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1. 发明申请

US20120062259A1 WAFER INSPECTION APPARATUS AND METHOD FOR PRE-HEATING PROBE CARD 有权
标题翻译：波形检测装置和预热探头卡的方法
公开(公告)号：US20120062259A1
公开(公告)日：2012-03-15
申请号：US13231341
申请日：2011-09-13
申请人： Hiroshi YAMADA , Takaaki HOSHINO , Shinji KOJIMA , Takeshi SAIGUSA , Hiroshi Shimoyama
发明人： Hiroshi YAMADA , Takaaki HOSHINO , Shinji KOJIMA , Takeshi SAIGUSA , Hiroshi Shimoyama
IPC分类号： G01R31/20
CPC分类号： G01R31/2887 , G01R31/2891 , G01R31/2893
摘要： A wafer inspection apparatus includes a first and second wafer transfer mechanisms, an alignment chamber, a second wafer transfer mechanism and a plurality of inspection chambers. The first wafer transfer mechanism is installed at a first transfer area to transfer wafers individually from a housing. The alignment chamber has an alignment mechanism configured to align the wafer at an inspection position for an electrical characteristics inspection. The second wafer transfer mechanism is configured to transfer the wafer through a wafer retaining support in a second transfer area formed along the first transfer area and an alignment area. The plurality of inspection chambers is arranged at an inspection area formed along the second transfer area and is configured to inspect electrical characteristics of the wafer transferred by the second wafer transfer mechanism through the wafer retaining support.
摘要翻译：晶片检查装置包括第一和第二晶片传送机构，对准室，第二晶片传送机构和多个检查室。第一晶片传送机构安装在第一传送区域以分别从外壳传送晶片。对准室具有对准机构，其配置成将晶片对准用于电特性检查的检查位置。第二晶片传送机构被配置为将晶片通过晶片保持支撑件传送在沿着第一传送区域形成的第二传送区域和对准区域中。多个检查室被布置在沿着第二传送区域形成的检查区域，并且被配置为检查由第二晶片传送机构通过晶片保持支撑件传送的晶片的电特性。

2. 发明申请

US20120059612A1 DEVICE AND METHOD FOR MEASURING SURFACE CHARGE DISTRIBUTION 有权
标题翻译：用于测量表面电荷分布的装置和方法
公开(公告)号：US20120059612A1
公开(公告)日：2012-03-08
申请号：US13224873
申请日：2011-09-02
申请人： Hiroyuki SUHARA , Hiroaki Tanaka , Hidekazu Murata , Hiroshi Shimoyama
发明人： Hiroyuki SUHARA , Hiroaki Tanaka , Hidekazu Murata , Hiroshi Shimoyama
IPC分类号： G06F19/00
CPC分类号： G03G15/5037
摘要： A surface charge measuring distribution method includes the steps of irradiating a sample with a charged particle beam and charging a sample surface in a spot-like manner, irradiating the charged sample with the charged particle beam to measure a potential at a potential saddle point formed above the sample, selecting one of preset multiple structure models and a tentative space charge distribution associated with the selected structure model, calculating a space potential at the potential saddle point by electromagnetic field analysis using the selected structure model and tentative space charge distribution, comparing the calculated space potential and measured value to determine the tentative space charge distribution as a space charge distribution of the sample when an error between the space potential and the measured value is within a predetermined range, and calculating a surface charge distribution of the sample by electromagnetic field analysis based on the determined space charge distribution.
摘要翻译：表面电荷测量分配方法包括以下步骤：用带电粒子束照射样品并以点样方式填充样品表面，用带电粒子束照射带电样品以测量在上述形成的电位鞍点处的电位采样，选择一个预设的多重结构模型和与所选择的结构模型相关联的暂定空间电荷分布，通过使用所选择的结构模型和暂定空间电荷分布的电磁场分析来计算潜在鞍点处的空间电位，比较计算出的空间电位和测量值，当空间电位和测量值之间的误差在预定范围内时，确定作为样本的空间电荷分布的暂定空间电荷分布，并且通过电磁场分析来计算样品的表面电荷分布基于确定的空间ch arge分布。

