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1. 发明授权

US09372079B1 Optical plate for calibration of coordinate measuring machines 有权
标题翻译：用于校准坐标测量机的光学板
公开(公告)号：US09372079B1
公开(公告)日：2016-06-21
申请号：US14582534
申请日：2014-12-24
申请人： Tay-Chang Wu , Jaime Duran , John Christopher Boney , Shawn David McDermed , Joanna Schmit , Son Hoang Bui , Matthew Jarrod Novak
发明人： Tay-Chang Wu , Jaime Duran , John Christopher Boney , Shawn David McDermed , Joanna Schmit , Son Hoang Bui , Matthew Jarrod Novak
IPC分类号： G01B5/008 , G01B21/04 , G01B11/00
CPC分类号： G01B21/042 , G01B3/30 , G01B11/005 , G01B11/2441
摘要： A coordinate measuring machine is calibrated by taking optical measurements of an optical flat that includes a grating placed on its surface. The arm of the CMM capable of multi-directional translation in relation to an object is fitted with a white-light interferometric objective and optical measurements are taken of the flat while translating the objective (or the flat) in the coordinate direction subject to calibration. The objective may serve also as the probe of the CMM.
摘要翻译：通过对包括放置在其表面上的光栅的光学平面进行光学测量来校准坐标测量机。能够相对于物体进行多向平移的CMM的臂装配有白光干涉物镜，并且在校准时沿坐标方向平移物镜（或平面）进行光学测量。目标也可以作为CMM的探测器。

2. 发明授权

US09282304B1 Full-color images produced by white-light interferometry 有权
标题翻译：通过白光干涉测量产生的全彩色图像
公开(公告)号：US09282304B1
公开(公告)日：2016-03-08
申请号：US14293662
申请日：2014-06-02
申请人： Joanna Schmit , Florin Munteanu
发明人： Joanna Schmit , Florin Munteanu
IPC分类号： H04N7/18 , H04N5/228 , H04N9/73 , G01B9/02 , H04N9/07
CPC分类号： H04N9/735 , G01B9/02041 , G02B21/0056 , H04N9/07 , H04N13/20 , H04N13/254 , H04N13/257
摘要： A true-color image of a sample is obtained from interference data captured with a color camera. The irradiance of each color on the respective photo-sensor represents the sum of DC components received from the object and the reference surface and a modulated interference component. The color is determined at each pixel by removing the interference component and the reference-surface component from the irradiance data. The color map so derived is then combined with the height map produced with the same data to yield a true-color 3D map of the sample.
摘要翻译：从彩色摄像机拍摄的干涉数据中获取样本的真彩色图像。相应光传感器上的每种颜色的辐照度表示从对象和参考表面接收的直流分量和调制干扰分量之和。通过从辐照度数据中去除干涉分量和参考表面分量，在每个像素处确定颜色。然后将如此导出的颜色图与与相同数据生成的高度图组合，以产生样品的真实3D图。

3. 发明授权

US08275573B1 Large-surface defect detection by single-frame spatial-carrier interferometry 有权
标题翻译：通过单帧空间载波干涉测量的大面缺陷检测
公开(公告)号：US08275573B1
公开(公告)日：2012-09-25
申请号：US12624284
申请日：2009-11-23
申请人： Joanna Schmit , Florin Munteanu
发明人： Joanna Schmit , Florin Munteanu
IPC分类号： G04F1/00 , G01B11/00 , G01B11/02
CPC分类号： G01B11/2441
摘要： An adaptive algorithm is tailored to fit the local fringe frequency of single-frame spatial-carrier data under analysis. Each set of data points used sequentially by the algorithm is first processed with a Fourier Transform to find the local frequency of the fringes being analyzed. That information is then used to adapt the algorithm to the correct phase step thus calculated, thereby optimizing the efficiency and precision with which the algorithm profiles the local surface area. As a result, defects are identified and measured with precision even when the slope of the surface varies locally to the point where the algorithm without adaptive modification would not be effective to measure them. Once so identified, the defects may be measured again locally with greater accuracy by conventional temporal PSI.
摘要翻译：一种自适应算法被定制以适应分析中单帧空间载波数据的局部边缘频率。首先使用傅里叶变换处理由算法顺序使用的每组数据点，以找到正在分析的条纹的本地频率。然后将该信息用于将算法适应于如此计算的正确相位步长，从而优化算法对局部表面积进行分析的效率和精度。结果，即使当表面的斜率局部变化到无自适应修改的算法对测量它们将无效时，也会精确地识别和测量缺陷。一旦这样确定，可以通过传统的时间PSI以更高的准确度再次局部地测量缺陷。

