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    • 4. 发明授权
    • Microphone array diffracting structure
    • 麦克风阵列衍射结构
    • US07366310B2
    • 2008-04-29
    • US11421934
    • 2006-06-02
    • Michael R. StinsonJames G. Ryan
    • Michael R. StinsonJames G. Ryan
    • H04R3/00H04R1/02H04R25/00H04R9/08
    • H04R1/406H04R25/405H04R25/407H04R2430/20
    • The present invention increases the aperture size of a microphone array by introducing a diffracting structure into the interior of a microphone array. The diffracting structure within the array modifies both the amplitude and phase of the acoustic signal reaching the microphones. The diffracting structure increases acoustic shadowing along with the signal's travel time around the structure. The diffracting structure in the array effectively increases the aperture size of the array and thereby increases the directivity of the array. Constructing the surface of the diffracting structure such that surface waves can form over the surface further increases the travel time and modifies the amplitude of the acoustical signal thereby allowing a larger effective aperture for the array.
    • 本发明通过将衍射结构引入麦克风阵列的内部来增加麦克风阵列的孔径尺寸。 阵列内的衍射结构改变到达麦克风的声信号的振幅和相位。 衍射结构随着信号围绕结构的行进时间增加了声阴影。 阵列中的衍射结构有效地增加阵列的孔径尺寸,从而增加阵列的方向性。 构造衍射结构的表面,使得表面波可以在表面上形成进一步增加行进时间并改变声信号的幅度,从而允许阵列的较大的有效孔径。
    • 6. 发明申请
    • Digital hearing aid system
    • 数字助听器系统
    • US20050232452A1
    • 2005-10-20
    • US11150896
    • 2005-06-13
    • Stephen W. ArmstrongFrederick E. SykesDavid R. BrownJames G. Ryan
    • Stephen W. ArmstrongFrederick E. SykesDavid R. BrownJames G. Ryan
    • H04R25/00
    • H04R25/407H04R25/356H04R25/453H04R25/505H04R2225/43H04R2460/05
    • A digital hearing aid is provided that includes front and rear microphones, a sound processor, and a speaker. Embodiments of the digital hearing aid include an occlusion subsystem, and a directional processor and headroom expander. The front microphone receives a front microphone acoustical signal and generates a front microphone analog signal. The rear microphone receives a rear microphone acoustical signal and generates a rear microphone analog signal. The front and rear microphone analog signals are converted into the digital domain, and at least the front microphone signal is coupled to the sound processor. The sound processor selectively modifies the signal characteristics and generates a processed signal. The processed signal is coupled to the speaker which converts the signal to an acoustical hearing aid output signal that is directed into the ear canal of the digital hearing aid user. The occlusion sub-system compensates for the amplification of the digital hearing aid user's own voice within the ear canal. The directional processor and headroom expander optimizes the gain applied to the acoustical signals received by the digital hearing aid and combine the amplified signals into a directionally-sensitive response.
    • 提供了一种数字助听器,包括前置和后置麦克风,声音处理器和扬声器。 数字助听器的实施例包括遮挡子系统以及定向处理器和净空扩展器。 前麦克风接收前麦克风声信号并产生前麦克风模拟信号。 后麦克风接收后麦克风声音信号并产生后麦克风模拟信号。 前和后麦克风模拟信号被转换成数字域,并且至少前麦克风信号耦合到声音处理器。 声音处理器选择性地修改信号特性并产生处理的信号。 经处理的信号耦合到扬声器,扬声器将该信号转换成被引导到数字助听器用户的耳道中的声学助听器输出信号。 闭塞子系统补偿耳道内数字助听器用户自己的声音的放大。 定向处理器和净空扩展器优化了应用于由数字助听器接收的声学信号的增益,并将放大的信号组合成方向敏感的响应。
    • 7. 发明授权
    • Apparatus for processing semiconductor wafers
    • 半导体晶圆处理装置
    • US5593537A
    • 1997-01-14
    • US613944
    • 1996-03-13
    • William J. CoteJames G. RyanKatsuya OkumuraHiroyuki Yano
    • William J. CoteJames G. RyanKatsuya OkumuraHiroyuki Yano
    • H01L21/304B24B37/04B24D13/14H01L21/00
    • B24B37/26B24B37/04Y10S451/921
    • The invention is directed to a semi-conductor wafer processing machine including an arm having a wafer carrier disposed at one end. The wafer carrier is rotatable with the rotating motion imparted to a semi-conductor wafer held thereon. In first embodiment, the machine further includes a rotatable polishing pad having an upper surface divided into a plurality of wedge-shaped sections, including an abrasion section and a polishing section. The abrasion section has a relatively rough texture and the polishing section has a relatively fine texture as compared to each other. In an alternative embodiment, the pad includes an underlayer and surface layer. The surface layer includes two sections of differing hardness, both of which are harder than the underlayer. Alternatively, the surface layer may include one relatively hard section, and the underlayer may include two sections, one of which has the same hardness as the surface layer and the other of which is softer than the surface layer. In a further embodiment, the polishing pad has an annular shape, and a chemical processing table is disposed within the open central region of the pad.
