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    • 1. 发明授权
    • Sealed reactant gas inlet for a CVI/CVD furnace
    • 用于CVI / CVD炉的密封反应气入口
    • US6162298A
    • 2000-12-19
    • US178432
    • 1998-10-28
    • James Warren Rudolph
    • James Warren Rudolph
    • C23C16/04C23C16/455C23C16/00
    • C23C16/455C23C16/045
    • The invention is relates to CVI/CVD furnace apparatus. More specifically, the invention is directed to a sealed gas inlet for a high temperature CVI/CVD furnace. A method and apparatus are provided for preventing gas leakage around a gas inlet extending through a hole in a susceptor floor in a CVI/CVD furnace. According to the invention, the gas inlet is sealed to the susceptor floor with sufficient intimacy to block leakage of gas through the hole around the gas inlet while allowing the gas inlet to cyclically translate through the hole due to thermal expansion and contraction induced by thermal cycles in the CVI/CVD furnace.
    • 本发明涉及CVI / CVD炉装置。 更具体地,本发明涉及用于高温CVI / CVD炉的密封气体入口。 提供了一种方法和装置,用于防止在CVI / CVD炉中的基座底部的孔中延伸的气体入口周围的气体泄漏。 根据本发明,气体入口以足够的亲密度密封到基座地板上,以阻止气体通过气体入口周围的孔的泄漏,同时允许气体入口由于热循环引起的热膨胀和收缩而循环地平移通过孔 在CVI / CVD炉中。