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1. 发明授权

US08867021B2 Illumination system, lithographic apparatus and method of adjusting an illumination mode 有权
标题翻译：照明系统，光刻设备和调节照明模式的方法
公开(公告)号：US08867021B2
公开(公告)日：2014-10-21
申请号：US13392022
申请日：2010-03-18
申请人： Gosse Charles De Vries , Edwin Johan Buis , Marinus Johannes Maria Van Dam , Jan Bernard Plechelmus Van Schoot , Fidelus Adrianus Boon , Hermanus Johannes Maria Kreuwel
发明人： Gosse Charles De Vries , Edwin Johan Buis , Marinus Johannes Maria Van Dam , Jan Bernard Plechelmus Van Schoot , Fidelus Adrianus Boon , Hermanus Johannes Maria Kreuwel
IPC分类号： G03B27/54 , G03B27/72 , G03F7/20
CPC分类号： G03F7/70116 , G03F7/70075
摘要： An illumination system is disclosed that had a plurality of moveable reflective elements and associated actuators which may be configured to form an illumination mode. One or more of the actuators is arranged to move between first, second and third positions, and so move an associated moveable reflective element between first, second and third orientations, the first and second orientations being such that radiation reflected from the moveable reflective element forms part of the illumination mode, and the third orientation being such that radiation reflected from the moveable reflective element does not form part of the illumination mode.
摘要翻译：公开了一种照明系统，其具有多个可移动反射元件和相关联的致动器，其可被配置为形成照明模式。一个或多个致动器布置成在第一，第二和第三位置之间移动，并且因此在第一，第二和第三取向之间移动相关联的可移动反射元件，第一和第二取向使得从可移动反射元件反射的辐射形成照明模式的一部分，并且第三取向使得从可移动反射元件反射的辐射不会形成照明模式的一部分。

2. 发明申请

US20130175884A1 LITHOGRAPHIC APPARATUS AND LORENTZ ACTUATOR 有权
标题翻译： LITHOGRAPHIC装置和LORENTZ执行器
公开(公告)号：US20130175884A1
公开(公告)日：2013-07-11
申请号：US13737848
申请日：2013-01-09
申请人： Fidelus Adrianus Boon , Hendrikus Pascal Gerardus Johannes Van Agtmaal , Abdelhamid Kechroud , Sven Antoin Johan Hol , Peter Michel Silvester Maria Heijmans
发明人： Fidelus Adrianus Boon , Hendrikus Pascal Gerardus Johannes Van Agtmaal , Abdelhamid Kechroud , Sven Antoin Johan Hol , Peter Michel Silvester Maria Heijmans
IPC分类号： H02K1/06
CPC分类号： H02K1/06 , G03F7/70758
摘要： A lithographic apparatus includes an actuator for producing a force in a first direction between a first and a second part including a first magnet assembly and a second magnet assembly each attached opposite to each other to the first part of the apparatus, the first magnet assembly including a first main magnet system and a first outer subsidiary magnet system, and the second magnet assembly including a second main magnet system and a second outer subsidiary magnet system, the first and second main magnet system defining a space between them in a second direction perpendicular to the first direction. The actuator includes a coil attached to the second part. The distance between the first outer subsidiary magnet system and the second outer subsidiary magnet system in the second direction is substantially zero.
摘要翻译：光刻设备包括用于在包括第一磁体组件和第二磁体组件的第一和第二部分之间沿第一方向产生力的致动器，每个第一磁体组件和第二磁体组件彼此相对地安装到装置的第一部分，第一磁体组件包括第一主磁体系统和第一外部辅助磁体系统，第二磁体组件包括第二主磁体系统和第二外部辅助磁体系统，第一和第二主磁体系统在垂直于第二主磁体系统的第二方向上在它们之间限定空间第一个方向。致动器包括附接到第二部件的线圈。第一外辅助磁体系统和第二外辅助磁体系统在第二方向上的距离基本为零。