4. 发明授权

US08072610B1 Polarization mirau interference microscope 有权
标题翻译：极化mirau干涉显微镜
公开(公告)号：US08072610B1
公开(公告)日：2011-12-06
申请号：US12217015
申请日：2008-07-01
申请人： Joanna Schmit , Parameswaran Hariharan
发明人： Joanna Schmit , Parameswaran Hariharan
IPC分类号： G01B9/02
CPC分类号： G01B9/04 , G01B9/02057 , G01B9/02079 , G01B9/0209 , G01B21/14 , G01B2290/70
摘要： The conventional two plates with beamsplitter of the Mirau interferometer are replaced with two achromatic λ/4 retarders. The upper surface of the second retarder is coated with a 50 percent reflecting film, so that it also functions as a beamsplitter. The objective is illuminated with a linearly polarized beam. As a result of this arrangement, the test and reference beam emerging from the Mirau interferometer are orthogonally polarized beams suitable for achromatic phase shifting, thereby facilitating the use of the Mirau interferometer for monochromatic to broadband phase-shifting interference microscopy. Alternatively, it can be used for equalization of beams intensity by placing a rotatable polarizer at the exit of the objective.
摘要翻译：具有Mirau干涉仪的分光镜的常规两个板被两个消色差λ/ 4延迟器代替。第二延迟器的上表面涂覆有50％的反射膜，使其也用作分束器。物镜用线偏振光束照射。作为这种布置的结果，从Mirau干涉仪出射的测试和参考光束是适合于消色差相移的正交偏振光束，从而便于使用Mirau干涉仪进行单色到宽带相移干涉显微镜。或者，其可以通过将可旋转偏振器放置在物镜的出口处来用于光束强度的均衡。

5. 发明授权

US07505863B2 Interferometric iterative technique with bandwidth and numerical-aperture dependency 有权
公开(公告)号：US07505863B2
公开(公告)日：2009-03-17
申请号：US11827737
申请日：2007-07-13
申请人： Florin Munteanu , Joanna Schmit
发明人： Florin Munteanu , Joanna Schmit
IPC分类号： G06F3/00
CPC分类号： G01J3/45 , G01B9/02083
摘要： An interferometric intensity equation includes parameters that depend on bandwidth and numerical aperture. An error function based on the difference between actual intensities produced by interferometry and the intensities predicted by the equation is minimized iteratively with respect to the parameters. The scan positions (i.e., the step sizes between frames) that minimized the error function are then used to calculate the phase for each pixel, from which the height can also be calculated in conventional manner. As a result, the phase map generated by the procedure is corrected to a degree of precision significantly better than previously possible.

6. 发明申请

US20090018786A1 Interferometric iterative technique with bandwidth and numerical-aperture dependency 有权
标题翻译：具有带宽和数值孔径依赖性的干涉重复技术
公开(公告)号：US20090018786A1
公开(公告)日：2009-01-15
申请号：US11827737
申请日：2007-07-13
申请人： Florin Munteanu , Joanna Schmit
发明人： Florin Munteanu , Joanna Schmit
IPC分类号： G01R25/00 , G01R35/00
CPC分类号： G01J3/45 , G01B9/02083
摘要： An interferometric intensity equation includes parameters that depend on bandwidth and numerical aperture. An error function based on the difference between actual intensities produced by interferometry and the intensities predicted by the equation is minimized iteratively with respect to the parameters. The scan positions (i.e., the step sizes between frames) that minimized the error function are then used to calculate the phase for each pixel, from which the height can also be calculated in conventional manner. As a result, the phase map generated by the procedure is corrected to a degree of precision significantly better than previously possible.
摘要翻译：干涉强度方程包括依赖于带宽和数值孔径的参数。基于由干涉测量产生的实际强度与通过该方程预测的强度之间的差异的误差函数相对于参数被迭代地最小化。然后使用最小化误差函数的扫描位置（即，帧之间的步长）来计算每个像素的相位，从该高度也可以以常规方式计算高度。结果，通过该过程生成的相位映射被校正到明显比以前更好的精度。

