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    • 1. 发明授权
    • Method of inspecting defects in circuit pattern of substrate
    • 检查基板电路图形缺陷的方法
    • US08111389B2
    • 2012-02-07
    • US12717688
    • 2010-03-04
    • Seung Seoup LeeTak Gyum KimJin Won Park
    • Seung Seoup LeeTak Gyum KimJin Won Park
    • G01N21/00
    • G01N21/95684G01R31/309
    • Disclosed herein is a method of inspecting defects in a circuit pattern of a substrate. At least one laser beam radiation unit for radiating a laser beam onto an inspection target circuit pattern of a substrate in a non-contact manner is prepared. A probe beam radiation unit for radiating a probe beam onto a connection circuit pattern to be electrically connected to the inspection target circuit pattern in a non-contact manner is prepared. The laser beam is radiated onto the inspection target circuit pattern using the laser beam radiation unit. The probe beam is radiated onto the connection circuit pattern using the probe beam radiation unit, thus measuring information about whether the probe beam is diffracted, and a diffraction angle. Accordingly, the method can solve problems such as erroneous measurements caused by contact pressure and can reduce the time required for measurements.
    • 本文公开了一种检查基板的电路图案中的缺陷的方法。 制备用于以非接触方式将激光束照射到基板的检查对象电路图案上的至少一个激光束辐射单元。 准备用于以不接触的方式将探测光束照射到连接电路图案以电连接到检查对象电路图案的探测光束辐射单元。 使用激光束辐射单元将激光束照射到检查对象电路图案上。 使用探测光束辐射单元将探测光束照射到连接电路图案上,从而测量关于探针光束是否衍射的信息和衍射角。 因此,该方法可以解决诸如由接触压力引起的误差测量等问题,并且可以减少测量所需的时间。
    • 5. 发明申请
    • DISPLAY PANEL
    • 显示面板
    • US20070268437A1
    • 2007-11-22
    • US11747014
    • 2007-05-10
    • Mee-Hye JungJi-Won SohnSung-Hoon YangJin-Won ParkSeon-Ah Cho
    • Mee-Hye JungJi-Won SohnSung-Hoon YangJin-Won ParkSeon-Ah Cho
    • G02F1/1337
    • G02F1/1343G02F1/133707G02F1/1393
    • In a liquid crystal display device, the device includes a first substrate, a second substrate and a liquid crystal layer interposed therebetween. The first substrate includes a pixel electrode, a thin film transistor connected to the pixel electrode, and also a hitch to connect both a lower and upper electrode of the pixel electrode. The second substrate includes a common electrode having a lower domain division part and an upper domain division part, in which each of domain division part is formed at the position corresponding to the lower and upper electrode of the pixel electrode, respectively. Through the electric field controller connected at both sides of the upper electrode of the pixel electrode, quality of display image can improve without a darkening area occurring at one part of the unit pixel.
    • 在液晶显示装置中,该装置包括第一基板,第二基板和插入其间的液晶层。 第一基板包括像素电极,连接到像素电极的薄膜晶体管,以及连接像素电极的下电极和上电极的连接。 第二基板包括具有下畴分割部分和上畴分割部分的公共电极,其中每个畴分割部分分别形成在与像素电极的下电极和上电极相对应的位置。 通过连接在像素电极的上部电极的两侧的电场控制器,可以改善显示图像的质量,而不会在单位像素的一部分处发生变暗区域。
    • 9. 发明申请
    • SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME
    • 半导体器件及其形成方法
    • US20120001255A1
    • 2012-01-05
    • US12957100
    • 2010-11-30
    • Jin Won PARK
    • Jin Won PARK
    • H01L29/78H01L21/302
    • H01L27/10876H01L29/66666
    • The present invention relates to a semiconductor device and a method of manufacture thereof, particularly, to a semiconductor device including a vertical type gate and a method of forming the same. According to the present invention, a semiconductor device includes a vertical pillar which is protruded from a semiconductor substrate, has a vertical channel, and has a first width; an insulating layer which has a second width smaller than the first width, provided in both sides of the vertical pillar which is adjacent in a first direction; and a nitride film provided in a side wall of the insulating layer.
    • 半导体器件及其制造方法技术领域本发明涉及一种半导体器件及其制造方法,特别涉及包括垂直型栅极的半导体器件及其形成方法。 根据本发明,半导体器件包括从半导体衬底突出的垂直柱,具有垂直沟道,并具有第一宽度; 绝缘层,其具有比所述第一宽度小的第二宽度,设置在所述垂直柱的在第一方向上相邻的两侧; 以及设置在绝缘层的侧壁中的氮化物膜。