3. 发明申请

US20120154777A1 ILLUMINATION SYSTEM, LITHOGRAPHIC APPARATUS AND METHOD OF ADJUSTING AN ILLUMINATION MODE 有权
标题翻译：照明系统，平面设备和调节照明模式的方法
公开(公告)号：US20120154777A1
公开(公告)日：2012-06-21
申请号：US13392022
申请日：2010-03-18
申请人： Gosse Charles De Vries , Edwin Johan Buis , Marinus Johannes Maria Vandam , Jan Bernard Plechelmus Van Schoot , Fidelus Adrianus Boon , Hermanus Johannes Maria Kreuwel
发明人： Gosse Charles De Vries , Edwin Johan Buis , Marinus Johannes Maria Vandam , Jan Bernard Plechelmus Van Schoot , Fidelus Adrianus Boon , Hermanus Johannes Maria Kreuwel
IPC分类号： G03B27/72 , G02B26/02
CPC分类号： G03F7/70116 , G03F7/70075
摘要： An illumination system is disclosed that had a plurality of moveable reflective elements and associated actuators which may be configured to form an illumination mode. One or more of the actuators is arranged to move between first, second and third positions, and so move an associated moveable reflective element between first, second and third orientations, the first and second orientations being such that radiation reflected from the moveable reflective element forms part of the illumination mode, and the third orientation being such that radiation reflected from the moveable reflective element does not form part of the illumination mode.
摘要翻译：公开了一种照明系统，其具有多个可移动反射元件和相关联的致动器，其可被配置为形成照明模式。一个或多个致动器布置成在第一，第二和第三位置之间移动，并且因此在第一，第二和第三取向之间移动相关联的可移动反射元件，第一和第二取向使得从可移动反射元件反射的辐射形成照明模式的一部分，并且第三取向使得从可移动反射元件反射的辐射不会形成照明模式的一部分。

4. 发明申请

US20120147345A1 OPTICAL APPARATUS, AND METHOD OF ORIENTING A REFLECTIVE ELEMENT 有权
标题翻译：光学装置和面向反射元件的方法
公开(公告)号：US20120147345A1
公开(公告)日：2012-06-14
申请号：US13392032
申请日：2010-04-09
申请人： Edwin Johan Buis , Gosse Charles De Vries , Fidelus Adrianus Boon
发明人： Edwin Johan Buis , Gosse Charles De Vries , Fidelus Adrianus Boon
IPC分类号： G03B27/70 , G02B26/08
CPC分类号： G03F7/70116 , G02B7/1821
摘要： An optical apparatus has a moveable reflective element and associated actuator. The actuator includes a first magnet which is connected to the moveable reflective element such that movement of the first magnet will cause the moveable reflective element to move, and a second magnet which is connected to a motor such that operation of the motor will cause the second magnet to move. The second magnet is positioned relative to the first magnet such that moving the second magnet will cause the first magnet to move.
摘要翻译：光学装置具有可移动的反射元件和相关联的致动器。致动器包括连接到可移动反射元件的第一磁体，使得第一磁体的移动将导致可移动的反射元件移动，以及连接到电动机的第二磁体，使得电动机的操作将导致第二磁体磁铁移动。第二磁体相对于第一磁体定位，使得移动第二磁体将使第一磁体移动。

5. 发明授权

US08817232B2 Optical apparatus, and method of orienting a reflective element 有权
标题翻译：光学装置和反射元件的取向方法
公开(公告)号：US08817232B2
公开(公告)日：2014-08-26
申请号：US13392032
申请日：2010-04-09
申请人： Edwin Johan Buis , Gosse Charles De Vries , Fidelus Adrianus Boon
发明人： Edwin Johan Buis , Gosse Charles De Vries , Fidelus Adrianus Boon
IPC分类号： G03B27/70 , G03F7/20
CPC分类号： G03F7/70116 , G02B7/1821
摘要： An optical apparatus has a moveable reflective element and associated actuator. The actuator includes a first magnet which is connected to the moveable reflective element such that movement of the first magnet will cause the moveable reflective element to move, and a second magnet which is connected to a motor such that operation of the motor will cause the second magnet to move. The second magnet is positioned relative to the first magnet such that moving the second magnet will cause the first magnet to move.
摘要翻译：光学装置具有可移动的反射元件和相关联的致动器。致动器包括连接到可移动反射元件的第一磁体，使得第一磁体的移动将导致可移动的反射元件移动，以及连接到电动机的第二磁体，使得电动机的操作将导致第二磁体磁铁移动。第二磁体相对于第一磁体定位，使得移动第二磁体将使第一磁体移动。