7. 发明授权

US07119909B2 Film thickness and boundary characterization by interferometric profilometry 有权
标题翻译：薄膜厚度和通过干涉测量轮廓测定的边界表征
公开(公告)号：US07119909B2
公开(公告)日：2006-10-10
申请号：US10869138
申请日：2004-06-16
申请人： Paul R. Unruh , Joanna Schmit , Erik L. Novak
发明人： Paul R. Unruh , Joanna Schmit , Erik L. Novak
IPC分类号： G01B9/02 , G01B11/28
CPC分类号： G01B11/0675
摘要： Two threshold parameters are used to identify the intensity modulation peaks corresponding to the interfaces of the two sides of a thin film with the adjacent media. The first parameter is used to distinguish modulation data from noise and is set on the basis of actual background noise data measured during the interferometric scan. The second parameter is used to separate actual contrast data from signals of relatively high modulation that satisfy the first parameter but do not in fact result from interference fringes. Data that satisfy both parameters are considered valid modulation data and the peak of each modulation envelope is then calculated using conventional means. The thickness of the film at each pixel is obtained by dividing the scanning distance corresponding to the two peaks by the group index of refraction of the film material.
摘要翻译：使用两个阈值参数来识别与相邻介质的薄膜的两侧的界面相对应的强度调制峰值。第一个参数用于区分调制数据和噪声，并根据干涉扫描期间测量的实际背景噪声数据设置。第二个参数用于将实际的对比度数据与满足第一个参数的相对较高的调制信号进行分离，但实际上并不是由干扰条纹引起的。满足这两个参数的数据被认为是有效的调制数据，然后使用常规方法计算每个调制包络的峰值。通过将对应于两个峰的扫描距离除以膜材料的折射率折射率来获得每个像素处的膜的厚度。

8. 发明授权

US06987570B1 Reference signal for stitching of interferometric profiles 失效
标题翻译：用于缝合干涉型材的参考信号
公开(公告)号：US06987570B1
公开(公告)日：2006-01-17
申请号：US10109361
申请日：2002-03-28
申请人： Joanna Schmit , Artur Olszak
发明人： Joanna Schmit , Artur Olszak
IPC分类号： G01B9/02
CPC分类号： G01B11/2441 , G01B9/02057 , G01B9/02071 , G01B9/0209 , G01B2290/60 , G01J3/45
摘要： Composite height profiles are produced by taking successive interferometric measurements of different sections of a sample surface by sequentially placing them within the field of view of the instrument. A reference signal is used to provide a full history of scanner motion during each measurement scan. The reference signal is independent of the fringes collected for profile-measurement purposes and is used to produce a z-position history of the scan that is independent of scanner nonlinearities and other error sources. As a result, errors caused by scanner nonlinearity and lack of repeatability are removed from the process and it is possible to combine profiles of sections that are spatially disconnected without loss of precision attributable to scanner imperfections.
摘要翻译：通过将样品表面的不同部分顺序地放置在仪器的视场内，进行连续的干涉测量来产生复合高度分布。参考信号用于在每次测量扫描期间提供扫描仪运动的完整历史。参考信号独立于为了剖面测量目的收集的条纹，并用于产生独立于扫描仪非线性和其他误差源的扫描的z位置历史。结果，扫描仪非线性和缺乏可重复性导致的错误从该过程中消除，并且可以组合在空间上断开的部分的轮廓，而不损失可归因于扫描仪缺陷的精度。

