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    • 2. 发明授权
    • Power semiconductor device and method of manufacturing the same
    • 功率半导体器件及其制造方法
    • US07554155B2
    • 2009-06-30
    • US11250441
    • 2005-10-17
    • Wataru SaitoIchiro Omura
    • Wataru SaitoIchiro Omura
    • H01L29/00
    • H01L29/7813H01L29/0634H01L29/0638H01L29/0878H01L29/407H01L29/4238H01L29/66734H01L29/7811
    • A power semiconductor device has a first main electrode formed along a surface of a substrate, a first semiconductor layer of first conductive type electrically connected to the first main electrode, a cyclic structure section which is formed on the first semiconductor layer and has second semiconductor layers of first conductive type and third semiconductor layers of second conductive type alternately and cyclically formed along the surface of the substrate, a fourth semiconductor layer of second conductive type selectively formed on a part of the second and third semiconductor layers, a fifth semiconductor layer of first conductive type selectively formed on the fourth semiconductor layer, a second main electrode contacted the fourth and fifth semiconductor layers, a control electrode disposed adjacent via a first insulating film on the second, fourth and fifth semiconductor layers, and a depletion layer blocking section which is formed outside of the cyclic structure section and prevents a depletion layer from spreading outside, wherein the depletion layer blocking section includes a conductive layer formed via a second insulating film in a first trench formed outside of the outermost third semiconductor layer in the cyclic structure section.
    • 功率半导体器件具有沿着基板的表面形成的第一主电极,与第一主电极电连接的第一导电型的第一半导体层,形成在第一半导体层上的具有第二半导体层 的第一导电类型和第二导电类型的第三半导体层沿着衬底的表面交替且循环地形成,第二导电类型的第四半导体层选择性地形成在第二和第三半导体层的一部分上,第一半导体层的第一半导体层 导电型,选择性地形成在第四半导体层上,第二主电极与第四和第五半导体层接触;控制电极,其经由第二,第四和第五半导体层上的第一绝缘膜邻近设置;以及耗尽层阻挡部, 形成在循环结构部分外部和前部 耗尽层扩散到外部,其中耗尽层阻挡部分包括在循环结构部分中形成在最外侧第三半导体层外侧的第一沟槽中的第二绝缘膜形成的导电层。