assembly to modify the orientation of the exit end of the at least one delivery cannula at a region of interest; and advancing the at least one needle delivery device beyond the exit end of the at least one delivery cannula according to a controlled orientation.
    • 一种包括可膨胀体的装置; 至少一个输送插管,其连接到所述可膨胀体的外部部分; 其上具有突起的针,其设置在所述至少一个输送插管的内腔中; 设置在所述至少一个输送套管的内腔中的位于远离所述针头上的突起的位置处的止动件。 一种方法,包括定位包括设置在至少一个输送插管中的至少一个针递送装置的导管组件,所述至少一个输送插管具有出口端; 改变导管组件的形状以改变感兴趣区域中至少一个输送插管的出口端的取向; 以及根据受控的取向将所述至少一个针输送装置推进到所述至少一个输送插管的出口端。