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    • 1. 发明授权
    • Method of forming resist pattern
    • 形成抗蚀剂图案的方法
    • US08968990B2
    • 2015-03-03
    • US13614017
    • 2012-09-13
    • Jiro YokoyaTsuyoshi NakamuraHiroaki ShimizuHideto Nito
    • Jiro YokoyaTsuyoshi NakamuraHiroaki ShimizuHideto Nito
    • G03F7/26G03F7/20G03F7/004G03F7/38G03F7/039
    • G03F7/20G03F7/004G03F7/0045G03F7/0397G03F7/38
    • A method of forming a resist pattern, including: step (1) in which a resist composition including a base component, a photobase generator component and an acid supply component is applied to a substrate to form a resist film; step (2) in which the resist film is subjected to exposure without being subjected to prebaking; step (3) in which baking is conducted after step (2), such that, at an exposed portion of the resist film, the base generated from the photobase generator component upon the exposure and an acid derived from the acid supply component are neutralized, and at an unexposed portion of the resist film, the solubility of the base component in an alkali developing solution is increased by the action of the acid derived from the acid supply component; and step (4) in which the resist film is subjected to an alkali development, thereby forming a negative-tone resist pattern.
    • 一种形成抗蚀剂图案的方法,包括:步骤(1),其中将包含基底组分,光碱产生剂组分和酸供应组分的抗蚀剂组合物施加到基底上以形成抗蚀剂膜; 步骤(2),其中抗蚀剂膜经受曝光而不经受预烘烤; 步骤(3),其中在步骤(2)之后进行烘烤,使得在抗蚀剂膜的暴露部分,曝光时由光产生剂组分产生的碱和源自酸供应组分的酸被中和, 并且在抗蚀剂膜的未曝光部分,通过来自酸供应成分的酸的作用,碱成分在碱性显影液中的溶解度增加; 和步骤(4),其中抗蚀剂膜经受碱显影,从而形成负色调抗蚀剂图案。
    • 9. 发明授权
    • Electric shaver
    • 电动剃须刀
    • US08347508B2
    • 2013-01-08
    • US12644696
    • 2009-12-22
    • Hiroaki ShimizuHiroshi ShigetaShin HosokawaJyuzaemon Iwasaki
    • Hiroaki ShimizuHiroshi ShigetaShin HosokawaJyuzaemon Iwasaki
    • B26B19/28B26B21/52
    • B26B19/28B26B19/048
    • An electric shaver includes a rod-shaped body part, a head part, and a link mechanism. The head part projects from one end portion, in a longitudinal direction, of the body part and is swingably attached to the body part with a support base between the body part and the head part. The head part includes a shaving portion and a drive mechanism. The shaving portion is formed to be elongated in a direction orthogonal to a projecting direction of the head part and has paired blades configured to operate relative to each other. The drive mechanism is configured to drive at least one of the paired blades. The link mechanism includes two link arms each connected to the support base and the head part respectively at connecting axes parallel to a longitudinal direction of the shaving portion. The link mechanism is configured to support the head part on the support base swingably. The two link arms are disposed asymmetrically with respect to a straight line passing on a center of gravity of the head part and extending parallel with the projecting direction of the head part, when viewed in the longitudinal direction of the shaving portion.
    • 电动剃须刀包括杆状主体部分,头部部分和连杆机构。 头部从身体部分的纵向方向的一个端部突出,并且在身体部分和头部之间具有支撑基座可摆动地附接到主体部分。 头部包括剃​​须部分和驱动机构。 剃须部形成为在与头部的突出方向正交的方向上伸长,并且具有被配置为相对于彼此操作的成对刀片。 所述驱动机构配置成驱动所述成对刀片中的至少一个。 连杆机构包括两个连杆臂,每个连杆臂分别在平行于剃须部分的纵向方向的连接轴线处分别连接到支撑基座和头部部分。 连杆机构构造为可摆动地支撑支撑基座上的头部。 两个连杆臂相对于通过头部的重心的直线不对称地设置,并且在沿着剃须部的纵向观察时与头部的突出方向平行地延伸。