3. 发明申请

US20110304348A1 Apparatus for Driving Placing Table 失效
标题翻译：驱动配售表装置
公开(公告)号：US20110304348A1
公开(公告)日：2011-12-15
申请号：US13159108
申请日：2011-06-13
申请人： Tsuyoshi Aruga , Hiroshi Shimoyama , Hiroshi Yamada
发明人： Tsuyoshi Aruga , Hiroshi Shimoyama , Hiroshi Yamada
IPC分类号： G01R31/00
CPC分类号： G01R31/2891 , G01R31/2887 , H01L21/67242 , H01L21/67748
摘要： Disclosed is an apparatus for driving a placing table that contributes to saving a space and reducing the weight of an inspecting apparatus. The apparatus for driving a placing table according to an exemplary embodiment of the present disclosure includes a horizontal driving mechanism that horizontally moves a placing table in an inspecting chamber, a base that supports horizontal driving mechanism, a placing table lifting mechanism (for example, air bearing) that lifts placing table from support, using compressed air in inspecting chamber, a connecting mechanism that connects horizontal driving mechanism with placing table, and a case that accommodates the horizontal driving mechanism and the base.
摘要翻译：公开了一种用于驱动放置台的装置，其有助于节省空间并降低检查装置的重量。根据本公开的示例性实施例的用于驱动放置台的装置包括水平驱动机构，其水平地移动检查室中的放置台，支撑水平驱动机构的基座，放置台提升机构（例如，空气轴承），其从支撑件提升放置台，在检查室中使用压缩空气，将水平驱动机构与放置台连接的连接机构，以及容纳水平驱动机构和底座的壳体。

4. 发明授权

US07963513B2 Mounting device 有权
标题翻译：安装装置
公开(公告)号：US07963513B2
公开(公告)日：2011-06-21
申请号：US12024556
申请日：2008-02-01
申请人： Hiroshi Shimoyama , Kazuya Yano , Masaru Suzuki
发明人： Hiroshi Shimoyama , Kazuya Yano , Masaru Suzuki
IPC分类号： B23Q1/64
CPC分类号： G01R31/2887 , H01L21/682 , Y10S269/90
摘要： A mounting device provided on a horizontally movable stage mechanism, includes a mounting table for mounting thereon a target object, a cylindrical elevation body, having a diameter smaller than a diameter of the mounting table, for supporting the mounting table, a plurality of elevation guide rails provided on an outer peripheral surface of the elevation body so as to be spaced from each other at substantially regular intervals in a circumferential direction, and a plurality of support members each having a vertical plate to which engaging bodies engaged with the elevation guide rails are fixed. Further, a plurality of reinforcing parts are vertically provided on the outer peripheral surface of the elevation body so as to be spaced from each other at substantially regular intervals in the circumferential direction.
摘要翻译：一种设置在水平移动平台机构上的安装装置，包括用于安装目标物体的安装台，具有小于安装台直径的直径的圆柱形升降体，用于支撑安装台，多个升降导轨轨道设置在立面体的外周面上，以在圆周方向上以大致规则的间隔彼此隔开;多个支撑构件，每个支撑构件具有与升降导轨接合的接合体的垂直板，固定。此外，多个加强部分在垂直体的外周面垂直地设置，以便在圆周方向上以大致规则的间隔彼此间隔开。

5. 发明授权

US5921075A Burner replacing system 失效
标题翻译：燃烧器更换系统
公开(公告)号：US5921075A
公开(公告)日：1999-07-13
申请号：US849996
申请日：1997-08-05
申请人： Hiroshi Shimoyama , Hiroshi Tsunewaki , Tadao Yashiki , Yoshichika Satoh
发明人： Hiroshi Shimoyama , Hiroshi Tsunewaki , Tadao Yashiki , Yoshichika Satoh
IPC分类号： F01D25/28 , F23R3/60 , F02C7/20
CPC分类号： F23R3/60 , F01D25/285 , F05D2230/60 , F05D2230/70
摘要： A burner replacing system has a rail mounted in a ring around the outer periphery of burners mounted radially at the middle of a gas turbine. A carriage turns around the burners via the rail; and supports a pull-out slide via a rotary shaft which turns the slide up and down in the direction of a center axis of the gas turbine. Another rotary shaft turns the slide right and left around a radial axis of the gas turbine. The slide moves in the axial direction of the burners. A hand for gripping the burner is supported by the pull-out slide via a centering slide which moves up and down in the radial direction of the burner. An alternate system has a pull-out slide which is supported by the carriage and moves forward and backward in the axial direction of the burner. A telescopic slide is supported by the pull-out slide and expands in the axial direction of the burner. The hand is provided at the edge of the telescopic slide to grip the burner.
摘要翻译： PCT No.PCT / JP96 / 03030 Sec。 371日期：1997年8月5日 102（e）日期1997年8月5日PCT PCT 1996年10月18日PCT公布。第WO97 / 14529号公报日期1997年04月24日燃烧器更换系统具有围绕燃气轮径向安装在燃气轮机中间的燃烧器外周围的环状轨道。托架通过导轨转动燃烧器; 并且通过旋转轴支撑拉出滑块，所述旋转轴沿着燃气轮机的中心轴线的方向上下滑动滑块。另一旋转轴绕着燃气轮机的径向轴线左右转动滑块。滑块沿燃烧器的轴向移动。用于夹紧燃烧器的手由拉出的滑块通过沿着燃烧器的径向上下移动的定心滑块来支撑。替代系统具有由滑架支撑并沿着燃烧器的轴向方向前后移动的拉出滑块。伸缩滑块由拉出滑块支撑，并沿着燃烧器的轴向膨胀。手臂设置在伸缩滑块的边缘以夹紧燃烧器。

