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    • 8. 发明授权
    • Semiconductor memory device having pillar structures
    • 具有柱结构的半导体存储器件
    • US08274112B2
    • 2012-09-25
    • US12689258
    • 2010-01-19
    • Hui-Jung KimYong-Chul OhHyun-Woo ChungHyun-Gi KimKang-Uk Kim
    • Hui-Jung KimYong-Chul OhHyun-Woo ChungHyun-Gi KimKang-Uk Kim
    • H01L29/78
    • H01L27/10808H01L27/10855H01L27/10873H01L27/10885
    • A semiconductor memory device includes first and second active pillar structures protruding at an upper part of a substrate, buried bit lines each extending in a first direction, and first gate patterns and second gate patterns each extending in a second direction. The first and second active pillar structures occupy odd-numbered and even-numbered rows, respectively. The first and the second active pillar structures also occupy even-numbered and odd-numbered columns, respectively. The columns of the second active pillar structures are offset in the second direction from the columns of the first active pillar structures. Each buried bit line is connected to lower portions of the first active pillar structures which occupy one of the even-numbered columns and to lower portions of the second active pillar structures which occupy an adjacent one of the odd-numbered columns.
    • 半导体存储器件包括在衬底的上部突出的第一和第二有源柱结构,每个沿第一方向延伸的掩埋位线以及分别沿第二方向延伸的第一栅极图案和第二栅极图案。 第一和第二主动柱结构分别占据奇数和偶数行。 第一和第二主动支柱结构也分别占据偶数和奇数列。 第二有源柱结构的列在与第一有源柱结构的列相反的第二方向上偏移。 每个埋置的位线连接到占据偶数列中的一个的第一有源柱结构的下部和占据奇数列中的相邻一个的第二有源支柱结构的下部。