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1. 发明授权

US08044594B2 Power supply ignition system and method 有权
标题翻译：电源点火系统及方法
公开(公告)号：US08044594B2
公开(公告)日：2011-10-25
申请号：US12424138
申请日：2009-04-15
申请人： Forrest Morgan , Daryl Frost , Frank Heine , Doug Pelleymounter , Hendrik Walde
发明人： Forrest Morgan , Daryl Frost , Frank Heine , Doug Pelleymounter , Hendrik Walde
IPC分类号： H01J7/24
CPC分类号： H01J37/3299 , H01J37/32045 , H01J37/32174 , H01J37/32935 , H01J37/32944
摘要： One embodiment comprises a plasma processing system having a plasma chamber, a generator, a feedback component, and a controller. The feedback component is adapted to receive at least one first signal having a level dependent upon the power signal supplied from the generator to the chamber. A feedback output is adapted to emit a second signal to the controller, which is adapted to supply a third signal to the power generator. The third signal is configured to control the power generator to supply the power signal at a power level for a particular processing application. The power generator is further controlled by the controller to one of reduce and remove power from the plasma processing chamber and subsequently increase the voltage level until the power level reaches a threshold level. The power generator is further controlled to subsequently modulate the voltage until the voltage returns to a first voltage level.
摘要翻译：一个实施例包括具有等离子体室，发生器，反馈部件和控制器的等离子体处理系统。反馈分量适于接收至少一个具有取决于从发生器提供给腔室的功率信号的电平的第一信号。反馈输出适于向控制器发射第二信号，其适于向发电机提供第三信号。第三信号被配置为控制发电机为特定处理应用的功率电平提供功率信号。功率发生器由控制器进一步控制，以减少和去除等离子体处理室的功率，随后增加电压电平直到功率电平达到阈值水平。进一步控制发电机以随后调制电压，直到电压恢复到第一电压电平。

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