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    • 4. 发明申请
    • Device for Fixing a Flat Object, in Particular a Substrate, to a Work Surface by Means of Low Pressure
    • 用于通过低压将平面物体,特别是基板固定到工作表面的装置
    • US20080224372A1
    • 2008-09-18
    • US11793266
    • 2005-12-20
    • Johannes Schuster
    • Johannes Schuster
    • B25B11/00
    • B25B11/005Y10T29/53091Y10T29/53191Y10T29/53265
    • An apparatus (1) for fixing a planar object, in particular a substrate (2), on a working area (4) by means of vacuum is provided with an at least partly transparent bearing plate (5), one side of which forms the working area and which has a rear side arranged at a distance from the working area with a radiation-reflecting structure (7). The bearing plate additionally has vacuum channels which can be connected to a vacuum line and which open into the working area. In order to illuminate the substrate as homogeneously as possible by means of transmitted light, at least one light source (10) is provided, the radiation of which can be fed into the bearing plate. In addition, the working area is preferably operatively connected to a heating apparatus (11), so that the substrate (2) can be heated.
    • 用于通过真空将平面物体特别是基板(2)固定在工作区域(4)上的装置(1)设置有至少部分透明的支承板(5),其一侧形成 工作区域,并且其背面与辐射反射结构(7)布置在距离工作区域一定距离处。 轴承板另外具有可连接到真空管线并且进入工作区域的真空通道。 为了通过透射光均匀地照射基板,提供至少一个光源(10),其辐射能够被馈送到轴承板中。 此外,工作区域优选地可操作地连接到加热装置(11),使得可以加热基板(2)。
    • 5. 发明授权
    • Device for fixing a flat object, in particular a substrate, to a work surface by means of low pressure
    • 用于通过低压将平坦物体特别是基底固定到工作表面的装置
    • US08082661B2
    • 2011-12-27
    • US11793266
    • 2005-12-20
    • Johannes Schuster
    • Johannes Schuster
    • B23P19/00
    • B25B11/005Y10T29/53091Y10T29/53191Y10T29/53265
    • An apparatus (1) for fixing a planar object, in particular a substrate (2), on a working area (4) by means of vacuum is provided with an at least partly transparent bearing plate (5), one side of which forms the working area and which has a rear side arranged at a distance from the working area with a radiation-reflecting structure (7). The bearing plate additionally has vacuum channels which can be connected to a vacuum line and which open into the working area. In order to illuminate the substrate as homogeneously as possible by means of transmitted light, at least one light source (10) is provided, the radiation of which can be fed into the bearing plate. In addition, the working area is preferably operatively connected to a heating apparatus (11), so that the substrate (2) can be heated.
    • 用于通过真空将平面物体特别是基板(2)固定在工作区域(4)上的装置(1)设置有至少部分透明的支承板(5),其一侧形成 工作区域,并且其背面与辐射反射结构(7)布置在距离工作区域一定距离处。 轴承板另外具有可连接到真空管线并且进入工作区域的真空通道。 为了通过透射光均匀地照射基板,提供至少一个光源(10),其辐射能够被馈送到轴承板中。 此外,工作区域优选地可操作地连接到加热装置(11),使得可以加热基板(2)。