6. 发明授权

US09201115B2 Wafer inspection apparatus 有权
标题翻译：晶圆检查仪
公开(公告)号：US09201115B2
公开(公告)日：2015-12-01
申请号：US13231341
申请日：2011-09-13
申请人： Hiroshi Yamada , Takaaki Hoshino , Shinji Kojima , Takeshi Saigusa , Hiroshi Shimoyama
发明人： Hiroshi Yamada , Takaaki Hoshino , Shinji Kojima , Takeshi Saigusa , Hiroshi Shimoyama
IPC分类号： G01R31/20 , G01R31/28
CPC分类号： G01R31/2887 , G01R31/2891 , G01R31/2893
摘要： A wafer inspection apparatus includes a first and second wafer transfer mechanisms, an alignment chamber, a second wafer transfer mechanism and a plurality of inspection chambers. The first wafer transfer mechanism is installed at a first transfer area to transfer wafers individually from a housing. The alignment chamber has an alignment mechanism configured to align the wafer at an inspection position for an electrical characteristics inspection. The second wafer transfer mechanism is configured to transfer the wafer through a wafer retaining support in a second transfer area formed along the first transfer area and an alignment area. The plurality of inspection chambers is arranged at an inspection area formed along the second transfer area and is configured to inspect electrical characteristics of the wafer transferred by the second wafer transfer mechanism through the wafer retaining support.
摘要翻译：晶片检查装置包括第一和第二晶片传送机构，对准室，第二晶片传送机构和多个检查室。第一晶片传送机构安装在第一传送区域以分别从外壳传送晶片。对准室具有对准机构，其配置成将晶片对准用于电特性检查的检查位置。第二晶片传送机构被配置为将晶片通过晶片保持支撑件传送在沿着第一传送区域形成的第二传送区域和对准区域中。多个检查室被布置在沿着第二传送区域形成的检查区域，并且被配置为检查由第二晶片传送机构通过晶片保持支撑件传送的晶片的电特性。

7. 发明授权

US08674712B2 Apparatus for driving placing table 失效
标题翻译：用于驾驶放置台的装置
公开(公告)号：US08674712B2
公开(公告)日：2014-03-18
申请号：US13159108
申请日：2011-06-13
申请人： Tsuyoshi Aruga , Hiroshi Shimoyama , Hiroshi Yamada
发明人： Tsuyoshi Aruga , Hiroshi Shimoyama , Hiroshi Yamada
IPC分类号： G01R31/00 , G01R31/28
CPC分类号： G01R31/2891 , G01R31/2887 , H01L21/67242 , H01L21/67748
摘要： Disclosed is an apparatus for driving a placing table that contributes to saving a space and reducing the weight of an inspecting apparatus. The apparatus for driving a placing table according to an exemplary embodiment of the present disclosure includes a horizontal driving mechanism that horizontally moves a placing table in an inspecting chamber, a base that supports horizontal driving mechanism, a placing table lifting mechanism (for example, air bearing) that lifts placing table from support, using compressed air in inspecting chamber, a connecting mechanism that connects horizontal driving mechanism with placing table, and a case that accommodates the horizontal driving mechanism and the base.
摘要翻译：公开了一种用于驱动放置台的装置，其有助于节省空间并降低检查装置的重量。根据本公开的示例性实施例的用于驱动放置台的装置包括水平驱动机构，其水平地移动检查室中的放置台，支撑水平驱动机构的基座，放置台提升机构（例如，空气轴承），其从支撑件提升放置台，在检查室中使用压缩空气，将水平驱动机构与放置台连接的连接机构，以及容纳水平驱动机构和底座的壳体。

