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1. 发明申请

US20100110540A1 VARIABLE MAGNIFICATION OPTICS WITH SPRAY COOLING 有权
标题翻译：具有喷雾冷却功能的可变放大光学
公开(公告)号：US20100110540A1
公开(公告)日：2010-05-06
申请号：US12610235
申请日：2009-10-30
申请人： Israel Niv , Prasad Sabbineni , Thomas Kujawa
发明人： Israel Niv , Prasad Sabbineni , Thomas Kujawa
IPC分类号： G02B21/00
CPC分类号： G01R31/2877 , G01R31/311 , G02B7/16 , G02B21/248 , G02B21/28 , G02B21/33
摘要： A collection optics having variable magnification, and which enable changing magnification without stopping the spray cooling. The variable magnification is provided by a turret that carries several objectives of different magnifications. A frame is provided above the turret, wherein the spray cooling is provided. By rotating the turret and changing its elevation, different objectives of the turret can be “docked” to a docking port within the frame.
摘要翻译：具有可变放大率的收集光学器件，并且其能够在不停止喷雾冷却的情况下改变放大倍数。可变放大倍率是由一个转塔提供的，它具有不同放大倍数的几个目标。在转台上方设有一个框架，其中提供喷雾冷却。通过旋转炮塔并改变其高度，炮塔的不同目标可以“对接”到框架内的对接端口。

2. 发明授权

US4941980A System for measuring a topographical feature on a specimen 失效
标题翻译：用于测量样本上的地形特征的系统
公开(公告)号：US4941980A
公开(公告)日：1990-07-17
申请号：US312619
申请日：1989-02-17
申请人： Uriel Halavee , Israel Niv , Tzila Schwarzkopf
发明人： Uriel Halavee , Israel Niv , Tzila Schwarzkopf
IPC分类号： H01J37/28
CPC分类号： H01J37/28
摘要： A system for measuring a topographical feature on a specimen including apparatus for scanning an electron beam across the feature at high speed, first and second electron detector apparatus organized in pairs, apparatus for signal processing of a first signal received from the first electron detector apparatus thereby to identify elements of a cross-sectional profile of the feature, apparatus for signal processing of a second signal received from the second electron detector apparatus generally separately from the signal processing of the first signal thereby to identify elements of a cross-sectional profile of the feature, and apparatus for incorporating the elements identified from the first electron detector apparatus and the elements identified from the second electron detector apparatus thereby to produce a composite picture of the feature.
摘要翻译：一种用于测量样本上的形貌特征的系统，包括用于扫描高速特征的电子束的装置，成对组织的第一和第二电子检测器装置，用于信号处理从第一电子检测器装置接收的第一信号的装置以识别特征的横截面轮廓的元件，用于信号处理从第二电子检测器装置接收的第二信号的装置，大体上与第一信号的信号处理分开，从而识别出第一信号的横截面轮廓的元件特征和装置，用于结合从第一电子检测器装置识别的元件和从第二电子检测器装置识别的元件，从而产生该特征的复合图像。

3. 发明授权

US08553322B2 Variable magnification optics with spray cooling 有权
标题翻译：具有喷雾冷却的可变放大光学元件
公开(公告)号：US08553322B2
公开(公告)日：2013-10-08
申请号：US12610235
申请日：2009-10-30
申请人： Israel Niv , Prasad Sabbineni , Thomas Kujawa
发明人： Israel Niv , Prasad Sabbineni , Thomas Kujawa
IPC分类号： G02B21/00
CPC分类号： G01R31/2877 , G01R31/311 , G02B7/16 , G02B21/248 , G02B21/28 , G02B21/33
摘要： A collection optics having variable magnification, and which enable changing magnification without stopping the spray cooling. The variable magnification is provided by a turret that carries several objectives of different magnifications. A frame is provided above the turret, wherein the spray cooling is provided. By rotating the turret and changing its elevation, different objectives of the turret can be “docked” to a docking port within the frame.
摘要翻译：具有可变放大率的收集光学器件，并且其能够在不停止喷雾冷却的情况下改变放大倍数。可变放大倍率是由一个转塔提供的，它具有不同放大倍数的几个目标。在转台上方设有一个框架，其中提供喷雾冷却。通过旋转炮塔并改变其高度，炮塔的不同目标可以“对接”到框架内的对接端口。

4. 发明授权

US06956365B2 System and method for calibration of testing equipment using device photoemission 失效
标题翻译：使用装置光电发射校准测试设备的系统和方法
公开(公告)号：US06956365B2
公开(公告)日：2005-10-18
申请号：US10408988
申请日：2003-04-08
申请人： Israel Niv , Steven Kasapi
发明人： Israel Niv , Steven Kasapi
IPC分类号： G01R31/311 , G01R31/319 , G01R31/3193 , G01R35/00 , G01R35/04
CPC分类号： G01R31/3191 , G01R31/311 , G01R31/31937 , G01R35/005
摘要： A system and method for calibration of a commercial semiconductor test system (tester). The system receives a synchronization signal from the tester and detects light emission from a device under test (DUT). The system then compares the timing and characteristics of the light emission to the synchronization signal to obtain a delay timing and signal change caused by intermediate elements of the tester. The delay timing and signal change are used to calibrate the various channels of the tester. Also described are various designs for DUT's to obtained enhanced accuracy of the delay timing. Further, a system and method are described for reconstruction of a test signal and study of the effects of intermediate elements of the tester on the shape of the test signal.
摘要翻译：用于商业半导体测试系统（测试仪）的校准的系统和方法。系统从测试仪接收同步信号，并检测被测设备（DUT）的发光。然后，该系统将发光的时序和特性与同步信号进行比较，以获得由测试仪的中间元件引起的延迟定时和信号变化。延时定时和信号变化用于校准测试仪的各种通道。还描述了DUT的各种设计，以获得延迟定时的增强的精度。此外，描述了用于重建测试信号并研究测试仪的中间元件对测试信号的形状的影响的系统和方法。

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