9. 发明授权

US06847460B2 Alignment and correction template for optical profilometric measurement 有权
标题翻译：光学轮廓测量的对准和校正模板
公开(公告)号：US06847460B2
公开(公告)日：2005-01-25
申请号：US10262057
申请日：2002-10-01
申请人： Colin T. Farrell , Anthony L. Martinez , Joanna Schmit , Michael B. Krell
发明人： Colin T. Farrell , Anthony L. Martinez , Joanna Schmit , Michael B. Krell
IPC分类号： G11B5/187 , G11B5/455 , G11B5/60 , G02B9/02
CPC分类号： G11B5/1871 , G11B5/455 , G11B5/6005
摘要： An electronic template delineating distinct selected patterns corresponding to predetermined regions of interest in a sample part is used to limit analysis to those regions. The surface of the sample is first measured using conventional techniques. The data so acquired are used to identify boundaries between distinct regions, which are then compared to a predetermined pattern boundary in the template to find a best-fit match. The position of the pattern is then shifted to overlay the match, thereby automatically aligning the template's selected patterns with the regions of interest in the sample surface. As a result, profilometric analysis can be limited to the regions of interest. Correction factors are also assigned to each selected pattern in the template to account for physical differences in the corresponding regions of interest of the sample part that affect the profilometric measurement.
摘要翻译：使用描绘对应于样本部分中的预定感兴趣区域的不同选择模式的电子模板来限制对那些区域的分析。首先使用常规技术测量样品的表面。如此获取的数据用于识别不同区域之间的边界，然后将其与模板中的预定模式边界进行比较以找到最佳拟合匹配。然后移动图案的位置以覆盖匹配，从而自动将模板的选定图案与样本表面中的感兴趣区域对齐。因此，轮廓测量分析可以限于感兴趣的区域。校正因子也被分配给模板中的每个选定模式，以考虑影响轮廓测量测量的样品部分的相关感兴趣区域的物理差异。

10. 发明授权

US5991461A Selection process for sequentially combining multiple sets of overlapping surface-profile interferometric data to produce a continuous composite map 失效
标题翻译：用于顺序组合多组重叠表面轮廓干涉测量数据以产生连续复合图的选择过程
公开(公告)号：US5991461A
公开(公告)日：1999-11-23
申请号：US992310
申请日：1997-12-17
申请人： Mark A. Schmucker , Joanna Schmit
发明人： Mark A. Schmucker , Joanna Schmit
IPC分类号： G06T11/00 , G06K9/36
CPC分类号： G06T11/00
摘要： The process of combining various sets of measured data is carried out by first selecting a section of the test surface and its data set as the starting point and comparing the regions of overlap with adjacent sections of the test sample. All pixels containing an invalid data point in at least one of the data sets of each overlapping region are eliminated from consideration and the remaining valid pixels are counted. Then the adjacent section having an overlapping region with the largest number of valid pixels is selected for combination with the first section and their data sets are fitted according to a predetermined procedure, thereby producing an enlarged composite set of corrected data. The process is then repeated by comparing the overlapping regions of all sets adjacent to the composite section to determine the one having the largest number of pixels with valid data points. That set is then fitted to the existing composite profile to produce a new composite set of corrected data. These steps are repeated until the measured data corresponding to all sections are corrected and combined to produce a single uniform map of the sample surface.
摘要翻译：通过首先选择测试表面的一部分及其数据集作为起始点，并将重叠区域与测试样本的相邻部分进行比较，来实现组合各种测量数据的过程。在每个重叠区域的至少一个数据集中包含无效数据点的所有像素被排除在考虑之外，并且剩余的有效像素被计数。然后选择具有最大数目有效像素的重叠区域的相邻部分与第一部分组合，并且根据预定过程对其数据集进行拟合，由此产生经校正的数据的放大复合集合。然后通过比较与复合部分相邻的所有集合的重叠区域来重复该过程，以确定具有最大数量的具有有效数据点的像素数。然后将该集合拟合到现有的复合轮廓以产生新的复合组合的校正数据。重复这些步骤，直到对应于所有部分的测量数据被校正和组合以产生样品表面的单个均匀图。

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