8. 发明授权

US08113084B2 Mounting device 有权
标题翻译：安装装置
公开(公告)号：US08113084B2
公开(公告)日：2012-02-14
申请号：US12020655
申请日：2008-01-28
申请人： Kazuya Yano , Hiroshi Shimoyama , Masaru Suzuki
发明人： Kazuya Yano , Hiroshi Shimoyama , Masaru Suzuki
IPC分类号： G01R31/00
CPC分类号： G12B5/00 , Y10T74/20348
摘要： A mounting device includes a vertically movable mounting table for mounting thereon a target object and a rotational driving mechanism for rotating the mounting table within a predetermined angle. The mounting table is vertically raised and rotated by the rotational driving mechanism. The rotational driving mechanism includes a driving shaft extending in a tangential direction of the mounting table and a moving body moving in the tangential direction via the driving shaft. A first cam follower is attached in perpendicular to the moving body and a second cam follower is extending horizontally from an outer circumferential surface of the mounting table so as to be in contact with the first cam follower. Also, a resilient member connecting the mounting table and the moving body brings the first cam follower and the second cam follower into elastic contact with each other.
摘要翻译：安装装置包括用于安装目标物体的可垂直移动的安装台和用于使安装台旋转预定角度的旋转驱动机构。安装台由旋转驱动机构垂直升高并旋转。旋转驱动机构包括沿着安装台的切线方向延伸的驱动轴和经由驱动轴沿切线方向移动的移动体。第一凸轮从动件垂直于移动体附接，第二凸轮从动件从安装台的外周面水平延伸，以与第一凸轮从动件接触。此外，连接安装台和移动体的弹性构件使第一凸轮从动件和第二凸轮从动件彼此弹性接触。

9. 发明授权

US07909639B2 Electrical connector for flat cable 有权
标题翻译：扁平电缆用电连接器
公开(公告)号：US07909639B2
公开(公告)日：2011-03-22
申请号：US12087144
申请日：2006-12-27
申请人： Hideyuki Hirata , Hiroshi Shimoyama
发明人： Hideyuki Hirata , Hiroshi Shimoyama
IPC分类号： H01R12/24
CPC分类号： H01R12/88 , H01R12/57 , H01R12/707
摘要： An electrical connector for a flat sheet-like cable includes an insulative housing with a plurality of terminals and an actuator. The actuator is moveable between a first insertion position and a second operational position, the first position permitting insertion of the cable into the connector and the second position configured such that the contact pads of the cable engage the contact portions of the terminals. The actuator has an abutting part formed on opposite ends thereof. A pair of generally planar securing members is provided at opposite ends of the housing. Each securing member includes a stop surface to define a depth to which the cable may be inserted, a restraining member that interacts with the abutting parts upon positioning the actuator in the second position to define a restraining surface to prevent removal of the cable, and a recess portion defined between the stop surface and the restraining surface.
摘要翻译：用于平板状电缆的电连接器包括具有多个端子和致动器的绝缘壳体。所述致动器可在第一插入位置和第二操作位置之间移动，所述第一位置允许所述电缆插入所述连接器中，并且所述第二位置被配置为使得所述电缆的接触垫接合所述端子的接触部分。致动器具有形成在其相对端上的抵接部。一对大体上平面的固定构件设置在壳体的相对端。每个固定构件包括限定表面以限定电缆可插入的深度;限制构件，其在将致动器定位在第二位置时与抵接部分相互作用以限定阻止表面以防止电缆的移除;以及限定在止动表面和约束表面之间的凹部。

10. 发明申请

US20090221178A1 Electrical Connector for Flat Cable 有权
标题翻译：扁平电缆用电连接器
公开(公告)号：US20090221178A1
公开(公告)日：2009-09-03
申请号：US12087144
申请日：2006-12-27
申请人： Hideyuki Hirata , Hiroshi Shimoyama
发明人： Hideyuki Hirata , Hiroshi Shimoyama
IPC分类号： H01R12/24
CPC分类号： H01R12/88 , H01R12/57 , H01R12/707
摘要： An electrical connector for a flat sheet-like cable includes an insulative housing with a plurality of terminals and an actuator. The actuator is moveable between a first insertion position and a second operational position with the first position permitting insertion of the cable into the connector and the second position being configured such that the contact pads of the cable engage the contact portions of the terminals. The actuator has an abutting part formed on opposite ends thereof. A pair of generally planar securing members is provided at opposite ends of the housing. Each securing member includes a stop surface to define a depth to which the cable may be inserted, a restraining member that interacts with said abutting part of said actuator upon positioning said actuator in the second position to define a restraining surface to prevent removal of said cable and a recess portion defined between the stop surface and said restraining surface.
摘要翻译：用于平板状电缆的电连接器包括具有多个端子和致动器的绝缘壳体。致动器可在第一插入位置和第二操作位置之间移动，其中第一位置允许电缆插入连接器中，并且第二位置被配置为使得电缆的接触垫接合端子的接触部分。致动器具有形成在其相对端上的抵接部。一对大体上平面的固定构件设置在壳体的相对端。每个固定构件包括限定表面以限定电缆可以插入的深度;限制构件，其在将所述致动器定位在第二位置时与所述致动器的所述邻接部分相互作用，以限定约束表面以防止所述电缆以及限定在所述止动表面和所述约束表面之间的凹部。

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