    • 本发明涉及一种半导体晶片加工机械,其包括具有设置在其一端的晶片载体的臂。 晶片载体可转动,转动运动被施加到保持在其上的半导体晶片。 在第一实施例中,机器还包括可旋转的抛光垫,其具有被分成多个楔形部分的上表面,该楔形部分包括磨损部分和抛光部分。 磨损部分具有相对粗糙的结构,并且抛光部分具有相对于彼此相对较细的结构。 在替代实施例中,垫包括底层和表面层。 表面层包括两个不同于硬度的部分,它们都比底层更硬。 或者,表面层可以包括一个相对硬的部分,并且底层可以包括两个部分,其中一个部分具有与表面层相同的硬度,而另一个部分比表面层更软。 在另一实施例中,抛光垫具有环形形状,并且化学处理台设置在垫的开放中心区域内。
    • 8. 发明授权
    • Fuse link structures through the addition of dummy structures
    • 保险丝连接结构通过添加虚拟结构
    • US5589706A
    • 1996-12-31
    • US455811
    • 1995-05-31
    • Alexander MitwalskyJames G. Ryan
    • Alexander MitwalskyJames G. Ryan
    • B23K26/00B23K26/38H01L21/304H01L21/82H01L21/822H01L23/525H01L27/04H01L27/10
    • H01L23/5258H01L2924/0002Y10S438/926Y10S438/952
    • An improved etch behavior is promoted to generate vertical sidewalls for fuse links that will promote reliable and repeatable laser cutting of the fuse links. In one embodiment, dummy structures are added adjacent to fuse links in order to obtain the vertical sidewalls for reliable fuse deletion. The dummy structures form no part of the fuse or circuit structure but, because of the proximity of the dummy structures to the fuse links, vertical sidewalls are promoted in a reactive ion etch which is used to form the fuse array. In another embodiment, the vertical sidewalls of the fuse links are achieved in a damascene process in which grooves are formed in an oxide layer and filled with a metal. These grooves correspond to the fuse links and alternating dummy structures. Once filled, the surface is planarized using a chemical-mechanical process. The dummy structures provide reinforcement for the metallization (metal and dielectric film), maintaining the integrity of the metallization. In both embodiments, the vertical sidewalls and constant height of the resulting fuse links promote reliable laser cutting.
    • 促进改进的蚀刻行为以产生熔丝链的垂直侧壁,这将促进熔丝链的可靠和可重复的激光切割。 在一个实施例中,虚拟结构被添加到熔丝链附近,以便获得用于可靠熔丝删除的垂直侧壁。 虚拟结构不构成熔丝或电路结构的一部分,但是由于虚设结构与熔丝链的接近,因此在用于形成熔丝阵列的反应离子蚀刻中促进垂直侧壁。 在另一个实施例中,熔丝链的垂直侧壁在镶嵌工艺中实现,其中凹槽形成在氧化物层中并填充有金属。 这些槽对应于熔断体和交替的虚拟结构。 填充后,使用化学 - 机械方法将表面平坦化。 虚拟结构为金属化(金属和介电膜)提供加强,保持金属化的完整性。 在两个实施例中,所产生的熔断体的垂直侧壁和恒定的高度促进了可靠的激光切割。
    • 9. 发明授权
    • Gray level mask
    • 灰度级面罩
    • US5334467A
    • 1994-08-02
    • US22516
    • 1993-02-25
    • John E. CroninPaul A. Farrar, Sr.Carter W. KaantaJames G. RyanAndrew J. Watts
    • John E. CroninPaul A. Farrar, Sr.Carter W. KaantaJames G. RyanAndrew J. Watts
    • G03F1/00G03F7/00G03F9/00H01L21/027
    • G03F7/0035G03F1/50
    • A gray level mask suitable for photolithography is constructed of a transparent glass substrate which supports plural levels of materials having different optical transmissivities. In the case of a mask employing only two of these levels, one level may be constructed of a glass made partially transmissive by substitution of silver ions in place of metal ions of alkali metal silicates employed in the construction of the glass. The second layer may be made opaque by construction of the layer of a metal such as chromium. The mask is fabricated with the aid of a photoresist structure which is etched in specific regions by photolithographic masking to enable selective etching of exposed regions of the level of materials of differing optical transmissivities. Various etches are employed for selective etching of the photoresist, the metal of one of the layers, and the glass of the other of the layers. The etches include plasma etch with chloride ions to attack the chromium of the opaque layer, compounds of fluorine to attack the glass layer, and reactive ion etching with oxygen to attack the photoresist structure. Also, developer is employed for etching on hardened regions of resist in the photoresist structure.