6. 发明授权

US08373848B2 Lithographic apparatus and lorentz actuator 有权
标题翻译：光刻设备和洛伦兹致动器
公开(公告)号：US08373848B2
公开(公告)日：2013-02-12
申请号：US12574553
申请日：2009-10-06
申请人： Fidelus Adrianus Boon , Hendrikus Pascal Gerardus Johannes Van Agtmaal
发明人： Fidelus Adrianus Boon , Hendrikus Pascal Gerardus Johannes Van Agtmaal
IPC分类号： G03B27/58
CPC分类号： G03F7/70758
摘要： A lithographic apparatus includes an actuator for producing a force in a first direction between a first and a second part including a first magnet assembly and a second magnet assembly each attached opposite to each other to the first part of the apparatus, the first magnet assembly including a first main magnet system and a first subsidiary magnet system, and the second magnet assembly including a second main magnet system and a second subsidiary magnet system, the first and second main magnet system defining a space between them in a second direction perpendicular to the first direction. The actuator includes a coil attached to the second part. The distance between at least a part of the first subsidiary magnet system and at least a part of the second subsidiary magnet system is smaller than the minimum distance between the first main magnet system and the second main magnet system.
摘要翻译：光刻设备包括用于在包括第一磁体组件和第二磁体组件的第一和第二部分之间沿第一方向产生力的致动器，每个第一磁体组件和第二磁体组件彼此相对地安装到装置的第一部分，第一磁体组件包括第一主磁体系统和第一辅助磁体系统，并且第二磁体组件包括第二主磁体系统和第二辅助磁体系统，第一和第二主磁体系统在垂直于第一主磁体系统的第二方向方向。致动器包括附接到第二部件的线圈。第一辅助磁体系统的至少一部分与第二辅助磁体系统的至少一部分之间的距离小于第一主磁体系统和第二主磁体系统之间的最小距离。

7. 发明申请

US20100085552A1 LITHOGRAPHIC APPARATUS AND LORENTZ ACTUATOR 有权
标题翻译： LITHOGRAPHIC装置和LORENTZ执行器
公开(公告)号：US20100085552A1
公开(公告)日：2010-04-08
申请号：US12574553
申请日：2009-10-06
申请人： Fidelus Adrianus BOON , Hendrikus Pascal Gerardus Johannes Van Agtmaal
发明人： Fidelus Adrianus BOON , Hendrikus Pascal Gerardus Johannes Van Agtmaal
IPC分类号： G03B27/58 , H02K41/03
CPC分类号： G03F7/70758
摘要： A lithographic apparatus includes an actuator for producing a force in a first direction between a first and a second part including a first magnet assembly and a second magnet assembly each attached opposite to each other to the first part of the apparatus, the first magnet assembly including a first main magnet system and a first subsidiary magnet system, and the second magnet assembly including a second main magnet system and a second subsidiary magnet system, the first and second main magnet system defining a space between them in a second direction perpendicular to the first direction. The actuator includes a coil attached to the second part. The distance between at least a part of the first subsidiary magnet system and at least a part of the second subsidiary magnet system is smaller than the minimum distance between the first main magnet system and the second main magnet system.
摘要翻译：光刻设备包括用于在包括第一磁体组件和第二磁体组件的第一和第二部分之间沿第一方向产生力的致动器，每个第一磁体组件和第二磁体组件彼此相对地安装到装置的第一部分，第一磁体组件包括第一主磁体系统和第一辅助磁体系统，并且第二磁体组件包括第二主磁体系统和第二辅助磁体系统，第一和第二主磁体系统在垂直于第一主磁体系统的第二方向方向。致动器包括附接到第二部件的线圈。第一辅助磁体系统的至少一部分与第二辅助磁体系统的至少一部分之间的距离小于第一主磁体系统和第二主磁体系统之间的最小距离。

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