    • 适用于光刻的灰度级掩模由透明玻璃基板构成,该透明玻璃基板支持具有不同透光率的多层材料。 在仅使用这些水平中的两个的掩模的情况下,一个层可以由通过取代银离子代替在玻璃的结构中使用的碱金属硅酸盐的金属离子而部分透射的玻璃构成。 第二层可以通过金属如铬的构造而变得不透明。 借助于光致抗蚀剂结构制造掩模,该光致抗蚀剂结构通过光刻掩模在特定区域中被蚀刻,以使得能够选择性地蚀刻具有不同光学透射率的材料层的暴露区域。 各种蚀刻用于选择性蚀刻光致抗蚀剂,其中一层的金属和另一层的玻璃。 蚀刻包括用氯离子等离子体蚀刻以侵蚀不透明层的铬,氟的化合物侵蚀玻璃层,以及用氧反应离子蚀刻以侵蚀光致抗蚀剂结构。 此外,显影剂用于蚀刻光致抗蚀剂结构中的抗蚀剂的硬化区域。
    • 10. 发明授权
    • Cooling microfan arrangements and process
    • 冷却微管安排和工艺
    • US5296775A
    • 1994-03-22
    • US950621
    • 1992-09-24
    • John E. CroninRosemary A. Previti-KellyJames G. RyanTimothy D. Sullivan
    • John E. CroninRosemary A. Previti-KellyJames G. RyanTimothy D. Sullivan
    • F04D25/08H02N1/00
    • F04D25/08H02N1/004
    • A micro electrostatic cooling fan arrangement is provided which includes a heat source having a planar surface, a stator attached to the heat source, an axle attached to the heat source and spaced from the stator, a rotary element including a hub having an aperture therein and a fan blade, the axle passing through the aperture of the hub and the fan blade having a major surface thereof disposed at an angle with respect to the surface of the heat source and attached to the hub at one end, with the other end of the fan blade being adjacent to but spaced from the stator and a voltage source applied to the stator having sufficient voltage to charge the fan blade.Also, a process is provided for making a microfan which includes forming a strip of sacrificial material on a planar surface of a heat source, applying a spin on insulating layer over the heat source and the strip for producing a sloping surface extending from about the top of the strip toward the planar surface of the heat source, applying a layer of conductive material on the sloping surface and strip and defining from the layer of conductive material a fan blade on the sloping surface of the spin on insulating layer and a stator at one end of the fan blade.
    • 提供一种微静电冷却风扇装置,其包括具有平坦表面的热源,附接到热源的定子,附接到热源并与定子间隔开的轴;旋转元件,包括其中具有孔的旋转元件, 风扇叶片,通过轮毂的孔的轴和风扇叶片的主表面相对于热源的表面设置成一定角度并且在一端附接到轮毂,而另一端 风扇叶片与定子相邻但间隔开,并且施加到定子的电压源具有足够的电压以对风扇叶片充电。 此外,提供了一种制造微纤维的方法,其包括在热源的平坦表面上形成牺牲材料条,在绝热层上施加旋涂在热源和带上,用于产生从顶部延伸的倾斜表面 的条带朝向热源的平面表面,在倾斜表面上施加一层导电材料,并且从导电材料层划分并限定绝缘层上的自旋的倾斜表面上的风扇叶片和一个定子上的风扇叶片 风扇叶片的末端。